Wide dynamic range and high speed voltage mode sensing for a multilevel digital non-volatile memory

ABSTRACT

A high speed voltage mode sensing is provided for a digital multibit non-volatile memory integrated system. An embodiment has a local source follower stage followed by a high speed common source stage. Another embodiment has a local source follower stage followed by a high speed source follower stage. Another embodiment has a common source stage followed by a source follower. An auto zeroing scheme is used. A capacitor sensing scheme is used. Multilevel parallel operation is described.

CROSS-REFERENCE TO RELATED APPLICATION

[0001] This is a continuation-in-part of application Ser. No.09/929,542, filed Aug. 13, 2001, which is a division of application Ser.No. 09/231,928 filed Jan. 14, 1999, issued as U.S. Pat. No. 6,282,145,the subject matter of each of these applications is incorporated hereinby reference.

FIELD OF THE INVENTION

[0002] This invention relates in general to semiconductor memories, and,in particular, to the design and operation of multilevel nonvolatilesemiconductor memories.

BACKGROUND OF THE INVENTION

[0003] As the information technology progresses, the demand for highdensity giga bit and tera bit memory integrated circuits is insatiablein emerging applications such as data storage for photo quality digitalfilm in multi-mega pixel digital camera, CD quality audio storage inaudio silicon recorder, portable data storage for instrumentation andportable personal computers, and voice, data, and video storage forwireless and wired phones and other personal communicating assistants.

[0004] The nonvolatile memory technology such as ROM (Read Only Memory),EEPROM (Electrical Erasable Programmable Read Only Memory), or FLASH isoften a technology of choice for these application due to itsnonvolatile nature, meaning it still retains the data even if the powersupplied to it is removed. This is in contrast with the volatile memorytechnology, such as DRAM (Dynamic Random Access Memory), which losesdata if the power supplied to it is removed. This nonvolatile feature isvery useful in saving the power from portable supplies, such asbatteries. Until battery technology advances drastically to ensuretypical electronic systems to function for a typical operating lifetime,e.g., 10 years, the nonvolatile technology will fill the needs for mostportable applications.

[0005] The FLASH technology, due to its smallest cell size, is thehighest density nonvolatile memory system currently available. Theadvance of the memory density is made possible by rapidly advancing theprocess technology into the realm of nano meter scale and possibly intothe atomic scale and electron scale into the next century. At thepresent sub-micro meter scale, the other method that makes the superhigh-density memory system possible is through the exploitation of theanalog nature of a storage element.

[0006] The analog nature of a flash or nonvolatile storage elementprovides, by theory, an enormous capability to store information. Forexample, if one electron could represent one bit of information then,for one typical conventional digital memory cell, the amount ofinformation is equal to the number of electrons stored, or approximatelya few hundred thousands. Advances in device physics exploring thequantum mechanical nature of the electronic structure will multiply theanalog information manifested in the quantum information of a singleelectron even further.

[0007] The storage information in a storage element is hereby defined asa discrete number of storage levels for binary digital signal processingwith the number of storage levels equal to 2^(N) with N equal to thenumber of digital binary bits. The optimum practical number of discretelevels stored in a nonvolatile storage element depends on the innovativecircuit design method and apparatus, the intrinsic and extrinsicbehavior of the storage element, all within constraints of a definiteperformance target, such as product speed and operating lifetime, with acertain cost penalty.

[0008] At the current state of the art, all the multilevel systems areonly suitable for medium density, i.e. less than a few tens of megabits, and only suitable for a small number of storage levels per cell,i.e., less than four levels or two digital bits.

[0009] As can be seen, memories having high storage capacity and fastoperating speed are highly desirable.

SUMMARY OF THE INVENTION

[0010] This invention describes the design method and apparatus for asuper high density nonvolatile memory system capable of giga to terabits as applied to the array architecture, reference system, anddecoding schemes to realize the optimum possible number of storagelevels within specified performance constraints. Method and apparatusfor multilevel program and sensing algorithm and system applied to flashmemory is also described in this invention. Details of the invention andalternative embodiments will be made apparent by the followingdescriptions.

[0011] The invention provides array architectures and operating methodssuitable for a super high density, in the giga to tera bits, formultilevel nonvolatile “green” memory integrated circuit system. “Green”refers to a system working in an efficient and low power consumptionmanner. The invention solves the issues associated with super highdensity multilevel memory system, such as, precision voltage control inthe array, severe capacitive loading from MOS transistor gates andparasitics, high leakage current due to memory cells and from cells tocells, excessive power consumption due to large number of gates andparasitics, and excessive memory cell disturbances due to large memorydensity.

[0012] An aspect of the invention provides an Inhibit and SelectSegmentation Scheme that makes use of a truly-floating-bitline scheme togreatly reduce the capacitance from junctions and parasiticinterconnects to a small value.

[0013] The invention also provides a Multilevel Memory Decoding schemewhich is capable of greater than 10-bit multilevel operation. TheMultilevel Memory Decoding Scheme includes the Power Supply DecodedDecoding Scheme, the Feedthrough-to-Memory Decoding Scheme, and theFeedthrough-to-Driver Decoding Scheme. The Multilevel Memory Decodingscheme also includes a “winner-take-all” Kelvin Decoding Scheme, whichprovides precise bias levels for the memory at a minimum cost. Theinvention also provides a constant-total-current-program scheme. Theinvention also provides fast-slow and 2-step ramp rate controlprogramming. The invention also presents reference system method andapparatus, which includes the Positional Linear Reference System,Positional Geometric Reference System, and the Geometric CompensationReference System. The invention also describes apparatus and method ofmultilevel programming, reading, and margining.

[0014] A sense amplifier system includes local sense amplifiers coupledto memory subarrays and global sense amplifiers coupled to groups oflocal sense amplifiers.

[0015] Method and apparatus described herein are applicable to digitalmultilevel as well as analog multilevel system.

[0016] The foregoing, together with other aspects of this invention,will become more apparent when referring to the following specification,claims, and accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

[0017]FIG. 1A is a cross section of a source side injection flash memorycell.

[0018]FIG. 1B is a transistor symbol corresponding to the source sideinjection flash memory cell shown in FIG. 1A.

[0019]FIG. 1C is a block diagram of a nonvolatile multilevel memorysystem.

[0020]FIG. 1D is a block diagram of an electronic camera systemutilizing a nonvolatile multilevel memory system.

[0021]FIG. 1E is a block diagram of an electronic audio system utilizinga nonvolatile multilevel memory system.

[0022]FIG. 2A is a block diagram of super high-density nonvolatilemultilevel memory integrated circuit system.

[0023]FIG. 2B is a block diagram of flash power management unit.

[0024]FIG. 2C shows voltage mode sensing.

[0025]FIG. 3A is a block diagram of super high-density nonvolatilemultilevel array architecture.

[0026]FIG. 3B is a page select circuit, which together with the segmentselect decoder selects one bitline at a time for each y-driver.

[0027]FIG. 3C is a block diagram of a multilevel sub-array block.

[0028]FIG. 4A is one embodiment of a nonvolatile multilevel array unitof inhibit and select segmentation.

[0029]FIG. 4B shows an alternate embodiment of the inhibit and selectsegmentation scheme.

[0030]FIG. 4C shows another alternate embodiment of the inhibit andselect segmentation scheme.

[0031]FIG. 4D shows another alternate embodiment of the inhibit andselect segmentation scheme.

[0032]FIG. 4E shows another alternate embodiment of the inhibit andselect segmentation scheme.

[0033]FIG. 4F shows another alternate embodiment of the inhibit andselect segmentation scheme.

[0034]FIG. 5A is a cross section of inhibit and select segmentationinterconnection.

[0035]FIG. 5B is a cross section of another embodiment of inhibit andselect segmentation interconnection.

[0036]FIG. 5C is a 2-step ramp rate control and fast-slow ramp ratecontrol.

[0037]FIG. 6 shows a block diagram of multilevel decoding.

[0038]FIG. 7 shows one segment decoder that includes segmented powersupply decoder, segmented bitline select decoder, inhibit decoder,segmented predecoded common line decoder, and control gate and controlline decoder.

[0039]FIG. 8 shows a segmented power supply decoder.

[0040]FIG. 9A shows a segmented bitline decoder.

[0041]FIG. 9B shows a segmented inhibit decoder.

[0042]FIG. 9C shows a segmented predecoded common line decoder.

[0043]FIG. 10 shows a sub-block decoder for control gate and common linemultilevel decoder.

[0044]FIG. 11A shows a sub-block of the circuit in FIG. 10 for fourcontrol gates and one common line multilevel decoder.

[0045]FIG. 11B shows another embodiment of sub-block for four controlgates and one common line multilevel decoder with winner-take-all Kelvinconnection.

[0046]FIG. 11C shows a circuit for one common line driver.

[0047]FIG. 12 shows a scheme of the feedthrough-to-driver andfeedthrough-to-memory multilevel precision decoding.

[0048]FIG. 13 shows a block diagram of a multilevel reference system.

[0049]FIG. 14 shows details of a block diagram of a multilevel referencesystem.

[0050]FIG. 15 shows a reference detection scheme.

[0051]FIG. 16 shows positional linear reference system.

[0052]FIG. 17 shows a positional geometric reference system.

[0053]FIG. 18 shows an embodiment of geometric compensation referencescheme.

[0054]FIG. 19A shows voltage levels for program verify, margin, read,and restore for one embodiment of the current invention.

[0055]FIG. 19B shows voltage levels for program verify, margin, read,and restore for an alternative embodiment of the current invention.

[0056]FIG. 20 shows an embodiment of flow diagram of the pageprogramming cycle.

[0057]FIG. 21 shows an embodiment of flow diagram after page programmingbegins.

[0058]FIG. 22A shows a continuation of flow diagram after pageprogramming begins.

[0059]FIG. 22B shows an alternative embodiment of continuation of flowdiagram after page programming begins shown in FIG. 22A.

[0060]FIG. 22C shows an alternate embodiment of the flow diagram shownin FIG. 22B.

[0061]FIG. 23 shows an embodiment of flow diagram of the page readcycle.

[0062]FIG. 24 shows a continuation of flow diagram of the page readcycle in FIG. 23.

[0063]FIG. 25 shows a continuation of flow diagram of the page readcycle in FIG. 24.

[0064]FIG. 26 shows details of an embodiment of a single y-driver YDRVS110S.

[0065]FIG. 27 shows details of a latch block, a program/read controlblock, and program/program inhibit block included in the single y-driverYDRVS 110S.

[0066]FIG. 28 is a block diagram illustrating a memory system for amultilevel memory.

[0067]FIG. 29A is a block diagram illustrating an inverter mode sensingcircuit.

[0068]FIG. 29B is a block diagram illustrating a voltage mode sensingcircuit.

[0069]FIG. 30 is a block diagram illustrating a wide range, high speedvoltage mode sensing circuit.

[0070]FIG. 31 is a block diagram illustrating a wide range, high speedmode sensing circuit having a local source follower stage and a globalcommon source stage.

[0071]FIG. 32 is a block diagram illustrating a wide range, high speedmode sensing circuit with a local PMOS source follower stage and aglobal source follower stage.

[0072]FIG. 33 is a block diagram illustrating a wide range, high speedmode sensing circuit with a local NMOS source follower stage and aglobal source following stage.

[0073]FIG. 34 is a block diagram illustrating a global sense amplifierhaving an auto zeroing function.

[0074]FIG. 35 is a block diagram illustrating an auto zero senseamplifier.

DESCRIPTION OF THE SPECIFIC EMBODIMENTS

[0075] Memory Cell Technology

[0076] To facilitate the understanding of the invention, a briefdescription of a memory cell technology is described below. In anembodiment the invention applies to Source Side Injection (SSI) flashmemory cell technology, which will be referred to as SSI flash memorycell technology. The invention is equally applicable to othertechnologies such as drain-side channel hot electron (CHE) programming(ETOX), P-channel hot electron programming, other hot electronprogramming schemes, Fowler-Nordheim (FN) tunneling, ferro-electricmemory, and other types of memory technology.

[0077] A cell structure of one typical SSI flash cell is symbolicallyshown in FIG. 1A. Its corresponding transistor symbol is shown in FIG.1B. The cell is made of two polysilicon gates (abbreviated as poly), afloating gate poly FG 100F and a control gate poly CG 100C. The controlgate CG 100C also acts as a select gate that individually select eachmemory cell. This has the advantage of avoiding the over erase problemwhich is typical of stacked gate CHE flash cell. The floating gate has apoly tip structure that points to the CG 100C, this is to enhance theelectric field from the FG 100F to the CG 100C which allows a much lowervoltage in FN erase without using a thin interpoly oxide.

[0078] The thicker interpoly oxide leads to a higher reliability memorycell. The cell is also fabricated such that a major portion of the FG100F overlaps the source junction 100S. This is to make a very highcoupling ratio from the source 100S to FG 100F, which allows a lowererase voltage and is advantageous to the SSI programming, which will bedescribed shortly. A structural gap between the FG 100F and at CG 100Cis also advantageous for the efficient SSI programming.

[0079] The SSI flash memory cell enables low voltage and low powerperformance due to its intrinsic device physics resulting from itsdevice structure. The SSI flash cell uses efficient FN tunneling forerase and efficient SSI for programming. The SSI flash cell programmingrequires a small current in hundreds of nano amps and a moderate voltagerange of ˜8 to 11 volts. This is in contrast to that of a typicaldrain-side channel hot electron memory cell programming which requirescurrent in hundreds of microamp to milliamp range and a voltage in therange of 11 to 13 volts.

[0080] The SSI flash memory cell erases by utilizing Fowler-Nordheimtunneling from the floating gate poly to the control gate poly byapplying a high erase voltage on the control gate CG 100C, e.g., 8-13volts, and a low voltage on the source 100S, e.g., 0-0.5 volts. The higherase voltage together with high coupling from the source to thefloating gate creates a localized high electric field from the FG 100Ftip to the CG 100C and causes electrons to tunnel from the FG 100F tothe CG 100C near the tip region. The resulting effect causes a netpositive charge on the FG 100F.

[0081] The SSI flash memory cell programs by applying a high voltage onthe source 100S (herein also known as common line CL), e.g., 4-13 V, alow voltage on the CG 100C, e.g., 0.7-2.5 V, and a low voltage on thedrain 100D (herein also known as the bitline BL), e.g., 0-1V. The highvoltage on the source 100S strongly couples to the FG to strongly turnon the channel under the FG (it will be equivalently referred to as theFG channel). This in turn couples the high voltage on the source 100Stoward the gap region. The voltage on the CG 100C turns on the channeldirectly under the CG 100C (it will be equivalently referred to as theCG channel). This in turn couples the voltage on the drain 100D towardthe gap region. Hence, the electrons flow from the drain junction 100Dthrough the CG channel, through the gap channel, through the FG channel,and finally arrive at the source junction.

[0082] Due to the gap structure between the CG 100C and the FG 100F, inthe channel under the gap, there exists a strong lateral electric field(EGAPLAT) 100G. As the EGAPLAT 100G reaches a critical field, electronsflowing across the gap channel become hot electrons. A portion of thesehot electrons gains enough energy to cross the interface between thesilicon and silicon dioxide into the silicon dioxide. And as thevertical field Ev is very favorable for electrons to move from thechannel to the FG 100F, many of these hot electrons are swept toward theFG 100F, thus, reducing the voltage on the FG 100F. The reduced voltageon the FG 100F reduces electrons flowing into the FG 100F as programmingproceeds.

[0083] Due to the coincidence of favorable Ev and high EGAPLAT 100G inthe gap region, the SSI memory cell programming is more efficient overthat of the drain-side CHE programming, which only favors one field overthe other. Programming efficiency is measured by how many electrons flowinto the floating gate as a portion of the current flowing in thechannel. High programming efficiency allows reduced power consumptionand parallel programming of multiple cells in a page mode operation.

[0084] Multilevel Memory Integrated Circuit System:

[0085] The challenges associated with putting together a billiontransistors on a single chip without sacrificing performance or cost aretremendous. The challenges associated with designing consistent andreliable multilevel performance for a billion transistors on a singlechip without sacrificing performance or cost are significantly moredifficult. The approach taken here is based on the modularizationconcept. Basically everything begins with a manageable optimized basicunitary block. Putting appropriate optimized unitary blocks togethermakes the next bigger optimized block.

[0086] A super high density nonvolatile multilevel memory integratedcircuit system herein described is used to achieve the performancetargets of read speed, write speed, and an operating lifetime with lowcost. Read speed refers to how fast data could be extracted from amultilevel memory integrated circuit system and made available forexternal use such as for the system microcontroller 2001 shown in FIG.1C which is described later. Write speed refers to how fast externaldata could be written into a multilevel memory integrated circuitsystem. Operating lifetime refers to how long a multilevel memoryintegrated circuit system could be used in the field reliably withoutlosing data.

[0087] Speed is modularized based on the following concept, T=CV/I,where switching time T is proportional to capacitance C multiplied bythe voltage swing V divided by the operating current I. Methods andapparatuses are provided by the invention to optimize C, V, and I toachieve the required specifications of speed, power, and optimal cost toproduce a high performance high-density multilevel memory integratedcircuit system. The invention described herein makes the capacitanceindependent of memory integrated circuit density, to the first order,and uses the necessary operating voltages and currents in an optimalmanner.

[0088] A nonvolatile multilevel memory system is shown in FIG. 1C. Asuper high density nonvolatile multilevel memory integrated circuit (IC)system 2000 is a digital multilevel nonvolatile flash memory integratedcircuit capable of storing 2^(N) storage levels per one memory cell,with N=number of digital bits. A system microcontroller 2001 is atypical system controller used to control various system operations.Control signals (CONTROL SIGNALS) 196L, input/output bus (IO BUS) 194L,and ready busy signal (R/BB) 196RB are for communication between thesystem microcontroller 2001 and the super high density nonvolatilemultilevel memory integrated circuit system 2000.

[0089] An electronic camera system (SILICONCAM) 2008 utilizing superhigh density nonvolatile multilevel memory IC system 2000 is shown inFIG. 1D. The system (SILICONCAM) 2008 includes an integrated circuitsystem (ECAM) 2005 and an optical lens block (LENS) 2004. The integratedcircuit system (ECAM) 2005 includes an image sensor (IMAGE SENSOR) 2003,an analog to digital converter block (A/D CONVERTER) 2002, a systemmicrocontroller 2001, and the multilevel memory IC system 2000. Theoptical lens block (LENS) 2004 is used to focus light into the IMAGESENSOR 2003, which converts light into an analog electrical signal. TheIMAGE SENSOR 2003 is a charge coupled device (CCD) or a CMOS sensor. Theblock (A/D CONVERTER) 2002 is used to digitize the analog electricalsignal into digital data. The microcontroller 2001 is used to controlvarious general functions such as system power up and down, exposuretime and auto focus. The microcontroller 2001 is also used to processimage algorithms such as noise reduction, white balance, imagesharpening, and image compression. The digital data is stored in themultilevel memory IC system 2000. The digital data can be down loaded toanother storage media through wired or wireless means. Future advancesin process and device technology can allow the optical block (LENS) 2004to be integrated in a single chip with the ECAM 2005.

[0090] An electronic audio system (SILICONCORDER) 2007 utilizing superhigh density nonvolatile multilevel memory IC system 2000 is shown inFIG. 1E. The SILICONCORDER 2007 includes an integrated circuit system(SILICONAUDIO) 2006, a MICROPHONE 2012, and a SPEAKER 2013. The system(SILICONAUDIO) 2006 includes an anti-alias FILTER 2010, an A/D CONVERTER2002, a smoothing FILTER 2011, a D/A CONVERTER 2009, a systemmicrocontroller 2001, and the multilevel memory IC system 2000. TheFILTER 2010 and the FILTER 2011 can be combined into one filter block ifthe signals are multiplexed appropriately. The microcontroller 2001 isused to control various functions such as system power up and down,play, record, message management, audio data compression, and voicerecognition. In recording a sound wave, the MICROPHONE 2012 converts thesound wave into an analog electrical signal, which is filtered by theFILTER 2010 to reduce non-audio signals. The filtered analog signal isthen digitized by the A/D CONVERTER 2002 into digital data. The digitaldata is then stored in compressed or uncompressed form in the multilevelmemory IC system 2000. In playing back the stored audio signal, themicrocontroller 2001 first uncompresses the digital data if the data isin compressed form. The D/A CONVERTER 2009 then converts the digitaldata into an analog signal which is filtered by a smoothing filter(FILTER) 2011. The filtered output analog signal then goes to theSPEAKER 2013 to be converted into a sound wave. The signal filtering canbe done by digital filtering by the microcontroller 2001. Externaldigital data can be loaded into the multilevel memory IC system 2000through wired or wireless means. Future advances in process and devicetechnology can allow the MICROPHONE 2012 and the SPEAKER 2013 to beintegrated in a single chip with the SILICONAUDIO 2006.

[0091] A circuit block diagram of the super high density nonvolatilemultilevel memory integrated circuit system 2000 based on the conceptsdescribed above and also on ideas described below, is shown in FIG. 2A.For the purpose of discussion, a giga bit nonvolatile multilevel memorychip is described.

[0092] A circuit block 100 includes a regular memory array.

[0093] It includes a total of for example, 256 million nonvolatilememory cells for a 4-bit digital multilevel memory cell technology or128 million cells for a 8-bit digital multilevel memory cell technology.An N-bit digital multilevel cell is defined as a memory cell capable ofstoring 2^(N) levels. A reference array (MFLASHREF) 106 is used for thereference system. A redundancy array (MFLASHRED) 102 is used to increaseproduction yield by replacing bad portions of the regular memory arrayof the circuit block 100. An optional spare array (MFLASHSPARE) 104 canbe used for extra data overhead storage such as for error correction.

[0094] A y-driver block (YDRV) 110 including a plurality of singley-drivers (YDRVS) 110S is used for controlling the bitlines duringwrite, read, and erase operation. Block YDRVS 110S will be described indetail below in the description of the multilevel algorithm. Multiplesof y-driver block (YDRV) 110 are used for parallel multilevel pagewriting and reading to speed up the data rate during write to and readfrom the multilevel memory IC system 2000. A reference y-driver block(REFYDRV) 116 including a plurality of single reference y-drivers(REFYDRVS) 116S is used for the reference array block (MFLASHREF) 106. Aredundant y-driver block (RYDRV) 112 including a plurality of singleredundant y-drivers (RYDRVS) 112S is used for the redundant array(MFLASHRED) 102. The function of block (RYDRVS) 112S is similar to thatof block (YDRVS) 110S. A spare y-driver block (SYDRV) 114 including aplurality of single spare y-drivers (SYDRVS) 114S is used for the sparearray (MFLASHSPARE) 104. The function of block (SYDRVS) 114S is similarto that of block (YDRVS) 110S. A page select block (PSEL) 120 is used toselect one bitline out of multiple bitlines for each single y-driver(YDRVS) 110S inside the block (YDRV) 110. Corresponding select circuitblocks for reference array, redundant array, and spare array are areference page select block (PRSEL) 126, a redundant page select block122, and a spare page select block 124. A byte select block (BYTESEL)140 is used to enable one byte data in or one byte data out of theblocks (YDRV) 110 at a time. Corresponding blocks for reference array,redundant array, and spare array are a reference byte select block 146,a redundant byte select block 142, and a spare byte select block 144.The control signals for circuit blocks 116, 126, 146, 112, 122, 142,114, 124, and 144 are in general different from the control signals forcircuit blocks 110, 120, and 140 of the regular memory array of thecircuit block 100. The control signals are not shown in the figures.

[0095] A multilevel memory precision decoder block (MLMDEC) 130 is usedfor address selection and to provide precise multilevel bias levels overtemperature, process corners, and power supply as required forconsistent multilevel memory operation for the regular memory array ofthe circuit block 100 and for the redundant array 102. A multilevelmemory precision decoder block (MLMSDEC) 134 is used for addressselection and to provide precise multilevel bias levels overtemperature, process corners, and power supply as required forconsistent multilevel memory operation for the spare array 104.

[0096] An address pre-decoding circuit block (XPREDEC) 154 is used toprovide decoding of addresses A<16:AN>. The term AN denotes the mostsignificant bit of addresses depending on the size of the memory array.The outputs of block (XPREDEC) 154 couple to blocks (MLMDEC) 130 andblock (MLMSDEC) 134. An address pre-decoding block (XCGCLPRED) 156 isused to provide decoding of addresses A<11:15>. The outputs of block 156also couple to blocks (MLMDEC) 130 and block (MLMSDEC) 134.

[0097] A page address decoding block (PGDEC) 150 is used to providedecoding of addresses A<9:10>. The outputs of block (PGDEC) 150 coupleto blocks (PSEL) 120. A byte address decoding block (BYTEDEC) 152 isused to provide decoding of addresses A<0:8>. The outputs of block(BYTEDEC) 152 couple to blocks (BYTESEL) 140. An address counter block(ADDRCTR) 162 provides addresses A<11:AN>, A<9:10>, and A<0:8> for row,page, and byte addresses, respectively. The outputs of the block(ADDRCTR) 162 couple to blocks (XPREDEC) 154, (XCGCLPRED) 156, (PGDEC)150, and (BYTEDEC) 152. The inputs of the block (ADDRCTR) 162 arecoupled from the outputs of an input interface logic block (INPUTLOGIC)160.

[0098] The input interface logic block (INPUTLOGIC) 160 is used toprovide external interface to systems off-chip such as themicrocontroller 2001. Typical external interface for memory operationare read, write, erase, status read, identification (ID) read, readybusy status, reset, and other general purpose tasks. Serial interfacecan be used for the input interface to reduce pin counts forhigh-density chip due to a large number of addresses. Control signals196L are used to couple the INPUTLOGIC 160 to the system microcontroller2001. The INPUTLOGIC 160 includes a status register that is indicativeof the status of the memory chip operation such as pass or fail inprogram or erase, ready or busy, write protected or unprotected, cellmargin good or bad, restore or no restore, etc. The margin and restoreconcepts are described more in detail in the multilevel algorithmdescription.

[0099] An algorithm controller block (ALGOCNTRL) 164 is used tohandshake the input commands from the block (INPUTLOGIC) 160 and toexecute the multilevel erase, programming and sensing algorithms asneeded for multilevel nonvolatile operation. The ALGOCNTRL 164 is alsoused to algorithmically control the precise bias and timing conditionsas required for multilevel precision programming.

[0100] A test logic block (TESTLOGIC) 180 is used to test variouselectrical features of the digital circuits, analog circuits, memorycircuits, high voltage circuits, and memory array. The inputs of theblock (TESTLOGIC) 180 are coupled from the outputs of the INPUTLOGIC160. The block (TESTLOGIC) 180 also provides timing speed-up inproduction testing such as faster write/read and mass modes. TheTESTLOGIC 180 is also used to provide screening tests associated withmemory technology such as various disturb and reliability tests. TheTESTLOGIC 180 also allows an off-chip memory tester to directly takeover the control of various on-chip logic and circuit bias blocks toprovide various external voltages and currents and external timing. Thisfeature permits, for example, screening with external voltage andexternal timing or permits accelerated production testing with fastexternal timing.

[0101] A fuse circuit block (FUSECKT) 182 is a set of nonvolatile memorycells configured at the external system level, at the tester, at theuser, or on chip on-the-fly to achieve various settings. These settingscan include precision bias levels, precision on-chip oscillator,programmable logic features such as write-lockout feature for portionsof an array, redundancy fuses, multilevel erase, program and readalgorithm parameters, or chip performance parameters such as write orread speed and accuracy.

[0102] A reference control circuit block (REFCNTRL) 184 is used toprovide precision reference levels for precision voltage levels asrequired for multilevel programming and sensing.

[0103] A redundancy controller block (REDCNTRL) 186 is for redundancycontrol logic.

[0104] A voltage algorithm controller block (VALGGEN) 176 providesvarious specifically shaped voltage signals of amplitude and duration asrequired for multilevel nonvolatile operation and to provide precisevoltage levels with tight tolerance, as required for precisionmultilevel programming, erasing, and sensing.

[0105] A circuit block (BGAP) 170 is a bandgap voltage generator basedon the bandgap circuit principle to provide a precise voltage level overprocess, temperature, and supply as required for multilevel programmingand sensing.

[0106] A voltage and current bias generator block (V&IREF) 172 is anon-chip programmable bias generator. The bias levels are programmable bythe settings of the control signals from the FUSECKT 182 and also byvarious metal options. A precision oscillator block (PRECISIONOSC) 174provides accurate timing as required for multilevel programming andsensing.

[0107] Input buffer blocks 196 are typical input buffer circuits, forexample, TTL input buffers or CMOS input buffers. Input/output (io)buffer blocks 194 includes typical input buffers and typical outputbuffers. A typical output buffer is, for example, an output buffer withslew rate control, or an output buffer with level feedback control. Acircuit block 196R is an open drained output buffer and is used forready busy handshake signal (R/BB) 196RB.

[0108] A voltage multiplier (also known as charge pump) block (VMULCKT)190 provides voltage levels above the external power supply required forerase, program, read, and production tests. A voltage multiplyingregulator block (VMULREG) 192 provides regulation for the block(VMULCKT) 190 for power efficiency and for transistor reliability suchas to avoid various breakdown mechanisms.

[0109] A flash power management block (FPMU) 198 is used to efficientlymanage power on-chip such as powering up only the circuit blocks in use.The FPMU 198 also provides isolation between sensitive circuit blocksfrom the less sensitive circuit blocks by using different regulators fordigital power (VDDD) 1032/(VSSD) 1033, analog power (VDDA) 1030/(VSSA)1031, and IO buffer power (VDDIO) 1034/(VSSIO) 1035. The FPMU 198 alsoprovides better process reliability by stepping down power supply VDD tolower levels required by transistor oxide thickness. The FPMU 198 allowsthe regulation to be optimized for each circuit type. For example, anopen loop regulation could be used for digital power since highlyaccurate regulation is not required; and a closed loop regulation couldbe used for analog power since analog precision is normally required.The flash power management also enables creation of a “green” memorysystem since power is efficiently managed.

[0110] Block diagram of the FPMU 198 is shown in FIG. 2B. A VDD 1111 anda VSS 1000 are externally applied power supply and ground lines,respectively. A block (ANALOG POWER REGULATOR) 198A is an analog powersupply regulator, which uses closed loop regulation. The closed loopregulation is provided by negative feedback action of an operationalamplifier (op amp) 1003 configured in a voltage buffer mode with areference voltage (VREF1) 1002 on the positive input of the op amp 1003.A filter capacitor (CFILL) 1004 is used for smoothing transient responseof the analog power (VDDA) 1030. A ground line (VSSA) 1031 is for analogpower supply. A block (DIGITAL POWER REGULATOR) 198B is a digital powersupply regulator, which uses open loop regulation. The open loopregulation is provided by source follower action of a transistor 1006with a reference voltage (VREF2) 1005 on its gate. A pair of filtercapacitor (CFIL4) 1009 and (CFIL2) 1007 are used for smoothing transientresponse of digital power (VDDD) 1032. A loading element (LOAD1) 1008 isfor the transistor 1006. A ground line (VSSD) 1033 is for digital powersupply. A block (IO POWER REGULATOR) 198C is an IO power supplyregulator, which uses open loop regulation similar to that of thedigital power supply 198B. The open loop regulation is provided by atransistor 1011 with a reference voltage (VREF3) 1010 on its gate. Aloading element (LOAD2) 1013 is for transistor 1011. A pair ofcapacitors (CFIL5) 1014 and (CFIL3) 1012 are used for smoothingtransient response of IO power (VDDIO) 1034. A ground line (VSSIO) 1035is for 10 power supply. A block 198D includes various circuits thatrequire unregulated power supply such as transmission switches, highvoltage circuits, ESD structures, and the like.

[0111] A block (PORK) 1040 is a power on reset circuit which provides alogic signal (PON) 1041 indicating that the power supply being appliedto the chip is higher than a certain voltage. The signal (PON) 1041 istypically used to initialize logic circuits before chip operationbegins.

[0112] A block (VDDDET) 1050 is a power supply detection circuit, whichprovides a logic signal (VDDON) 1051 indicating that the operating powersupply is higher than a certain voltage. The block (VDDDET) 1050 isnormally used to detect whether the power supply is stable to allow thechip to take certain actions such as stopping the programming if thepower supply is too low.

[0113] A block (FPMUCNTRL) 1060 is a power supply logic controller, thatreceives control signals from blocks (PORK) 104, (VDDDET) 1050,(INPUTLOGIC) 160, (ALGOCNTRL) 164, and other logic control blocks topower up and power down appropriately power supplies and circuit blocks.The FPMUCNTRL 1060 is also used to reduce the power drive ability ofappropriate circuit blocks to save power. A line (PDDEEP) 1021 is usedto power down all regulators. Lines (PDAPOW) 1020, (PDDPOW) 1022, and(PDIOPOW) 1023 are used to power down blocks 198A, 198B, and 198C,respectively. Lines (PDDEEP) 1021, (PDAPOW) 1020, (PDDPOW) 1022, and(PDIOPOW) 1023 come from block (FPMUCNTRL) 1060.

[0114] It is possible that either closed or open loop regulation couldbe used for any type of power supply regulation. It is also possiblethat any power supply could couple directly to the applied power supply(VDD) 1111 without any regulation with appropriate consideration. Forexample, VDDA 1030 or VDDIO 1034 could couple directly to VDD 1111 ifhigh voltage transistors with thick enough oxide are used for analogcircuits or 10 buffer circuits, respectively.

[0115] A typical memory system operation is as follows: a host such asthe microcontroller 2001 sends an instruction, also referred to as acommand, such as a program instruction via the CONTROL SIGNALS 196L andthe IO BUS 194L to the multilevel memory chip 2000 (see FIG. 1C). TheINPUTLOGIC 160 interprets the incoming command as a valid command andinitiates the program operation internally. The ALGOCNTRL 164 receivesthe instruction from the INPUTLOGIC 160 to initiate the multilevelprogramming algorithmic action by outputting various control signals forthe chip. A handshake signal such as the ready busy signal R/BB 196RBthen signals to the microcontroller 2001 that the multilevel memory chip2000 is internally operating. The microcontroller 2001 is now free to doother tasks until the handshake signal R/BB 196RB signals again that themultilevel memory chip 2000 is ready to receive the next command. Atimeout could also be specified to allow the microcontroller 2001 tosend the commands in appropriate times.

[0116] Read Operation:

[0117] A read command including a read operational code and addresses issent by the microcontroller 2001 via the CONTROL SIGNALS 196L and 10 BUS194L. The INPUTLOGIC 160 decodes and validates the read command. If itis valid, then incoming addresses are latched in the ADDRCTR 162. Theready busy signal (R/BB) 196RB now goes low to indicate that themultilevel memory device 2000 has begun read operation internally. Theoutputs of ADDRCTR 162 couple to blocks (XPREDEC) 154, (XCGCLPRED) 156,(PGDEC) 150, (BYTEDEC) 152, and (REDCNTRL) 186. The outputs of blocks154, 156, 150, 152, and 186 couple to blocks (MLMDEC) 130, (MLSMDEC)134, and block 100 to enable appropriate memory cells. Then theALGOCNTRL 164 executes a read algorithm. The read algorithm will bedescribed in detail later in the multilevel algorithm description. Theread algorithm enables blocks (BGAP) 170, (V&IREF) 172, (PRECISIONOSC)174, (VALGGEN) 176, and (REFCNTRL) 184 to output various precisionshaped voltage and current bias levels and algorithmic read timing forread operation, which will be described in detail later in thedescription of the multilevel array architecture. The precision biaslevels are coupled to the memory cells through blocks (MLMDEC) 130,(MLMSDEC) 134, and block 100.

[0118] In an embodiment, the read algorithm operates upon one selectedpage of memory cells at a time to speed up the read data rate. A pageincludes a plurality of memory cells, e.g., 1024 cells. The number ofmemory cells within a page can be made programmable by fuses, e.g., 512or 1024 to optimize power consumption and data rate. Blocks (PGDEC) 150,(MLMDEC) 130, (MLMSDEC) 134, 100, and (PSEL) 120 select a page. Allmemory cells in the selected page are put in read operating biascondition through blocks (MLMDEC) 130, (MLMSDEC) 134, 100, (PSEL) 120,and (XCGCLPRED) 156. After the readout voltage levels are stable, a readtransfer cycle is initiated by the block (ALGOCNTRL) 164. All thereadout voltages from the memory cells in the selected page are thenavailable at the y-drivers (YDRVS) 110S, (RYDRVS) 112S, and (SYDRVS)114S inside block (YDRV) 110, (RYDRV) 112, and (SYDRV) 114,respectively.

[0119] Next, in the read transfer cycle the ALGOCNTR 164 executes amultilevel read algorithm to extract the binary data out of themultilevel cells and latches them inside the YDRVS 110S, RYDRVS 112S,and SYDRVS 114S. This finishes the read transfer cycle. A restore flagis now set or reset in the status register inside the INPUTLOGIC 160.The restore flag indicates whether the voltage levels of the multilevelmemory cells being read have been changed and whether they need to berestored to the original voltage levels. The restore concept will bedescribed more in detail in the multilevel algorithm description. Nowthe ready busy signal (R/BB) 196RB goes high to indicate that theinternal read operation is completed and the multilevel memory device2000 is ready to transfer out the data or chip status. Themicrocontroller 2001 now can execute a status read command to monitorthe restore flag or execute a data out sequence. The data out sequencebegins with an external read data clock provided by the microcontroller2001 via the CONTROL SIGNAL 196L coupled to an input buffer 196 totransfer the data out. The external read data clock couples to theblocks (BYTEDEC) 152 and (BYTESEL) 140, 142, and 144 to enable theoutputs of the latches inside blocks (YDRV) 110 or (RYDRV) 112 or(SYDRV) 114 to output one byte of data at a time into the bus IO<0:7>1001. The external read data clock keeps clocking until all the desiredbytes of the selected page are outputted. The data on bus IO<0:7> 1001is coupled to the microcontroller 2001 via IO BUS 194L through IObuffers 194.

[0120] Program Operation:

[0121] A program command including a program operational code,addresses, and data is sent by the microcontroller 2001 via CONTROLSIGNALS 196L and IO BUS 194L. The INPUTLOGIC 160 decodes and validatesthe command. If it is valid, then incoming addresses are latched in theADDRCTR 162. The data is latched in the latches inside YDRV 110, RYDRV112, and SYDRV 114 via blocks (BYTEDEC) 152, (BYTESEL) 140, 142, and144, respectively. The ready busy signal (R/BB) 196RB now goes low toindicate that the memory device has begun program operation internally.The outputs of ADDRCTR 162 couple to blocks (XPREDEC) 154, (XCGCLPRED)156, (PGDEC) 150, (BYTEDEC) 152, and (REDCNTRL) 186. The outputs ofblocks 154, 156, 150, 152, and 186 couple to blocks (MLMDEC) 130,(MLSMDEC) 134, and 100 to enable appropriate memory cells. Then the(ALGOCNTRL) 164 executes a program algorithm, which will be described indetail later in the multilevel algorithm description. The (ALGOCNTRL)164 enables blocks (BGAP) 170, (V&IREF) 172, (PRECISIONOSC) 174,(VALGGEN) 176, and (REFCNTRL) 184 to output various precision shapedvoltage and current bias levels and algorithmic program timing for theprogram operation, which will be described in detail later in thedescription of the multilevel array architecture. The precision biaslevels are coupled to the memory cells through blocks (MLMDEC) 130,(MLMSDEC) 134, and block 100.

[0122] In an embodiment, the program algorithm operates upon oneselected page of memory cells at a time to speed up the program datarate. Blocks (PGDEC) 150, (MLMDEC) 130, (MLMSDEC) 134, 100, and (PSEL)120 select a page. All memory cells in the selected page are put inappropriate program operating bias condition through blocks (MLMDEC)130, (MLMSDEC) 134, 100, (PSEL) 120, and (XCGCLPRED) 156. Once theprogram algorithm finishes, program flags are set in the status registerinside the block (INPUTLOGIC) 160 to indicate whether the program hasbeen successful. That is, all the cells in the selected page have beenprogrammed correctly without failure and with enough voltage margins.The program flags are described more in detail in the multilevelalgorithm description. Now the ready busy signal (R/BB) 196RB goes highto indicate that the internal program operation is completed and thememory device is ready to receive the next command.

[0123] Erase Operation:

[0124] An erase command including an erase operational code andaddresses is sent by the microcontroller 2001 via CONTROL SIGNALS 196Land 10 BUS 194L. The INPUTLOGIC 160 decodes and validates the command.If it is valid, then incoming addresses are latched in the ADDRCTR 162.The ready busy signal (R/BB) 196RB now goes low to indicate that thememory device has begun erase operation internally. The outputs ofADDRCTR 162 couple to blocks (XPREDEC) 154, (XCGCLPRED) 156, (PGDEC)150, (BYTEDEC) 152, and (REDCNTRL) 186. The outputs of blocks 154, 156,150, 152, and 186 couple to blocks (MLMDEC) 130, (MLSMDEC) 134, and 100to enable appropriate memory cells. Then the ALGOCNTRL 164 executes anerase algorithm. The ALGOCNTRL 164 enables blocks (BGAP) 170, (V&IREF)172, (PRECISIONOSC) 174, (VALGGEN) 176, and (REFCNTRL) 184 to outputvarious precision shaped voltage and current bias levels and algorithmicerase timing for erase operation. The shaped voltage for erase is tominimize electric field coupled to memory cells, which minimizes thedamage to memory cells during erasing. The precision bias levels arecoupled to the memory cells through blocks (MLMDEC) 130, (MLMSDEC) 134,and block 100.

[0125] In an embodiment, the erase algorithm operates upon one selectederase block of memory cells at a time to speed up the erase time. Anerase block includes a plurality of pages of memory cells, e.g., 32pages. The number of pages within an erase block can be madeprogrammable by fuses to suit different user requirements andapplications. Blocks (PGDEC) 150, (MLMDEC) 130, (MLMSDEC) 134, 100, and(PSEL) 120 select a block. All memory cells in the selected block areput in erase operating bias condition through blocks (MLMDEC) 130,(MLMSDEC) 134, 100, (PSEL) 120, and (XCGCLPRED) 156. Once the erasealgorithm finishes, the erase flags are set in the status registerinside the block (INPUTLOGIC) 160 to indicate whether the erase has beensuccessful. That is, all the cells in the selected page have been erasedcorrectly to desired voltage levels without failure and with enoughvoltage margins. Now the ready busy signal (R/BB) 196RB goes high toindicate that the internal erase operation is completed and themultilevel memory device 2000 is ready to receive the next command.

[0126] Multilevel Array Architecture:

[0127] The demanding requirements associated with putting together abillion transistors on a single chip with the ability to store multipleprecision levels per cell and operating at a very high speed arecontradictory. These requirements need innovative approaches and carefultradeoffs to achieve the objective. Examples of tradeoffs and problemswith prior art implementation are discussed below. In conventional priorart architectures, a voltage drqp along a metal line of a few tens ofmillivolts could be easily tolerated. Here, in a super high densitynonvolatile multilevel memory integrated circuit system such a voltagedrop can cause unacceptable performance degradation in precision levelsdue to the high number of levels stored per memory cell. In conventionalarray architectures, a bit line capacitance in the order of 10 picofarads would be a non-issue. Here it may be unworkable due to the highdata rate required. In prior art array architectures a bias levelvariation from one memory cell to another in the order of +/−30 percentwould be a typical situation. Here such a bias variation would be aserious performance problem. In prior art array architectures, the totalresistance of a memory source line in the order of a few hundreds ofohms would be a typical situation, here a few tens of ohms is a seriousproblem. The huge number of memory cells of the giga to tera bithigh-density memory system compounds the matter even further by makingthe memory source line longer. Another challenge facing the multilevelsystem is maintaining high speed sensing and programming with low power,again requiring tradeoffs. Another challenge facing the multilevelsystem is high speed sensing and programming with very high precisionvoltages due to a high number of levels stored per digital multilevelmemory cell, again a conflicting demand. Another challenge facing themultilevel system is high speed sensing and programming consistentlyevery time over many years, process corners, temperature, and powersupply variation.

[0128] To get an appreciation of the order of magnitude of thedifficulty involved in the super high density multilevel nonvolatilememory system, numerical examples will be given corresponding to a onegiga bit array architecture system suitable for 256 levels, i.e., 8bits. The array is then organized as 8192 bitlines or columns and 16384rows or wordlines for a total of 134,217,730 physical cells.

[0129] One sensing level, V1level,=multilevel sensing range/2^(N)=numberof digital bits stored per memory cell. Multilevel sensing range is thereadout voltage range from sensing a multilevel memory cell. Assumingthe multilevel sensing range from the multilevel memory cell availableis 2048 millivolts, then V1level=2048/256=8 millivolts.

[0130] A very high data rate is required for applications such as imageor high density data storage. For example, write and read rates of amega byte per second are required. To achieve this high data rate,parallel writing and sensing is required for the super high densitynonvolatile multilevel memory integrated circuit system. In the presentembodiment, a total of 1024 y-drivers (YDRVS) 110S inside blocks (YDRV)110 are used. This allows 1024 memory cells to be written and sensed atthe same time in a page mode manner, effectively increasing the speed bya factor of 1024 over single cell operation. The number of bitlinesmultiplexed into one single y-driver (YDRVS) 110S is=8192/1024=8bitlines.

[0131] A program algorithm described in more detail elsewhere in thisspecification is able to achieve desired multilevel resolution. The reador program multilevel resolution is the smallest voltage range in reador program, respectively, needed to operate the multilevel memory cellscorrectly. An erase algorithm first erases the memory cells to make thecell readout voltage reaching a certain desired voltage level. Then theiterative program algorithm is applied to the memory cells. The programalgorithm includes a plurality of verify-program cycles. Averify-program cycle includes a verify cycle followed by a programcycle. A verify cycle is done first to inhibit the cell from the firstprogramming pulse if the cell is verified, therefore preventing possibleover-programming. Over-programming means that after a programming pulsethe cell sensing level passes a desired voltage level by more than adesired voltage amount. A verify cycle is used to determine whether thedesired readout sensing level has been reached. If the desired readoutsensing level is reached, the cell is inhibited from furtherprogramming. Otherwise, the cell is enabled for the next program cycle.A program cycle is used to change incrementally the charge stored in thecell and the corresponding cell sensing readout voltage. Instead of averify-program cycle, a program-verify cycle can be used. Aprogram-verify cycle begins with a program cycle followed by a verifycycle. In this case, care should be taken to ensure that the firstprogramming pulse does not cause over-programming.

[0132] In an embodiment the program cycle includes applying a voltage onthe source line, (interchangeably referred to as common line [CL])(VCL), with a predetermined program pulsewidth (TPPWD) and apredetermined program bias cell current (Ipcell). The verify cycle makesuse of the voltage mode sensing as shown in FIG. 2C, which applies areference voltage (VCLRD) on the source line (CL), another referencevoltage (VCGRD) on the control gate, and a predetermined read biascurrent (Ircell) on the bitline and through the memory cell. The current(Ircell) is applied to the bitline and the memory cell through selecttransistors which are not shown. The resulting voltage on the bitline isthe sensing readout voltage (VR), which has a unique relationship to thecharge on the floating gate. The voltage mode sensing is also usedduring read. To change incrementally the readout sensing voltage to thenext value (VR+dVR), with dVR equals to the incremental readout sensingvoltage change, the next program cycle is repeated with the common linevoltage increased incrementally to (VCL+dVCLP), with dVCLP equals to theincremental programming voltage change.

[0133] The number of verify-program cycles (NC) is dependent on thenumber of voltage levels and various margins of the memory system. Forexample, for an equivalent 8-bit digital multilevel cell, there are2^(N=)2⁸⁼²⁵⁶ levels, with N=8. The minimum possible number ofverify-program cycles (NC) required would be 256. To cover variationsdue to cell-to-cell variation, temperature, process corners, analgorithm may require, for example, approximately 1.4×256=360verify-program cycles. To cover various margins needed such as for dataretention and programming distribution, the number of verify-programcycles required is actually higher. Assuming a factor of 2 due tovarious margin coverage, the number of verify-program cycles isapproximately equal to 720. The exact number of verify-program cycles istypically varied depending on various memory technologies and particulardesired performance targets.

[0134] For write data rate of 1 mega byte per second and for 8-bitdigital multilevel operation with 1024 bytes per page, the write timingper page is, TWRT=# of bytes written in parallel/data rate=1024 bytesper page/1 mega bytes/second=1024 μs=1.024 ms per page.

[0135] Hence the time to execute each program-verify cycle (TPV) must beless than TWRT/NC=1.024 ms/720=1.42 μs. This fast timing coupled withparallel operation of 1024 cells has important implication on memorycell program speed, capacitance loading, power consumption and othereffects as will be described below.

[0136] Typical process parameters of a sub-micron memory cell are asfollows. A typical diffused source line resistance per cell is 100 ohms.A typical bitline resistance per cell is 80 milliohms. A typicalsilicided row line resistance per cell is 20 ohms. A typical source linecapacitance per cell is 2 fF. A typical bitline capacitance per cell is1.5 fF. And a typical row line capacitance per cell is 3 fF.

[0137] Hence for the 8192×16384 array, the total bitline capacitance isCBL=˜16384×1.5 fF=25 pF, where “=˜” is defined as approximately equalto. The total metal bitline resistance RBL=˜16384×0.08=1330 ohms. Thetotal diffused source line resistance is RSL=8192×110=819 K ohms. Thetotal row line resistance is RWL=8192×20=164 K ohms. For a typicalmemory system, the diffused source line is strapped by metal along thesource line, with approximately 80 milliohms per cell, in this caseRSL=8192×0.08=655 ohms.

[0138] In conventional stacked gate drain-side CHE programming(abbreviated as CHE flash program), the single cell current is typically1 ma, which causes a voltage drop along a single metal bitline of =˜1maxRBL=˜1 max×1330 ohms=1330 millivolts, which is unacceptable since itis much greater than 1 level=8 millivolts. In SSI flash programming(abbreviated as SSI flash program), the typical cell current can belowered to 1 μa, which causes a voltage drop along a single metalbitline of =˜1 μa×1330 ohms=1.33 millivolts, which is acceptable.

[0139] For 1024 cells drawing the cell current (Icell) continuously, thevoltage drop (DVCL) along the e source line from the driver to the otherend follows the geometric equation:

 

DVCL=0.5*P*(P+1)*R8cell*Icell,tm  (1)

[0140] where R8cell=the metal source line resistance for 8 cells inseries=0.08 ohms×8=0.64 ohms, and P=1024

[0141] Along the source line, for 1024 cells programming simultaneously,the total current is 1024×1 ma=1.024 A for the CHE flash programand=1024×1 μa=1.024 ma for the SSI flash program. The power needed forthe drain side CHE flash programming for parallel page mode operation isunsustainable due to very high current. Additionally, the voltage dropalong the metal source line by equation (1) is 0.5×1024*1025*0.64*1ma=336 Volts for CHE. This is unworkable for CHE flash technology.Similarly, the source line voltage drop for the SSI flash=˜336millivolts. This is also unworkable in the multilevel program for thefollowing reasons.

[0142] For a multilevel nonvolatile system, in one program cycle, thecell sensing voltage can only shift (dVR) a maximum of <(Q*V1level) forreliable sensing, where Q was 0.5 in the prior example. However Q couldvary from ⅓ to ⅛ for long term reliability. This is needed, for example,to allow for sensing margin, verify margin, program disturb, dataretention, and endurance. The number of cells programming simultaneouslywithin a selected page can vary between as many as 1024 to as few asonly one from one program cycle to the next. Thus the total programcurrent flowing through the common line CL could change by a factor of1024 from one program cycle to the next. The resulting worst casevoltage change in the source line VCL from one program cycle to the nextis dVCL=˜336 millivolts for SSI flash. This voltage jump in VCL causesthe only remaining programming cell to over program, which causes thecell sensing voltage to shift much greater than the (Q*V1level). Hence,the challenge is to bring the voltage drop dVCL to an acceptable levelduring programming.

[0143] For verifying after programming multilevel memory cells,conventional methods would shut off the read cell currents for cellsthat have already reached their desired verifying levels, this wouldcause the voltage shift dVCL in verify as much as in programming asdescribed above. This voltage jump dVCL would couple to the memory cellsand cause a large jump in cell sensing voltage. This undesired largejump in cell sensing voltage causes an error in sensing, herein called asense error VRerr. This sense error should be much less than(Q*V1level). Hence this large jump is unacceptable. The invention solvesthe problem by enabling the total current all the time whether the cellshave been verified or not. This mitigates the change in the source linevoltage. However a new problem surfaces as compared to that inprogramming. As temperature changes from −45C to +85C the resistance ofthe source line metal line changes by about 40%, hence the source linevoltage drop changes by about 40%, which causes an additional senseerror VRerr in read. This sense error should be much less than(Q*V1level) to prevent overall read margin degradation. Therefore, anarray architecture is needed to achieve this, as will be described indetail below.

[0144] With 1024 cells operating simultaneously, assuming sense currentIrcell=10 μa, the total sense current is =1024×10 μa=10.24 ma flowinginto the source line. This presents several problems. With powerspecification for a typical memory chip ICC=20-30 ma. This 10.24 ma is abig percentage of the power specification. To deliver 10.24 ma whilemaintaining a precise voltage level VCLRD, VCLRD is defined as thevoltage in read on CL line, requires a challenging decoding and driverscheme, which will be addressed in the description of the multileveldecoding scheme. Large current flowing across the source line alsocauses the voltage drop as described above.

[0145] High data rate, meaning high sense speed and write speed, isrequired for data intensive application. The speed is proportional tocapacitance and voltage swing and inversely proportional to the current,

T=C*V/I  (2).

[0146] For typical bitline capacitance as calculated above, CBL=25 pFand assuming voltage swing V=1V, and assuming available current I=10 μa,the time it takes to charge or discharge a bitline as needed in verifyor program cycle is, TBL=25 pF*1V/10 μa=2.5 μs. This is greater than theTPV=1.42 μs as calculated above. At least a 2× or better timing isrequired for TBL to allow for various settling time, sensing time, andprogramming time. Increasing the current would cause higher powerconsumption, large decoding driver, and voltage problems as describedabove.

[0147] Further, in programming 1024 cells in parallel, the programmingcurrent is supplied from an on-chip voltage multiplier, also known as acharge pump. The on-chip voltage multiplier multiplies the low voltagepower supply, e.g., 2.5 V to the required higher voltages. Allowing areasonable area penalty from the on-chip voltage multiplier, a totalcurrent of 100 μa is allowed for programming. The programming currentper cell is 100 μa/1024=0.1 μa. This causes a TBL=25 pF*1V/0.1 μa=250μs, which is even more severe of a timing problem. Here an improvementof more than 2 order of magnitude or better in speed is needed. Theinvention describes array architectures with suitable operating methodsto achieve this improvement and will be described below.

[0148]FIG. 3A is the block diagram of a super high-density digitalnonvolatile multilevel memory array architecture which is capableof >8-bit multilevel operation. The block 100 has been expanded fromFIG. 2A to show the sub-blocks inside. A multilevel precision memorydecoder MLMDECS 132 is used for delivering bias voltage levels withtight tolerance over temperature, process, and power supply variationfor multilevel memory cells. A multilevel memory sub-array MFLSUBARY 101includes a plurality of single multilevel memory cells. Other blocks inFIG. 3A have already been described in association with the descriptionof FIG. 2A.

[0149] A block (PSEL) 120 includes a plurality of circuit blocks (PSELS)120S. FIG. 3B shows details of a page select circuit (PSELS) 120S thatselects a pair of bitlines at a time. Transistors 120A-D are selecttransistors. Transistors 120E-H are inhibit transistors. Lines (PP0)120K, (PP1) 120M, (PP2) 1200, and (PP3) 120Q are complementary signalsof lines (PPOB) 120L, (PP1B) 120N, (PP2B) 120P, and (PP3B) 120R,respectively. Line (BLYDRV) 120Y goes to one y-driver (YDRVS) 110Sinside the block (YDRV) 110. Block (YDRVS) 110S will be described indetail later in the description of the multilevel algorithm. Lines(BLTPO) 240P, (BLTP1) 241P, (BLTP2) 242P, and (BLTP3) 243P couple to thebitlines in block 101 and couple to a set of lines (BLP0) 240, (BLP1)241, (BLP2) 242, and (BLP3) 243 of the circuit block 290 in FIG. 4A.

[0150]FIG. 3C shows a block diagram of a block (MFLSUBARY) 101. A block(MFLSUBARY) 101 includes a plurality of blocks (ARYSEG0) 290. Blocks(ARYSEG0) 290 are first tiled horizontally NH times and then thehorizontally tiled blocks 290 are tiled vertically NV times. For a pagewith 1024 memory cells, NH is equal to 1024. NV is determined such thatthe total number of memory cells is equal to the size of the desiredphysical memory array.

[0151]FIG. 4A shows a basic array unit (ARYSEG0) 290. A block (RD1SEG)300 is a multilevel decoding block. A plurality of the blocks RDLSEGmakes up the circuit block (MLMDEC) 130. In the block (ARYSEG0) 290,there are 8 columns and FIG. 4A shows only 8 rows of memory cells, whileother rows, e.g., 120 rows, are not shown for clarity. Each ARYSEG0 290includes a plurality, e.g. 8, of array blocks (ARYLBLK) 290A tiledvertically. A set of transistors 220, 221, 222, 223, 224, 225, 226, 227couples respectively a set of segment bitlines (SBL0) 240A and (SBL1)240B, (SBL2) 241A and (SBL3) 241B, (SBL4) 242A and (SBL5) 242B, (SBL6)243A and (SBL7) 243B to a set of top bitlines (BLP0) 240, (BLP1) 242,(BLP2) 242, and (BLP3) 243, respectively. Top bitlines refer to bitlinesrunning on top of the whole array and running the length of theMFLSUBARY 101. Segment bitlines refer to bitlines running locally withina basic array unit ARYSEG0 290. A set of transistors 230, 231, 232, 233,234, 235, 236, 237 couples respectively segment bitlines (SBL0) 240A and(SBL1) 240B, (SBL2) 241A and (SBL3) 241B, (SBL4) 242A and (SBL5) 242B,(SBL6) 243A and (SBL7) 243B to an inhibit line (VINHSEG0) 274. A line(CL0) 264 is the common line coupled to common lines of the first fourrows of memory cells. A line (CL3) 269 couples to common lines of thelast four rows of memory cells. A set of control gates (CG0) 262, (CG1)263, (CG2) 265, (CG3) 266 couples to control gates of memory cells ofthe first four rows respectively. A set of control gates (CG12) 267,(CG13) 268, (CG14) 270, (CG15) 271 couples to control gates of memorycells of the last four rows, respectively. A pair of inhibit selectlines INHBLB0 272 and INHBLB1 273 couples to gates of transistors 231,233, 235, 237 and transistors 230, 232, 234, 236 respectively. A pair ofbitline select lines (ENBLB0) 260 and (ENBLA0) 261 couples to gates oftransistors 221, 223, 225, 227 and transistors 220, 222, 224, 226,respectively.

[0152] Multiple units of the basic array unit (ARYSEG0) 290 are tiledtogether to make up one sub-array (MFLSUBARY) 101 as shown in FIG. 3C.And multiples of such (MFLSUBARY) 101 are tiled horizontally to make upthe final 8192 columns for a total of 32768×8192=268,435,460 physicalmemory cells, or called 256 mega cells. The logical array size is 256mega cells×4 bits per cell=1 giga bits if 4-bit digital multilevelmemory cell is used or 256 mega cells×8 bits per cell=2 giga bits if8-bit digital multilevel memory cell is used. The top bitlines (BLP0)240, (BLP1) 241, (BLP2) 242, and (BLP3) 243 run from the top of thearray to the bottom of the array. The segment bitlines (SBL0) 240A,(SBL1) 240B, (SBL2) 241A, (SBL3) 241B, (SBL4) 242A, (SBL5) 242B, (SBL6)243A, and (SBL7) 243B only run as long as the number of rows within asegment, for example, 128 rows. Hence the capacitance contributed fromeach segment bitline is very small, e.g., 0.15 pF.

[0153] The layout arrangement of the top bitlines 240-243 in relativeposition with each other and with respect to the segment bitlines (SBL0)240A, (SBL1) 240B, (SBL2) 241A, (SBL3) 241B, (SBL4) 242A, (SBL5) 242B,(SBL6) 243A, (SBL7) 243B are especially advantageous in reducing thebitline capacitance. The purpose is to make the top bitlines as trulyfloating as possible, hence the name of truly-floating-bitline scheme.

[0154] In an embodiment as shown in FIG. 5A, lines 240, 241, and 242 arein the middle, sandwiched between lines 240A, 240B, 241A and 241B in thebottom and lines (CL0) 264 in the top. Furthermore, line 240 is on topof the spacing between lines 240A and 240B and line 241 is on top of thespacing between lines 241A and 241B. This has the benefit of reducingsignificantly the bottom plane capacitance of line 240 and line 241since the oxide below each line is almost doubled. The lines 240 and 241could be positioned on top of lines 240A and 241A, respectively, whenthe sidewall capacitance reduction outweighs the benefit of the bottomplane capacitance reduction. The sidewall capacitance refers to thecapacitance resulting from the vertical walls of a line, the bottomplane capacitance refers to the capacitance from the bottom of a line,and the top plane capacitance refers to the capacitance from the top ofa line.

[0155] In another embodiment, as shown in FIG. 5B, the top bitlines240-242 have been positioned all the way to the top metal of amulti-layer metal integrated circuit system. For example, for a 5-layermetal integrated circuit system, the top bitlines are metal 5 layer.This avoids the top plane capacitance of the top bitlines 240-242. Thisalso reduces the bottom plane capacitance of the top bitlines 240-242 bya factor of as much as 4 if metal 5 is used. The reduction factor of 4is due to the oxide below the line increasing by a factor of about asmuch as 4. Also since the top bitlines 240-242 are spaced further apartas compared to the segment bitlines, the sidewall capacitance is reducedsignificantly. The top bitlines are now almost floating on top of thearray. The end effect is more than on order of magnitude reduction inbitline capacitance. Also since the top bitlines 240-242 spacing arerelaxed, the width of the top metal lines can be made larger to reducethe metal bitline resistance.

[0156] The reduction in bitline capacitance results in a correspondingincrease in speed. To help increase the speed in programming, abitline-stabilization-assisted operating method can be applied and isdescribed as follows. At the beginning of the programming cycle, abitline stabilization control signal is used to set all the bitlines toa predetermined voltage VBLPRE, e.g., 0.4-0.8 V. Then high voltage VCLis applied to selected memory common lines for programming. Now thebitlines only have to move partially to a final voltage. This speeds upthe TBL timing.

[0157] There is an important transient effect related to bitlinecapacitance in programming. For high speed writing, each program cycletakes time in the microsecond range. The program bias condition for amemory cell is control gate voltage VCGP=˜0.7-2.5 V, bitline cellcurrent Ipcell,=˜50-500 nA, and common line voltage VCL going from alow,=˜0 V, to a high programming voltage,=˜8-13 V. As the VCL ramps froma low to a high voltage, there is a transient current flowing throughthe memory cell to charge up the bitline node capacitance. Thistransient current flowing through the cell contributes to the cellprogramming in addition to the programming current Ipcell. Prior art CHEprogramming would not be bothered with this effect since the additionaltransient programming current is small compared to the actualprogramming current. However, for a very fine programming voltage levelcontrol as required for high bits per cell, this effect will cause theprogramming level to be uncontrollable, making the multilevel memorysystem useless. The following example is given to appreciate themagnitude of this transient current. Assuming program VCL ramp time=1μs, CBL=1 pF, the voltage the bitline has to slew=1 V, then, by equation(2), I=CV/T=1 pF×1 V/1 μs=1 μA, which can be 10× the programmingcurrent. Hence a method is needed to reduce the transient programmingcurrent.

[0158] Two approaches are shown in FIG. 5C to reduce this transientphenomenon. In one embodiment, 2-step ramp rate control approach greatlyreduces this transient effect without prolonging the programming time asfollows. First VCL ramps fast during TRP1 to an intermediate voltageVCLINT, e.g., 2-6 V, then VCL stays at an intermediate voltage for afinite time TVCLINT, then VCL ramps slow during TRP2 to a final voltageVCLFIN. The first fast ramp with the flat intermediate time TVCLINT willlet transient current flowing through the cell to stabilize most of thecell capacitances such as CBL in a short time and at sufficiently lowVCL voltage so that insignificant programming takes place while thetransient current is flowing. The TRP1 is made fast to consume littleprogramming time. The second slow ramp then brings the cell to a finalprogramming voltage without affecting the programming rate since verylittle current is flowing through the cell in the second ramp.

[0159] Another embodiment of the ramp rate control is a fast-slow ramprate control approach. VCL first ramps fast during TRP1 to anintermediate voltage VCLINT, then VCL ramps slow during TRP2 to a finalvoltage VCLFIN. The first ramp TRP1 is faster than that of the TRP2 rampto allow the transient current during the first ramp TRP1 to stabilizequickly all the cell capacitances while VCL is low enough to not causesignificant programming.

[0160] The ramp rate can be generated by a RC network, meaning the rateis controlled by a certain capacitance multiplied by a certainresistance, or by a CV/I network, meaning the rate is controlled by acertain capacitance multiplied by a voltage swing divided by a certainbias current. Further, the ramp rate can be programmable by programmablefuses as a function of bitline capacitance to optimize the programmingtime without introducing adverse transient current. That is the ramprate is made to be faster for smaller bitline capacitance.

[0161] The common line CL0 264 is common to four rows of memory cellsfor the following reason. Allowing 4 mV voltage drop along the CL lineduring programming to avoid programming error as described previously,with 1024 cells operating simultaneously with 0.1 μa drawn per cell, thevoltage drop by equation (1) is, dVCLP=4 mV=0.5*(1024) (1025) R8cell*0.1μa, hence R8cell=76 milliohms. For a typical CL line with the line widthhalf as wide as the memory cell, the CL resistance per cell is =˜80milliohms, for 8 cells in series, R8cell is 8×80=640 milliohms, which ismuch greater than 76 milliohms. Hence by making CL line 264 four memorycells wide, R8cells is=˜80 milliohms. The reason the width of the lineCL 264 cannot be made arbitrarily large is due to the program disturb.As the high voltage is applied to CL line 264 in programming, all thecells connected to the CL line 264 will see the VCL voltage whether theyare selected for programming or not. The more cells connected to thesame CL line, the longer time for the disturb for the unselected cells.

[0162] Shown in FIG. 4A are the metal strapping lines (CL0STRAP) 264Sand (CL3STRAP) 269S of the common lines that connect the diffusioncommon lines to the metal common lines. The metal strapping could bedone every 8, 16, or 32 memory cells depending on an allowable voltagedrop along the common line diffusion inside the strapping. This voltagedrop depends on the diffusion common line resistance for a givenoperating current.

[0163] An alternative method that mitigates the voltage drop problemalong the common line in the program cycle is by theconstant-total-current-program scheme. Namely by keeping the same totalcurrent flowing all the time independent of whether the cells have beenverified or not, the common line voltage drop is kept constant duringprogramming. This could be done for example, by adding additionalswitching transistors in the array every 8, 16, 32, or 64 memory cellsand switching into the CL line the current equivalent to the currentfrom verified cells.

[0164] Table 1 shows the operating conditions for the memory array inread, erase, and program. The array operating conditions are shown forthe cell 200 of the block ARY1BLK 290A in FIG. 4A, of a selected pagefor read and program. The selected cell 200 is one cell out of 1024selected cells within a selected page. The other 1023 selected cellsbelong to the other 1023 ARYSEG0 290 connected horizontally. The arrayoperating conditions are also shown for all cells connected to CL0 264for erase.

[0165] As shown in Table 1, the operating conditions are such that allthe unselected memory cells see no voltage other than 0 volts. Thisreduces significantly the power consumption. This is also particularlyadvantageous for improved speed in very high-density memory chips sinceall the necessary driver circuits only see the loading from the selectedmemory cells. The loading from the whole array is tremendous due tolarge number of transistors in array, e.g., 256 million transistors,with its tremendous diffusion, metal and poly interconnect parasitics.For example, one bitline capacitance, CBL is 25 pF, with 8192 bitlinesthe total bitline capacitance is 8192×25 pF=204 nF. This would require atremendous amount of power during signal switching, for example, toinhibit all the bitlines during programming. Also not shown in Table 1,the unselected control signals ENBLAs, ENBLBs, INHBLAs, and INHBLBs forunselected array units ARYSEG0 290 only see 0 or VDD but not themultiplied high voltage. This again saves significant power andincreases speed due to no loading from unselected control circuits.

[0166] Another factor that is reduced greatly is the excessive leakagecurrent from the bitline to ground due to junction leakage, bitline tobitline leakage, band-to-band tunneling, and cell subthresholdconduction. For example, for a typical leakage of 10 pA per cell, with16,384 cells per bitline, the total leakage is 164 nA, which is greaterthan Ipcell=100 nA. This implies that the multilevel programming will beuncontrolled due to the uncontrollable excessive leakage currentcontributing to the controlled programming current Ipcell. With theinhibit and segmentation scheme, the total leakage current is reduced to128× pA=1.28 nA, which is much less than Ipcell=100 nA.

[0167]FIG. 4B shows an alternative array architecture in which thedecoded inhibit line VINHSEGO1 274B is shared between any two adjacentsegments. This has the benefit of reducing the number of inhibit linesin the array.

[0168]FIG. 4C shows an alternative array architecture in which theinhibit line VINH 999 is shared for all the segments. This has thebenefit of sharing one inhibit line for the whole array.

[0169]FIG. 4D shows an alternative array architecture in which a set ofinhibit select line INHBLA1-3 and INHBLB1-3 275 to 280 are used toinhibit all segment bitlines except the selected segment bitline. VINH999 is shared for all the segments. The operating method makes use of asegment cascading scheme that is described as follows. To even isolatethe bitline capacitance further, bitline select transistors 220-227 arealso used as cascading transistors in programming in addition to theselect and inhibit function. In programming, cell 200 for example, thevoltage on line 261 is initially pulsed high to pass inhibit voltageVINH 999 from a page select (PSELS) 120S into the selected segmentbitline (SBL0) 240A. Then the voltage on line ENBLA0 261 is pulsed to acascading voltage (VPBCAS), e.g., 1 V. A precharge signal then chargesthe selected top bitline (BLP0) 240 to 0.3V. The final voltage on thetop bitline (BLP0) 240 is=˜0.3 V since 1V−VT=˜0.3 V. Hence the voltageon line BLP0 240 no longer changes during programming. The voltage onthe segment bitline, however, still changes as VCL is applied andstabilized. But the capacitance on the segment bitline is minimal,=˜0.15pF. Here the operating method just described could also apply to thearray shown in FIG. 4A but the inhibit voltages on the unselectedsegment bitlines are floating. The array shown in FIG. 4D just makessure all the unselected segment bitlines are kept at a constant inhibitvoltage (VINH) 999.

[0170]FIG. 4E shows another array suitable for the method just describedabove. It needs a set of 4 additional lines (INHBLAB0-3) 281-284 and aset of 8 additional transistors 2401-2471 for inhibit decoding. Howeveradditional transistors 2401-2471 occupy less die area than that requiredfor additional inhibit decoding lines 275-280 in FIG. 4D.

[0171]FIG. 4F shows an array architecture similar to that in FIG. 4Awith the inhibit transistors physically at the top of the segment array.

[0172] Note that it is possible to do one top bitline per one segmentedbitline in the ARYSEG0 290. In this case, the sidewall capacitance fromone top bitline to adjacent top bitlines increases due to reducedspacing between the top bitline and the adjacent top bitlines.

[0173] Note that it is also possible to do one top bitline per more thantwo segmented bitlines in the ARYSEG0 290. In this case, more decodingtransistors are needed in the array to select one segmented bitline outof more than two segmented bitlines, which leads to more die size.However the sidewall capacitance from one top bitline to adjacent topbitlines decreases due to increased spacing between the top bitline andthe adjacent top bitlines. This reduction of capacitance may not besignificant if the spacing is already wide enough.

[0174] An alternative embodiment of reducing the bitline capacitance isby hierarchical interconnect segmentation that is an extension over theprevious concept as follows. A first segment bitline running in firstlayer of metal couples to a plurality of memory cells. A second segmentbitline running in second layer of metal is coupled to a plurality offirst segment bitlines by bitline segment transistors through viasbetween metal 1 and metal 2. Third segment bitline running in thirdlayer of metal is coupled to a plurality of second segment bitlines byother bitline segment transistors through vias between metal 1 and metal2 and metal 3. This can continue to higher metal layers. This approachallows optimization of horizontal spacing, vertical spacing,interconnect width, and interconnect length between different layers ofinterconnect metals for minimum capacitive coupling between metalinterconnect lines. This results in further reduced bitline capacitance.TABLE 1 Array Operating Conditions READ ERASE PROGRAM SELECTED SEGMENTS:CG0 3-6 V 8-13 V 0.7-2.5 V CG1, 2, 3 0   8-13 V CG4-15 0 0 0 Rest of all0 0 0 CG lines CL0 2-3 V 0   4-13 V CL1, 2, 3 0 0 0 Rest of all 0 0 0 CLlines BL0, 8, 16 . . . 0 T0 2-3 V FL or 0 V   0-0.8 V BL1-7, 9-15, VINHVINH VINH 17-23, . . . UNSELECTED SEGMENTS: All CG lines 0 V 0 V 0 V AllCL lines 0 V 0 V 0 V All BL lines 0 V 0 V 0 V

[0175] Multilevel Memory Decoding:

[0176]FIG. 6 shows the block diagram of the multilevel decoding scheme.The invention provides precision voltages with millivolt controltolerances to the memory array over temperature, process corners, andpower supply variation. The invention provides these voltages in anefficient manner, meaning deliver power where it is needed and reducingthe output loading through circuit configuration. The invention alsoprovides a multilevel precision decoding circuit with minimum areaoverhead.

[0177] As discussed in the array architecture section, the voltage dropalong the common line would cause a programming error as well as senseerror in read. Hence the drop is brought down to a manageable level. Bypartitioning a common line into small line sections, with drivers onboth sides of each of the line sections, the voltage drop is reduced.However, prior art partition would cause a tremendous area penalty dueto the large amount of decoding lines and circuits. This inventionprovides an enhanced decoding circuit by routing the interconnect in thehigher metal layers and by using circuit configurations suitable formultilevel decoding.

[0178] The block (VCGCLPRED) 156 has been expanded to include sub-blocksinside. Common line predecoder and driver (XCLPREDRV) 950 providepredecoded common lines with precision voltages to regular memory commonlines in block 130 and 132. A common line predecoder and driver(XCLSPREDRV) 954 provides predecoded common lines with precisionvoltages to spare memory common lines in block 134. The circuit block954 is functional equivalent to circuit 950. A control gate predecoder(XCGPREDEC) 951 provides predecoded control gate lines to block 130. Aspare control gate predecoder (XCGSPREDEC) 952 provides predecodedcontrol gate lines to block 134. A bitline predecoder (BLXDEC) 953provides predecoded bitlines to block (MLMDEC) 130. All other circuitblocks have been described in association with FIG. 2A.

[0179]FIG. 7 shows one segmented decoder (RD1SEG) 300. The RD1 SEG 300selects or deselects a plurality of basic array unit (ARYSEG0) 290connected horizontally. The RD1 SEG 300 includes a circuit segmentedsupply decoder (RDSGPSDEC) 301, a segmented bitline decoder (RDSGBLDEC)302, a segmented common line pre-decoder (RDSGCLPDEC) 302B, a segmentedinhibit decoder (RDSGINHDEC) 303, and multiples of a sub-block decoder(RDlSUBBLK) 304. The RDSGPSDEC 301 decodes the high voltage supply foreach segmented decoder (RDLSEG 300). The high voltage supplies for theunselected segmented decoders (RD1 SEG) 300 are disabled and hence poweris minimized due to much less loading and die size is reduced due to asmaller voltage multiplier. The RDSGBLDEC 302 couples the segmentbitlines to the top bitlines when selected. The RDSGINHDEC 303 couplesthe inhibit voltage (VINH) 999 to the appropriate bitlines of theselected array units (ARYSEG) 290 when selected or unselected asdescribed later in FIG. 9B. The RDlSUBBLK 304 enables appropriatecontrol gates and common lines for the memory cells.

[0180]FIG. 8 shows details of the power supply decoder (RDSGPSDEC) 301.Line (NI) 310 and (OI) 311 are predecoded address lines coming from theaddress predecoder block (XPREDEC) 154. Line ENVSUPDEC 312 is a globalenable signal for disabling or enabling all the supply decoders. A NANDgate 315 is a typical 3-input NAND gate with an output line (ENB) 313.An inverter 316 is a typical inverter with input line (ENB) 313 and anoutput line 314. A high voltage level shifter (HVLS1) 317 shifts logicsignal EN 314 into high voltage complementary output signal lines(ENVSUPB) 318 and (ENVSUP) 319. A line (VXRGND) 333 is a low voltageline for (HVLS1) 317. A line (VHSUPPLY) 777 is a precisely regulatedhigh voltage supply for the decoding. A line (VMSUPPLY) 666 is anotherprecisely regulated high voltage supply. A transistor PMOS 322 couplesthe high voltage supply (VHSUPPLY) 777 into line (VHSUPPLYSG) 328 whenthe RDSGPSDEC 301 is selected. Transistors PMOS 323 and 324 coupleregular voltage supply (VDD) 1111 into line (VHSUPPLYSG) 328 when theRDSGPSDEC 301 is deselected. A transistor PMOS 325 couples another highvoltage supply (VMSUPPLY) 666 into line (VMSUPPLYSG) 329 when theRDSGPSDEC 301 is selected. The voltage level on line (VMSUPPLY) 666,e.g., 5-10V, is such that in read the bitline select transistors in thememory array are heavily overdriven to reduce their on resistance, whichresults in insignificant sense error. Transistors PMOS 326 and 327couple regular voltage supply (VDD) 1111 into line (VMSUPPLYSG) 329 whenthe RDSGPSDEC 301 is deselected. The PMOS 323 and 326 have their wellsconnected to line (VDD) 1111. The PMOS 324 and 327 have their wellsconnected to the VHSUPPLYSG 328 and VMSUPPLYSG 329, respectively. Theconnection of their wells is done to avoid source and drain junctiondiodes turning on during the switching.

[0181]FIG. 9A shows details of the segmented bitline select decoder(RDSGBLDEC) 302. Line (ENVSUP) 319 and line (ENBLAVH) 341 connected tothe gates of transistors 360 and 361, respectively, are used to couplevoltage on line VMSUPPLYSG 329 into line ENBLA 369. Either transistor362 with line (ENB) 313 on its gate or transistor 363 with line(ENBLBVL) 342 on its gate is used to couple line (ENBLA) 369 to line(VXRGND) 333. Similarly transistors 364 and 365 together with lines(ENVSUP) 319 and line (ENBLBVH) 343, respectively, on their gates areused to couple voltage on line (VMSUPPLYSG) 329 into line (ENBLB) 371.Either transistor 366 with line (ENB) 313 on its gate or transistor 367with line ENBLAVL 340 on its gate are used to couple line (ENBLB) 371 toline (VXRGND) 333. The voltage level on line (VHSUPPLY) 777 in the block(RDSGPSDEC) 301, e.g., 7-12 V, is such that the transistors 360, 361,364, 365 couple, with minimal loss, the voltage from VMSUPPLYSG 329 intolines (ENBLA) 369 and (ENBLB) 371. The deselect transistors 362, 363,366, and 367 have their gates coupled only to the low voltage signalsinstead of the high voltage control signals as conventionally done. Thiscircuit configuration has the benefit of reducing significantly theloading for the high voltage supply (VHSUPPLY) 777. This circuitconfiguration is applied throughout all the decoding circuits.

[0182]FIG. 9B shows details of the segmented inhibit select decoder(RDSGINHDEC) 303. Either transistor 350 with line (ENVSUPB) 318 on itsgate or transistor 353 with line (ENBLBVH) 343 on its gate couples thevoltage on line (VMSUPPLYSG) 329 to line (INHBLA) 345. Transistors 351and 352 together with lines (EN) 314 and (ENBLAVL) 340, respectively, ontheir gates are used to couple line (INHBLA) 345 to line (VXRGND) 333.Similarly either transistor 354 with line (ENVSUPB) 318 on its gate ortransistor 357 with line (ENBLAVH) 341 on its gate is used to couple thevoltage on line (VMSUPPLYSG) 329 to line (INHBLB) 347. Transistors 355and 356 together with lines (EN) 314 and line (ENBLBVL) 342 respectivelyon their gates are used to couple line (INHBLB) 347 to line (VXRGND)333. Transistor 358 with line (ENVSUP) 319 on its gate is used to couplethe inhibit voltage on line (VINH) 999 to line (VINHSEG) 349. Transistor359 with line (ENB) 313 on its gate is used to couple the voltage online (VINHSEG) 349 to line (VXRGND) 333. Similar to the circuitconfiguration in the RDSGBLDEC 302, the low voltage signals are used forsignal deselection.

[0183] The circuit blocks RDSGPSDEC 301, RDSGBLDEC 302, RDSGINHDEC 303,and RDlSUBBLK 304 are used in the array as shown in FIG. 4A for arrayselection and inhibit decoding.

[0184]FIG. 9C shows a predecoded common line segmented decoder(RDSGCLPDEC) 302B for lines (CLP0-3) 445A-D. Lines (CLP0-3) 445A-D comefrom a common line pre-decoder (XCLPREDRV) 950. The purpose of thiscircuit (RDSGCLPDEC) 302B is to greatly reduce the capacitive loading onlines CLP0-3 seen by the common line pre-decoder (XCLPREDRV) 950. Lines(CLPS0-3) 456A-D are the output lines. Transistors 438A-D with line(ENVSUP) 319 on their gates are used to couple lines (CLP0-3) 445A-D tolines (CLPS0-3) 456A-D, respectively. Transistors 439A-D with line (ENB)313 on their gates are used to couple lines (CLPS0-3) 456A-D to line(VXCLGND) 5555. This concept of segmented loading could also be appliedto predecoded control gates CGP0-15.

[0185]FIG. 10 shows details of the sub-block decoder (RD1SUBLK) 304,that includes a circuit block 304A and a circuit block 304B. Thebloc6tgk 304A includes a NAND gate 412, an inverter 413, and a highvoltage level shifter (HVLSX) 418. The 3-input NAND gate 412 is used foraddress decoding. Line (ENB4) 414 is its output. Lines (MI) 410, (NI)310, and (OI) 311 are predecoded address lines coming from the addresspre-decoder (XPREDEC) 154. The inverter 413 inverts line (ENB4) 414 intoline (EN4) 415. The high voltage level shift (HVLSX) 418 is used toshift the logic signal EN4 415 into the high voltage output signal(ENHV4BLK) 417. Line (VHSUP) 770 supplies high voltage for the levelshifter (HVLSX) 418. Line (VHSUP) 770 couples to line (VHSUPLYSG) 328 ofcircuit block (RDSGPSDEC) 301. The circuit block 304B including a set offour circuit blocks (RD4CG1CL) 416 provides control signals for controlgates (CG) and common lines (CL). Lines CG[0:15] 422A-P couple to 16rows of memory cells, for example, lines 262, 263, 265-268, 270, 271 ofthe block (ARY1BLK) 290A in FIG. 4A. Lines CL[0:3] 423A-D couple to 4shared common lines of memory cells, for example, lines 264 and 269 ofthe block ARY1BLK 290A in FIG. 4A. Lines CGP[0:15] 420A-P are predecodedcontrol gate lines coming from the control gate pre-decoder (XCGPREDEC)951. Lines CLPS[0:3] 456A-D are predecoded common lines coming fromblock RDSGCLPDEC 302B. Line (VXCGGND) 444 is a line for control gate(CG) deselection. Line (VXCLGND) 5555 is a line for common line (CL)deselection.

[0186]FIG. 11A shows details of circuit block (RD4CG1CL) 416.Transistors 430, 432, 434, 436 together with lines (CGPO) 440, line(CGP1) 441, line (CGP2) 442, line (CGP3) 443, respectively, on theirdrains are used to couple these lines 440-443 to output line (CG0) 450,line (CG1) 451, line (CG2) 452, and line (CG3) 453, respectively. Lines(CGP0-CGP3) 440-443 come from a control gate predecoder (XCGPREDEC) 951.Transistor 438 is used to couple line (CLPS0) 456A to line (CL0) 454.Transistor 439 is used to couple line (CL0) 454 to line (VXCLGND) 5555.Line (ENHVLBLK) 446 couples high voltage into the gates of transistors430, 432, 434, and 436. Line (ENB1BLK) 447 couples lines (CG0-3) 450-453to the line (VXCGGND) 444 through transistors 431, 433, 435, and 437,respectively, and couples line (CL0) 454 to line (VXCLGND) 5555 throughtransistor 439. The lines (ENHV1BLK) 446 and (ENB1BLK) 447 are coupledrespectively to lines (ENHV4BLK) 417 and (ENB4) 414 generated by circuitblock 304.

[0187] Four common lines of memory cells are coupled together to onedecoded common line CL as shown in the block (ARYSEG0) 290 in FIG. 4A.Four blocks of the RD4CG1CL 416 are used to provide array blockselection as shown in the block (ARYSEG0) 290 in FIG. 10. One arrayblock is defined as including 16 rows and 4 common lines of memorycells. One array block includes a plurality of blocks (ARY1BLK) 290Aconnected horizontally.

[0188] The lines (VXRGND) 333, (VXCLGND) 5555, and (VXCGGND) 444 couldbe individually controlled to be biased at different voltage levelsduring erase, read, and program to optimize circuit functionality, forinstance, to increase the breakdown or to reduce the leakage of MOSdecoding transistors.

[0189] Note that the same transistors are used for decoding in erase,read, and program operation. In conventional decoding, read decoding isisolated from erase and program decoding since read decoding requiresonly low voltage and hence the decoding size can be optimized for readspeed. Here all decoding is combined together to minimize the die size.Further all decoding is done by NMOS transistors instead of by both PMOSand NMOS transistors as conventionally done. This has the benefit ofreducing the capacitive loading. This is so because in deselection onePMOS presents itself as a gate capacitor load while one NMOS onlypresents itself as a source or drain overlap capacitor load, which ismuch smaller than a gate capacitor load. Low capacitive loading leads toless power consumption for NMOS decoding. This is against conventionalwisdom, which holds that a CMOS circuit is more power efficient than aNMOS circuit.

[0190]FIG. 11B shows an alternative circuit block (RD4CG1CL) 416 with adiode-connected transistor 438F. The transistor 438F provides feedbacksignal (CLK) 445F for a Kelvin type connection to a circuit driverinside the block (XCLPREDRV) 950. A Kelvin connection line consumesminimal (or no) DC current. A Kelvin connection allows a circuit driversuch as a common line circuit driver to stabilize its output signal at adesired voltage level based on feedback voltage from the Kelvinconnection line. This Kelvin connection line (CLK) 445F is connected toother Kelvin connection lines vertically. This is possible since onlyone common line is on at any given time. Once a common line is selected,this common line will take control of the CLK 445F line since thediode-connected transistor will be forward biased and otherdiode-connected transistors on the rest of the common lines will bereverse biased. This will be known as winner-take-all Kelvin decoder.This winner-take-all Kelvin decoder will ensure a predetermined voltageon the line (CL0) 454 will be stable all the time over varying load,process corners, temperature, and power supply variation with minimumcost. The stable voltage on the common line is required to not introducesignificant voltage error in program or in read as described previouslyin the description of the multilevel array architecture.

[0191]FIG. 11C shows a circuit block (RD1 CL) 304C, which is used in acommon line segmentation scheme with the array partitioning shown inFIG. 12 to reduce the voltage drop along the common lines. In anembodiment, one common line (CL) is connected together across the fullarray with a plurality of blocks (RD1 CL) 304C driving the same commonline (CL). Transistor 438S with line (ENHV1BLK) 446 on its gate couplesline (CLPSOS) 456AS to line (CL0) 454. Line (CL0) 454 of this circuitblock 304C is the same line (CL0) 454 of the circuit block (RD4CG1CL)416. A deselect transistor 439S with line (ENB1BLK) 447 couples line(CL0) 454 to line (VXCLGND) 5555. The transistor 439S is optional inthis circuit since the function of coupling line (CL0) 454 to line(VXCLGND) 5555 is already provided by the transistor 439 in the RD4CG1CL416. The transistor 439S provides additional drive ability in additionto that of the transistor 439. Line (CLPSOS) 456AS couples to a commonline pre-decoder (XCLPREDRV) 950. The winner-take-all Kelvin decodingcan also be used here. The control signals (ENHV4BLK) 417 and (ENB4) 414shown in the block (RD1SUBBLK) 304 couple to control signals (ENHVLBLK)446 and (ENB1BLK) 447, respectively. The control signals (ENHV4BLK) 417and (ENB4) 414 are fed through the memory array as shown in FIG. 12. Inan alternate embodiment, one common line is divided into many separatecommon lines across the full array. These separate common lines are notconnected to each other. In this case, each separate common line isdriven on both sides by two blocks (RD1CL) 304C or by a (RD1CL) 304C anda (RD4CG1 CL) 416. Common line segmentation is described more in detailbelow in description associated with FIG. 12.

[0192]FIG. 12 shows a feedthrough-to-memory and feedthrough-to-driverscheme together with the common line segmentation to deliver precisevoltages for memory cells as described in the following. The feedthroughscheme exploits the multi-layer metal interconnect to reduce the circuitcomplexity and die size and to enable innovative circuit configurations.A conventional flash memory system typically only uses up to a maximumof 2 metal layers and hence is limited in core interconnect schemepossibilities. This feedthrough scheme is made possible by three or moremetal layers.

[0193] The block (MLMDECS) 132, shown in FIG. 12 and also in FIG. 3A,includes a plurality of the blocks (RDSGCLPDEC) 302B and a plurality ofthe blocks (RD1CL) 304C. Only one block (RDSGCLPDEC) 302B and one block(RD1CL) 304C per block 132 are shown in FIG. 12 for clarity. Otherblocks have similar connections. The block (MLMDEC) 130, shown in FIG.12 and also in FIG. 3A, includes a plurality of the blocks (RD1SEG) 300.The block RD1SEG 300 includes a block (RDSGPSDEC) 301 and a plurality ofblocks (RD1SUBBLK) 304. Only the block (RDSGPSDEC) 301 and one block(RD1SUBBLK) 304 inside one block RDLSEG 300 are shown in FIG. 12 forclarity. Other blocks have similar connections.

[0194] The feedthrough-to-memory uses a single driver to drive both leftand right sides of a memory array. The layout of row decoding circuitssuch as of the block (RD1SUBBLK) 304 is very dense because of thelimited height of a typical advanced memory cell, e.g., 0.5-1 μm percell height, and the very wide width of each decoding transistor, e.g.,20-50 μm, due to their required precision multilevel drive ability. Thismakes it extremely difficult to route the required lines from the rightside across the active circuit of this row decoding circuit to the leftside with limited layers of metal interconnect. As shown in FIG. 10, thecontrol lines CG[0:15] 422A-P and common lines CL [0:3] 423A-D providesthe control signals to the memory cells on the right side as well as thememory cells on the left side. This is also shown in FIG. 12 in block304B with lines pointing to the right as well as to the left. Similarlyit also shows the control lines from circuit block 304A and 304C drivingboth sides. The feedthrough-to-memory scheme also shows predecoded highvoltage lines (ENHV4BLK) 417 and (ENVSUP) 319 and predecoded low voltagelines (ENB) 313 and (ENB4) 414 being fed through the memory by runningon top of the memory, for example, in metal 4, without interfering withthe memory cells underneath. Other control lines could also be fedthrough the memory. Again this is achievable by three or more metallayers which allow a different circuit configuration with minimal activearea. The circuit block 304C is the precision voltage driver for thecommon lines CL of the memory cells in addition to the circuit block304B. The feedthrough-to-driver scheme shows control signals fromcircuit blocks 304B and 304A being fed through the memory array to theprecision voltage drivers 304C.

[0195] The common line segmentation is also shown in FIG. 12. Each metalcommon line runs the length of the memory core horizontally across thefull array with seven circuit blocks (RD1CL) 304C and two circuit blocks(RD1SUBBLK) 304 driving the same common line. The voltage drop acrossone common line is thus divided into eight voltage drop segments. Eachvoltage drop segment belongs to each common line of each sub-array block(MFLSUBARY) 101. Within each voltage drop segment, the voltage value onthe left side is same as the voltage value on the right side of thevoltage drop segment and the lowest voltage value is in the middle ofthe voltage drop segment. This is because there is a precision circuitdriver (RDLCL) 304C or (RD4CG1CL) 416 on each side of the voltage dropsegment. One alternative embodiment of the common line segmentationscheme is to have these common lines physically divided into eightseparate common lines. That is, each sub-array block (MFLSUBARY) 101shown in FIG. 12 has its separate common line. However, in this case,the deselect transistor 439S in the block (RD1CL) 304C is no longeroptional but necessary to deselect each separated common line.

[0196] The voltage level on the control gates is controlled by thevoltage on the lines (CGP[0:15]) 420A-P in circuit block 304. Thevoltage on lines (CGP[0:15]) 420A-P are in turn controlled by a precisebandgap-referred regulated voltage. Hence precision voltage level isprovided at the memory control gates. The voltage level on the commonlines is controlled by the voltage on the predecoded common lines(CLP[0:3]) 421A-D in circuit block 304. The voltage on lines (CLP[0:3])421A-D are in turn controlled by a precise bandgap-referred regulatedvoltage for each common line driver. Hence precision voltage level isprovided at the memory common lines. The programming and sensing currentbias are also bandgap-referred; hence they are highly stable.

[0197] Note that in FIG. 12 an alternative embodiment is to share oneblock (RDSGPSDEC) 301 or 304A across the full array by doing feedthroughof the outputs of (RDSGPSDEC) 301 or 304A across the full memory array.In this case the drive ability of the driver circuit inside block(RDSGPSDEC) 301 or 304A should be adequately designed to drive the longinterconnect lines.

[0198] Note that in FIG. 10 an alternative embodiment is to have aseparate block (RD4CG1CL) 416 for driving the right side of an array andanother separate block (RD4CG1CL) 416 for driving the left side of anarray. Another alternative embodiment is to share just one CL driver forboth left and right sides but to have separate control gate CG driversfor the left side and the right side.

[0199] Multilevel Reference System:

[0200]FIG. 13 shows a block diagram for a multilevel digital memoryreference system. All the relevant blocks have been described inassociation with previous figures. The highlighted blocks 106, 116, 126,and 146 with the highlighted lines (VREF0-15) 760-775 are shown to showthe reference system in relation to the physical position of the arrayand y-drivers. The physical position of the reference arraycorresponding to various schemes is explained in the followingdescription.

[0201]FIG. 14 shows details of a multilevel digital memory referencesystem. A reference circuit block (VREFGEN) 719 is used to provide allreference voltage levels for erasing, programming, sensing, margintests, and production tests. Shown are reference levels for referencecells (VREFR0-15) 700-715 and reference levels for data cells(VREFD0-15) 720-735. Data cells refer to memory cells that store digitaldata. A 16 level multilevel flash cell is assumed for this discussion. Aflash reference array (MFLASHREF) 106 includes a plurality of blocks(MFLASHREFS) 106A. A block (MFLASHREFS) 106A includes a plurality ofreference memory cells. A reference page select 126A is used to selectthe reference cells in the blocks (MFLASHREFS) 106A associated with aselected page. Each block 126A selects one reference cell in onecorresponding block (MFLASHREFS) 106A. For each selected page, there are16 blocks 126A selecting 16 reference cells in 16 corresponding blocks(MFLASHREFS) 106A. The 16 selected reference cells makes up one pagereference.

[0202] A buffer (VRBUFFER) 750 and a comparator 801 are inside a block(REFYDRVS) 116S. The buffer (VRBUFFER) 750 is used to drive eachreference level of (VREF0-15) 760-775 for all the y-drivers. A buffercircuit without offset auto zero 750A is used to isolate the referencecell from all capacitance from auxiliary circuits. The offset auto zerocancels out the voltage offset of an analog buffer. The voltage offsetof an analog buffer is typically uncontrollable and is caused bythreshold voltage mismatch, transistor transconductance mismatch, andsystematic offset. This voltage offset would cause an uncertainty in thereference voltage, which would degrade the margin of one voltage levelwith respect to another voltage level. Line (VBUFO) 781 is used toverify a reference cell is programmed to one desired reference level outof 16 possible reference levels. Line (VBUFO) 781 is used instead of thedirect memory cell output for verifying in the verify cycle. This is toinclude the buffer offset from buffer 750A in the verifying process. Thecomparator 801 is used to do the actual comparison in verify. A bufferwith offset auto zero 750B is used to drive a reference level. Variousvoltage levels needed for multilevel algorithm are also generated by thebuffer 750B with switch capacitor technique. The auto zero is needed tozero out the offset of this buffer since a typical buffer offset is10-20 mV. This voltage amount if not canceled out would degrade themargin of a reference level, which effectively reduces the voltagemargin for each level. Capacitors are needed to accomplish the auto zeroand level shifting operation in the buffer 750B. However as described inthe array architecture description, any additional capacitance wouldadversely degrade the write and read speed. Hence buffer 750A isinserted between the reference cell and the buffer 750B so that thereference cell only sees one gate capacitance inside a typical buffer asa capacitor load.

[0203] Lines (VREF0-15) 760-775 are the final reference lines drivinginto all the y-drivers as needed for verify-program cycles and readcycles. Switch S 750D couples line (VREFD) 720 to the input terminal ofbuffer 750B when one selected page programs for the first time. Switch S750C couples line (VBUFO) 781 to input terminal of buffer 750B when thesame selected page programs for the second time or more without an erasein between program. The reason is that for first time programming,reference levels for data cells come from a reference generator VREFGEN719 and for subsequent programming reference levels come from thereference cells in MFLASHREFS 106A.

[0204] For the memory system described herein, there are 8 pages foreach row, 4 rows for each block, and 512 bytes per page with a 4-bitdigital multilevel memory cell. Since any one page is written or read atany time a complete reference set of 16 levels is reserved for each pageinstead of for each row. This is done to preserve the operatingconditions through the lifetime of a memory system exactly the same forreference cells as regular data cells. This is done for example to makethe reference and data cells have the same voltage readout drift overtime. For each row, there are 8×16=128 reference cells. This has somesmall die size penalty. The reference cells are written at the same timeas the regular data cells.

[0205] After the reference cells are written with the first programmingsequence, if subsequent programming cycles are allowed to write otherdata cells in the same page, the previously programmed reference cellsstay in the program inhibit mode. This is accomplished as shown in FIG.15. A comparator 850 is used to compare a reference voltage from abandgap VREF 851, e.g., 1.2 V, versus a readout voltage from a referencememory cell VREFOUT 852, for example, level 0, e.g., 0.5V. If thereference cell has not been written, VREF 851<VREFOUT 852, then line(REFON) 853 would be low. If the reference cell has been written, VREF851>VREFOUT 852, then line (REFON) 853 would be high indicating that thereference cells have been previously written and the reference cells areinhibited in programming.

[0206] For subsequent programming cycles after the first programmingcycle, the reference voltages for the data cells come from the referencecells and the reference voltages are shifted appropriately to place thedata voltages in between the adjacent reference voltages.

[0207] The voltage drop along the common line poses a particular problemfor a multilevel reference system. Reference cells are needed to trackthe data cells over temperature, process, or power supply. But astemperature changes, the voltage drop along the common line changes,which causes a sense error. The voltage drop along the line from one endto the other end follows geometrically as described earlier. That isdepending on position along the common line, the cells experiencedifferent amounts of common line voltage changes, which cause differentvoltage readout shifts due to different voltage amounts being coupledinto the cells. This cannot be corrected by a conventional referencesystem.

[0208]FIG. 16 shows a positional linear reference system that correctsthis error. Assuming the voltage drop along a line is linear andassuming an acceptable voltage shift is DVREF/2, by dividing the voltagedrop DVTOTAL 859=VBEG 855-VEND 856, into different voltage segments withequal voltage drop DVREF 858 and by positioning the reference cells 857in the middle of a divided array segment (ARYVSUB1-3) 888A-Ccorresponding to a voltage segment, the maximum voltage difference froma reference cell to a data cell in the beginning or at the end of thevoltage segment is=<DVREF/2. Hence reference correction over temperatureis achieved. It is possible to place the reference cells 857 at thebeginning or the end of a divided array segment (ARYVSUB 1-3) 888A-C. Inthis case the maximum voltage difference from a reference cell to a datacell is DVREF instead of DVREF/2 as in the case of positioning thereference array in middle of a divided segment array. Another advantageof placing the reference cells in the middle of a divided array segmentis to minimize the electrical variation due to the edge interface fromthe memory array to peripheral circuits.

[0209]FIG. 17 shows a positional reference geometric system basing onthe concepts similar to FIG. 16. In this embodiment, the reference cells857 are not symmetrically but geometrically positioned to correct forthe geometric effect of the voltage drop.

[0210] In FIGS. 16 and 17, each full array is divided into threesub-arrays (ARYVSUB1-3) 888A-C and (ARYVSUB4-6) 888D-F respectively. Itshould be noted that the array could be divided into as many sub-arraysas needed to reduce the voltage error. Also shown in FIGS. 16 and 17,each sub-array of ARYVSUB1-6 888A-F includes its own complete set ofreference cells in the middle. A complete set of reference cellsprovides all the reference levels, e.g., 16 levels for 4-bit digitalmultilevel cell per page, for all the pages. One row of reference cellsincludes 128 reference cells if each row has 8 pages and each referencecell provides one reference level. An alternative embodiment is to havemore than one reference cell per level, e.g., 4-16 cells per level. Thisaverages out the electrical variation of multiple cells.

[0211]FIG. 18 shows a geometric compensation reference system. Theobjective is to simulate the voltage drop in the common line into thereference readout voltage by attaching similar loading currents to thereference readout voltage. A resistance R 862 in the reference line ismade equivalent to a resistance R 866 in the common line. A referenceloading current (ICELLR) 868R is made the same as that of ICELL 868.Hence the total voltage drop in reference DVREFTOTAL 863,=REFB 860-REFE861, is equal to DVCLTOTAL 867,=VCLB 864-VCLE 865. It is not necessaryto attach the same number of loading reference currents ICELLR 868R tothe number of ICELL 868. It is only necessary to attach the approximateamount of the current loading at appropriate positions to minimize theerror to an acceptable level.

[0212] One alternative embodiment of the reference system is, instead ofusing 16 reference cells for a 4-bit digital multilevel cell, to use 2or 4 or 8 reference cells to generate 16 reference levels with levelinterpolation. That is from reference levels coming from referencecells, the other reference levels are interpolated by using linear orany other interpolation.

[0213] Multilevel Algorithm:

[0214]FIG. 19A shows various voltages generated and used in oneembodiment of the invention for program verifying, program upper andlower margin verifying, read sensing and restore high or restore lowmargin verifying during read sensing. The read sensing is advantageouslyperformed in the voltage-mode but other modes of read sensing are alsoapplicable. All the voltages are generated by the V&IREF block 172.VREFR(L) is the program verify voltage used to verify program level (L)of a reference cell. VREFD(L) is the program verify voltage used toverify program level (L) of a data cell. For example, in a 4 bit percell storage embodiment there are 16 levels used. It is also possible touse 15 levels instead of 16 levels since the extreme low or high levelsnot need to be constrained to exact low or high levels but can go toground or power supply respectively. VREFR0 through VREFR15 are programverify voltages used for verifying programming of the reference cells.VREFD0 through VREFD15 are program verify voltages used for verifyingprogramming of the data cells. VUM(L) and VLM(L) are upper and lowerprogram margin voltages respectively for level L. Each level L may haveits own VUM(L) and VLM(L) voltage values. VUM(L) and VLM(L) can each beof different value also for each level L. On the other hand, VUM(L) andVLM(L) can be of the same voltage value for all the levels. VUM(L) andVLM(L) voltages are generated by the block V&IREF 172. VRSTH(L) andVRSTL(L) are RESTORE HIGH and RESTORE LOW margin voltages respectivelyfor level L. Each level L may have its own VRSTH(L) and VRSTL(L) voltagevalue. VRSTH(L) and VRSTL(L) can each be of different value also foreach level L. On the other hand, VRSTH(L) and VRSTL(L) can be of thesame voltage value for all the levels. VRSTH(L) and VRSTL(L) voltagesare generated by the V&IREF 172 block. VCELLR(L) is the voltage readback from a reference cell during read sensing. VCELLD(L) is the voltageread back from a data cell during read sensing. The cross-hatchedregions show the distribution of possible read back voltages during readsensing after reference cells or data cells have been programmed to acertain level L, while using VREFR(L) or VREFD(L) as the program verifyvoltage, respectively. The distributions occur because every cell doesnot have the same programming or read sensing characteristics.

[0215] Page Programming Cycle:

[0216]FIG. 20 shows the flow diagram for one embodiment of the pageprogramming cycle. During a page programming cycle a plurality of memorycells are programmed in parallel. However this algorithm is equallyapplicable for single cell programming. As an example, 4 bit per cell isprogrammed in each cell. First the program command is issued and theaddress of the page to be programmed is loaded. The data count NC isinitialized. The address loading may be performed through a single or aplurality of address cycles. Program data is input during the DATAINstep and is selectively loaded in the internal latches of a YDRVS 110Sor SYDRVS 114S or RYDRV 112S. Block YDRV 110, SYDRV 114, (RYDRV) 112includes a plurality of YDRVS 110S, SYDRVS 114S, RYDRVS 112Srespectively. Block YDRVS 110S will be described in detail later in thedescription associated with FIG. 26. Data gets loaded into the datalatches of the current YDRVS 110S or SYDRVS 114S selected from theADDRCTR 162 and the BYTEDEC 152. The redundancy control block REDCNTRL186 asserts RED_ADD_TRUE true (YES or Y) or false (NO or N) to signifywhether the current YDRVS 110S or SYDRVS 114S is GOOD or BAD. A YDRVS110S or SYDRVS 114S is GOOD if it has not been flagged as one thatcannot be used to load input data on its data latches. A YDRVS 110S orSYDRVS 114S is BAD if it has been flagged as one that cannot be used toload input data on its data latches. GOOD or BAD YDRVSs or SYDRVSs areflagged during manufacturing testing and the flags are internally storedon non-volatile latches. If RED_ADD_TRUE=NO, meaning current YDRVS 110Sor SYDRVS 114S is GOOD, then a data nibble on the IO[0:3] or IO[4:7] busis placed at the input of the data latches of the current YDRVS 110S orSYDRVS 114S. A data byte consists of 8 digital bits and a data nibbleconsists of 4 digital bits. If RED_ADD_TRUE=Y, meaning current YDRVS110S or SYDRVS 114S is BAD, then the data nibble on the IO[0:3] orIO[4:7] bus is placed at the data latches of the selected RYDRVS 112S.Next, if NEXTDATAIN=Y, the data at the input of the data latches of therespective YDRVS 110S, SYDRVS 114S or RDYRVS 112S is latched. IfNEXTDATAIN=N then the flow waits for the program start command PRG.Next, if the data count NC>MAXNC=not true (N), then NC=NC+1 and the flowloops back to DATAIN step to load in the next data byte. If the datacount NC>MAXNC=true (Y), then the flow goes out of the loop and waitsfor the program start command PRG. The data count MAXNC signifies thenumber of data bytes that are simultaneously programmed in a page. Next,if command PRG is received then page programming begins. If command PRGis not received then the flow loops back to check for NEXTDATAIN. Nodata loading is required for blocks (REFYDRVS) 116S because theirlatches are internally set. A block (REFDRV) 116 includes a plurality ofblocks (REFYDRVS) 116S.

[0217]FIG. 21 shows the flow diagram after page programming begins. TheProgram flag=Pass is set and the BUSY signal is set. In anotherembodiment a configuration (fuse) bit initialization is executed to loadin data from fuse non-volatile memory cells to volatile latches locatedin the fuse circuit block (FUSECKT) 182 at this step. The programinhibit mode of all cells in the page being programmed are reset toenable programming. Based on the output B[0:3] of the data latches ofeach YDRVS 110S, SYDRVS 114S or RYDRVS 112S a program verify voltageVREFD(L) is set at the input of the comparator in each of the respectiveYDRVS 110S, SYDRVS 114S or RYDRVS 112S. Based on the output B[0:3] ofthe data latches of each REFYDRVS 116S a program verify voltage VREFR(L)is set at the input of the comparator in each REFYDRVS 116S. For eachreference cell and data cell in the page being programmed, the cellvoltage VCELLD(L) or VCELLR(L) is read. Depending on the output B[0:3]of the data latches (a) for each REFYDRVS 116S the appropriate programverify voltage VREFR(L) is compared to the reference cell read backvoltage VCELLR(L) and (b) for each YDRVS 1 OS, SYDRVS 114S, RYDRVS 112S,the appropriate program verify voltage VREFD(L) is compared with datacell read back voltage VCELLD(L) to indicate whether further programmingis required. If no further programming is required for a particularreference cell or data cell, it is put in the program inhibit mode. Ifthe Program Pulse Count=MAXPC is not true, then the cells are placed inthe program mode and another programming pulse is applied to all thecells in the page, including the reference cells. Cells which are in theprogram inhibit mode do not get any additional programming. Cells whichare not in the program inhibit mode get additional programming. Afterthe programming pulse is applied, the program pulse count is incrementedand the cells are placed in the voltage-mode read to verify if furtherprogramming is required. This iterative verify-program loop is continueduntil either all the cells in the page including the reference cells arein the program inhibit mode or when the program pulse count=MAXPC istrue. If program pulse count=MAXPC true condition is reached, before allcells in the page including the reference cells are all in programinhibit mode, then the program flag=fail condition is set, BUSY signalis reset and the programming cycle is done. Whenever the All Cells inProgram Inhibit Mode=true condition is reached, the flow moves to thenext step as shown in FIG. 22A.

[0218] As shown in FIG. 22A, next, for each level L, upper programmargin verify voltage UMV(L)=VCELLR(L)−VUM(L) is generated, where VUM(L)is the upper margin voltage for level L. Depending on the data latchoutput B[0:3] of the data latches in the respective YDRVS 110S, SYDRVS114S, RYDRVS 112S the appropriate voltage UMV(L) is compared with readback cell voltage VCELLD(L) for all the data cells. If the result ofcomparison indicates that all upper cell margins are not within limitsthen a program flag=fail condition is set; BUSY signal is reset andprogramming cycle is done. If the result of comparison indicates thatall the upper cell margins are within limits then a program flag=failcondition is not set and then, for each level L, lower program marginverify voltage LMV(L)=VCELLR(L−1)+VLM(L) is generated, where VLM(L) isthe lower margin voltage for level L. Depending on the data latch outputB[0:3] of the data latches in the respective YDRVS 110S, SYDRVS 114S,RYDRVS 112S the appropriate voltage LMV(L) is compared with read backcell voltage VCELLD(L). If the result of comparison indicates that alllower cell margins are not within limits then a program flag=failcondition is set; BUSY signal is reset and programming cycle is done. Ifthe result of comparison indicates that all the lower cell margins arewithin limits then a program flag=fail condition is not set and BUSYsignal is reset and programming cycle is done. The program flag=failindicates the programming cycle has been unsuccessful to program thecurrent page. It does not indicate specifically which cell or cellscaused the unsuccessful programming.

[0219] Page Read Cycle:

[0220]FIG. 23 shows the flow diagram for the page read cycle. During apage read cycle a plurality of memory cells are read in parallel.However this algorithm is equally applicable for single cell read. Afterthe page read command is issued along with the address of the page to beread, the BUSY signal is set, RESTOREL and RESTOREH flags are reset, thedata latches in the YDRVS 110S, SYDRVS 114S, RYDRVS 112S are set tooutput B[0:3]=1111 and N is set to 3. N represents the number of bitsstored per memory cell. In another embodiment a configuration (fuse) bitinitialization is executed to load in data from fuse non-volatile memorycells to volatile latches located in the fuse circuit block (FUSECKT)182 at this step. All the cells in the addressed page are placed in thevoltage-mode read and the cell voltages, VCELLR(L) for reference cellsand VCELLD(L) for data cells are read. BN is forced to “0” and the readverify voltage VCELLR(L), which is one of the reference read backvoltages dependent on B3, B2, B1, B0, is compared with the cell readback voltage VCELLD(L). For each cell, if the VCELLD(L)>VCELLR(L) thenBN is latched as “1”, otherwise BN is latched as “0”. The loop continuesuntil all the bits B3, B2, BE1, B0 are latched and N=0. Next, as shownin FIG. 24, for each level L, a MARGIN RESTORE LOW VoltageVRSTRL(L)=VCELLR(L)−VRSTL(L) is generated, where VRSTL(L) is the restorelow margin voltage. Depending on the latched bits B3, B2, B1, B0 on eachof the YDRVS 110S, SYDRVS 114S, RYDRVS 112S, the voltage VRSTRL(L) iscompared with the respective data cell read back voltage VCELLD(L). IfVCELLD(L)>VRSTRL(L) for any one of the cells, then the RESTOREL flag isset. Next, for each level L a MARGIN RESTORE HIGH VoltageVRSTRH(L)=VCELLR(L−1)+VRSTH(L) is generated, where VRSTH(L) is therestore high margin voltage. Depending on the latched bits B3, B2, B1,B0 on each of the YDRVS 110S, SYDRVS 114S, RYDRVS 112S, the voltageVRSTRH(L) is compared with the respective data cell read back voltageVCELLD(L). If VCELLD(L)<VRSTRH(L) for any one of the cells, then theRESTOREH flag is set, otherwise RESTOREH flag is not set. Next, as shownin FIG. 25, BUSY signal is reset and the byte count ND is initialized toNDI. NDI is the byte count of the existing byte address location. Allbits in the respective YDRVSs, SYDRVSs, or RYDRVSs data latches areready to be sequentially read. Whenever READ CLOCK=Y, the RED_ADD_TRUEis checked for that byte address location. If RED_ADD_TRUE=Y, then datafrom RYDRVS 112S is output to the IO port IO[0:7] 1001, otherwise datafrom YDRVS 110S is output to the io port IO[0:7] 1001. If READ CLOCK=Nand ENABLE=Y then the flow loops back until READ CLOCK=Y or ENABLE=N.After all the data is output i.e. ND>MAXND=Y or if ENABLE=N, the Pageread cycle is done. If ND>MAXND is=N, then ND is incremented and theflow loops back to check the READ CLOCK.

[0221]FIG. 26 shows the details of an embodiment of YDRVS 110S. SYDRVS114S and RYDRVS 112S have similar details. The description given forYDRVS 110S is equally applicable for SYDRVS 114S and RYDRVS 112S. Inthis embodiment 4 bits are stored per memory cell, hence four datalatches are required per YDRVS 110S. A set of four data latches(DATALAT3) 10, (DATALAT2) 11, (DATALAT1) 12, (DATALAT0) 13 holds thedata during the DATAIN step of a page programming cycle or holds thedata during a LATCH EN=1 or=0 step during a page read cycle. Data isloaded into DATALAT3 10, DATALAT2 11, DATALAT1 12, DATALAT0 13 throughthe DIN3 14, DIN2 15, DIN1 16, DIN0 17 lines respectively and read outfrom the DATALAT3 10, DATALAT2 11, DATALAT1 12, DATALAT0 13 through theDOUT3 18, DOUT2 19, DOUT1 20, DOUT0 21 lines respectively. Lines (DIN3)14, (DIN2) 15, (DIN1) 16, (DIN0) 17, (DOUT3) 18, (DOUT2) 19, (DOUT1) 20,(DOUT0) 21 connect to BYTESEL 140 for YDRV 110 and connect to blocks144, 142 for SYDRV 114, RDYRV 112 respectively. During page programcycle, lines (B3) 22, (B2) 23, (B1) 24, (B0) 25 are outputs of DATALAT310, DATALAT2 11, DATALAT1 12, DATALAT0 13, respectively, and have alatched logical relationship to the lines (DIN3) 14, (DIN2) 15, (DIN1)16, (DIN0) 17, respectively. During page read cycle lines B3 22, B2 23,B1 24, B0 25 are output of DATALAT3 10, DATALAT2 11, DATALAT1 12,DATALAT0 13 respectively and represent the 4 bits read out of the cell.Depending on the status of lines (B3) 22, (B2) 23, (B1) 24, and (B0) 25,the REFERENCE MULTIPLEXER 26 couples one of the lines VR0 through VR15to one input of the VOLTAGE COMPARATOR 27. The output of the VOLTAGECOMPARATOR 27 connects to the input of the LATCH 28. Under the controlof ALGOCNTRL 164, the line ENLATCOMP 29 functions as a strobe signal toenable the LATCH 28 during a certain time to latch the output of theVOLTAGE COMPARATOR 27. Line RBYLATCOMP 30 resets the LATCH 28 atsuitable times under the control of ALGOCNTRL 164. The PROGRAM/READCONTROL 31 outputs lines COMPOR 32 and COMPORB 33. COMPOR 32 and COMPORB33 lines are connected together in a wire-OR manner for all YDRV 110,SYDRV 114, and RYDRV 112. The PROGRAM/PROGRAM INHIBIT SWITCH 34 puts thememory cell coupled to it indirectly through line BLIN 35 into a programor program inhibit mode under the control of PROGRAM/READ CONTROL 31.Line BLIN 35 goes to the PSEL 120 for YDRV 110 and to blocks 124, 122for SYDRV 114, RYDRV 112 respectively. The lines VR0 through VR15individually are coupled to the output of a VRBUFFER 750.

[0222]FIG. 27 shows the details of a LATCH 28 block, a PROGRAM/READCONTROL 31 block and a PROGRAM/PROGRAM INHIBIT 34 block. The VROUT line55 couples the output of REFERENCE MULTIPLEXER 26 to the positive inputof a VOLTAGE COMPARATOR 27. The line COMPOUT 58 couples the output ofthe VOLTAGE COMPARATOR 27 to the D input of a latch 59. ENLATCOMP 29goes to the EN input of the latch 59. ENLATCOMP 29 acts as a strobesignal for the latch. When ENLATCOMP 29 is at logic high the latch 59outputs the logic level on D input to the Q output. QB is the invertedlogic level of Q. When ENLATCOMP 29 goes to logic low, the latch 59latches the logic level on D input. RBYLATCOMP 30 goes to the reset Rinput of the latch 59. When RBYLATCOMP 30 is logic low latch 59 isreset, whereby Q is at logic low and QB is at logic high. Line COMLATQ40 couples the Q output of the latch 59 to the gate of a NMOS transistorN1 43. Line COMLATQB 41 couples the QB output of the latch 59 to thegate of a NMOS transistor N2 44. Line COMLATQ 40 also couples to thedata latches DATALAT3 10, DATALAT2 11, DATALAT1 12, DATALATO 13. COMLATQ40 also couples to one input of a 2 input NAND gate NAND 49. The otherinput of the NAND 49 is coupled to the signal READ2B. READ2B is at logichigh during page programming cycle and at logic low during page readcycle. The line NDO 52 couples the output of NAND 49 to the input of aninverter INV 48 and also to the gate inputs of PMOS transistor P1 45 andNMOS transistor N3 47. The line INVO 53 couples the output of INV 48 tothe gate of a P-MOS transistor P2 46. Line BLIN 35 connects to oneterminal of each of P1 45, N3 47 and P2 46. BLIN 35 also connects to thenegative input of VOLTAGE COMPARATOR 27. The other terminal of P1 45 isconnected to inhibit voltage input VIH 57. Line N4D 54 connects theother terminals of N3 47 and P2 46 to one terminal of NMOS transistor N450. Line N5D 60 connects the other terminal of N4 50 to one terminal ofNMOS transistor N5 51. The other terminal of N5 51 is connected toground. The gates of N4 50 and N5 51 are connected to inputs VBIYDRVCAS56 and VBIYDRV 57 respectively. N4 50 and N5 51 form a current biascircuit whereby a constant current load is placed on the BLIN 35 whenINVO 53 is at logic low and NDO 52 is at logic high. N4 50 and N5 51together represent the predetermined bias current for the voltage modesensing as shown in FIG. 2C.

[0223] After the page program command and the address of the page to beprogram is issued, the data to be programmed is loaded in the datalatches DATALAT3 10, DATALAT2 11, DATALAT1 12, DATALAT0 13 of each ofthe YDRVS 110S, SYDRVS 114S or RYDRVS 112S. The REFERENCE MULTIPLEXER 26then couples one of the inputs VR0 through VR15 to its output VROUT 55.During a program verify cycle VREFD(0) through VREFD(15) are availableon the VR0 through VR15 lines respectively. VR0 through VR15 arecommonly coupled to REFERENCE MULTIPLEXER 26 of all the YDRV 110, SYDRV112, RYDRV 14. The REFYDRVS 116S have the data latches internally set.In this embodiment there are 16 REFYDRVS 116S. Each REFYDRVS 116S isused for a specific level. For example, the data latches of a REFYDRVS116S used for level 5 will be internally set to program level 5 intoreference cells coupled to it. VR0 through VR15 are commonly coupled toREFERENCE MULTIPLEXER 26 of all the REFYDRVS 116S. During a programverify cycle, VREFR(0) through VREFR(15) are respectively available atthe VR0 through VR15 lines of a REFYDRVS 116S. Depending on the outputB3, B2, B1, B0 of the data latches DATALAT3 10, DATALAT2 11, DATALAT112, DATALAT0 13 within each YDRVS 110S, SYDRVS 114S, SYDRVS 112S onespecific voltage VREFD(0) through VREFD(15) is output to the input ofthe VOLTAGE COMPARATOR 27. Depending on the output B3, B2, B1, B0 of thedata latches DATALAT3 10, DATALAT2 11, DATALAT1 12, DATALATO 13 withineach REFYDRV 116 one specific voltage VREFR(0) through VREFR(15) isoutput to the input of the VOLTAGE COMPARATOR 27.

[0224] The latch 59 within each REFYDRVS 116S, YDRVS 110S, SYDRVS 114Sand RYDRVS 112S are all reset by pulsing line RBYLATCOMP 30. RBYLATCOMP30 is commonly connected to the reset input of the latch 59 within eachREFYDRVS 116S, YDRVS 110S, SYDRVS 114S, and RYDRVS 112S. After latch 59is reset, COMLATQ 40 is at logic low. The NAND 49 then outputs logichigh to line NDO 52. Output of INV 48 then is at logic low on line INVO53. With NDO 52 at logic high and INVO 53 at logic low transistors N3 47and P 246 couple BLIN 35 to N4 50. P1 45 de-couples the inhibit voltageVIH 57 from BLIN 35. The memory cell is placed in the voltage read modeand the cell read back voltage VCELLR(L) or VCELLD(L) is available onBLIN 35. At this point, the VOLTAGE COMPARATOR 27 compares the voltagesat its inputs. If voltage on BLIN 35 is higher then voltage on VROUT 55the output COMPOUT 58 is low, otherwise it is high. At this time apositive going strobe pulse is applied to the ENLATCOMP 29 common to allthe latches 59 in REFYDRVS 116S, YDRVS 110S, SYDRVS 114S and RYDRVS112S, to latch the status of line COMPOUT 58. If COMPOUT 58 is low, thenthe COMLATQ 40 remains at logic low.

[0225] If COMPOUT 58 is high, then the COMLATQ 40 switches to logichigh. If during an iteration of verify-program cycles any one of thelatches 59 latches a logic high on COMLATQ 40, called a program inhibitstate, then for that specific REFYDRVS 116S, YDRVS 110S, SYDRVS 114S orRYDRVS 112S, the line NDO 52 is at low and the line INVO 53 is at logichigh. With latch 59 in a program inhibit state, BLIN 35 is de-coupledfrom N4D 54 and there is no current load, whereas, BLIN 35 is coupled tothe inhibit voltage VIH 57 through P1 45. With latch 59 in the programinhibit state, further programming pulses do not cause programming.

[0226] The line COMPOR 32 is connected in a wire-OR fashion to all theCOMPOR 32 lines of each REFYDRVS 116S, YDRVS 110S, SYDRVS 114S or RYDRVS112S. There is a pull up load coupling the COMPOR 32 line to the powersupply. Similarly, the line COMPORB 33 is connected in a wire-OR fashionto all the COMPORB 33 lines of each REFYDRVS 116S, DRVS 110S, SYDRVS114S or RYDRVS 112S. There is a pull up load coupling the COMPORB 33line to the power supply. The COMPORB line 33 goes high whenever all thelatches 59 have reached the program inhibit mode. When the Program PulseCount=MAXPC is reached, the ALGOCNTRL 164 latches the status of COMPORBline 33 in a status latch in block INPUT LOGIC 160. The status latch canbe read at one of the IO[0:7] 1001 lines by the external host. IfALGOCNTRL 164 latches a logic low in the status latch in block INPUTLOGIC 160 then a program fail condition is reached and the ALGOCNTRL 164goes out of the page programming cycle.

[0227] If at the end of any verify-program iteration, the COMPOR 32 linegoes high, the ALGOCNTRL 164 sequences to the margin verify mode. Alllatches 59 are reset. All cells are placed in the voltage read mode byREADB 52 at logic low. At this time inhibit voltage is de-coupled fromBLIN 35 and current bias transistor N4 50 is coupled to BLIN 35. Cellvoltages VCELLR(L) or VCELLD(L) are respectively available on BLIN 35 ofa REFYDRVS 116S or BLIN 35 of YDRVS 110S, SYDRVS 114S, or RYDRVS 112S.During program margin verify the voltages read back from the data cellsare checked for adequate margin from voltages read back from referencecells for each programmed level L. In the Upper Program Margin Verifymode, voltages UMV(0) through UMV(15) are placed on the VR0 throughVR(15). Depending on the output B3, B2, B1, B0 of the data latchesDATALAT3 10, DATALAT2 11, DATALAT1 12, DATALAT0 13 within each YDRVS110S, SYDRVS 114S, RYDRVS 112S one specific voltage UMV(0) throughUMV((15) is output to the input VROUT 55 of the VOLTAGE COMPARATOR 27.At this time the VOLTAGE COMPARATOR 27 compares the voltages at itsinputs. If voltage on BLIN 35 is higher then voltage on VROUT 55 theoutput COMPOUT 58 is low, otherwise it is high. At this time a positivegoing strobe pulse is applied to the ENLATCOMP 29 common to all thelatches 59 in YDRVS 110S, SYDRVS 114S and RYDRVS 112S, to latch thestatus of line COMPOUT 58. If COMPOUT 58 is low, then the COMLATQ 40remains at logic low. If COMPOUT 58 is high, then the COMLATQ 40switches to logic high. At this time, if LGOCNTRL 164 latches a logiclow in the status latch in INPUT LOGIC 160 block by looking at thestatus of the COMPORB 33 line, then a program fail condition is reachedand the ALGOCNTRL 164 goes out of the page programming cycle. Otherwise,ALGOCNTRL 164 sequences to the Lower Program Margin Verify mode.

[0228] In the Lower Program Margin Verify mode, all latches 59 arereset. Voltages LMV(0) through LMV(15) are placed on the VRO throughVR(15). Depending on the output B3, B2, B1, B0 of the data latches(DATALAT3) 10, (DATALAT2) 11, (DATALAT1) 12, (DATALAT0) 13 within eachYDRVS 110S, SYDRVS 114S, RYDRVS 112S one specific voltage LMV(0) throughLMV(15) is output to the input VROUT 55 of the VOLTAGE COMPARATOR 27. Atthis time the VOLTAGE COMPARATOR 27 compares the voltages at its inputs.If voltage on BLIN 55 is higher then voltage on VROUT 55 the outputCOMPOUT 58 is low, otherwise is high. At this time a positive goingstrobe pulse is applied to the ENLATCOMP 29 common to all the latches 59in YDRVS 110S, SYDRVS 114S and RYDRVS 112S, to latch the status on lineCOMPOUT 58. If COMPOUT 58 is low, then the COMLATQ 40 remains at logiclow. If COMPOUT 58 is high, then the COMLATQ 40 switches to logic high.At this time, if ALGOCNTRL 164 latches a logic low in the status latchin INPUT LOGIC 160 block by looking at the status of the COMPOR line 32,then a program fail condition is reached and the ALGOCNTRL 164 goes outof the page programming cycle.

[0229] During page read cycle, after page read command and the pageaddress is issued, the reference and the data cells are placed in thevoltage read mode. At this time all the B3[0:3] lines output 1111. VR0through VR15 have VCELLR(0) through VCELLR(15). VCELLR(0) throughVCELLR(15) are the voltages read out of the reference cells of the pagebeing read. Under the control of the ALGOCNTRL 164 block 4 bits aresequentially read into the data latches (DATALAT3) 10, (DATALAT2) 11,(DATALAT1) 12, (DATALAT0) 13. For example, B3 is read by forcing theoutput of DATALAT3 to output B3=0. At this time B[0:3]=1110. TheREFERENCE MULTIPLEXER 26 then outputs VCELLR(7) on the VROUT 55 in eachof the YDRVS 110S, SYDRVS 114S and RYDRVS 112S. The output COMPOUT 58 ofthe VOLTAGE COMPARATOR 27 is high or low depending on whether voltageVCELLD(L) on the BLIN 35 is lower or higher relative to voltageVCELLR(7) on line VROUT 55. If COMPOUT 58 is high then a logic high islatched into DATALAT3 10 and B3=0, otherwise logic low is latched andB3=1. Next, B2 is read by forcing the output of DATALAT2 11 to outputB2=0. At this time B[0:3]=110B3. B3 is the output of DATALAT3 10 fromprevious sequence. The REFERENCE MULTIPLEXER 26 then outputs VCELLR(L),depending on 110B3 on the VROUT 55 line in each of the YDRVS 110S,SYDRVS 114S and RYDRVS 112S. The output COMPOUT 58 of the VOLTAGECOMPARATOR 27 is high or low depending on whether voltage VCELLD(L) onthe BLIN 35 is lower or higher relative to voltage VRCELL(L) on lineVROUT 55. If COMPOUT 58 is high then a logic high is latched intoDATALAT2 11 and B2=0, otherwise logic low is latched and B2=1. In thismanner, the next two sequences latch two bits into the DATALAT1 12 andDATALAT0 13.

[0230] After all 4 bit from the cell are latched into the DATALAT3 10,DATALAT2 11, DATALAT1 12, DATALAT0 13 for all the YDRVS 110S, SYDRVS114S and RYDRVS 112S, the restore margins are checked. All latches 59are reset. First the RESTORE LOW margin is checked. At this time, foreach level 0 through 15, MARGIN RESTORE LOW Voltage VRSTRL(0) throughVRSTRL(15) is placed at the VR0 through VR15 lines respectively.Depending on each outputs B3, B2, B1, BO of the data latches DATALAT310, DATALAT2 11, DATALAT1 12, DATALAT0 13 within each YDRVS 111S, SYDRVS114S and RYDRVS 112S, the REFERENCE MULTIPLEXER 26 outputs one ofVRSTRL(0) through VRSTRL(15) on line VROUT 55 going into the positiveinput of the VOLTAGE COMPARATOR 27. ENLATCOMP 29 is strobed with thepositive pulse to latch the status of the COMPOUT 58 line. If data cellread out voltage VCELLD(L) on BLIN 35 line is higher than voltageVRSTRL(L) on VROUT 55 line then COMLATQ 40 remains at logic low andCOMLATQB 41 at logic high. Otherwise, COMLAT 40 is at logic high andCOMLATQB 41 at logic low. At this time, if ALGOCNTRL 164 latches a logiclow in the RESTORE LOW latch in INPUT LOGIC 160 block by looking at thestatus of the COMPORB line 33, then a restore low flag condition isreached. Next, all latches 59 are reset.

[0231] Next the RESTORE HIGH margin is checked. At this time, for eachlevel 0 through 15, MARGIN RESTORE HIGH Voltage VRSTRH(0) throughVRSTRH(15) is placed at the VR0 through VR15 lines respectively.Depending on each outputs B3, B2, B1, BO of the data latches DATALAT310, DATALAT2 11, DATALAT1 12, DATALATO 13 within each YDRVS 110S, SYDRVS114S and RYDRVS 112S, the REFERENCE MULTIPLEXER 26 outputs one ofVRSTRH(0) through VRSTRH(15) on line VROUT 55 going into the positiveinput of the VOLTAGE COMPARATOR 27. ENLATCOMP 29 is strobed with thepositive pulse to latch the status of the COMPOUT 58 line. If data cellread out voltage VCELLD(L) on BLIN 35 line is higher than voltageVRSTRH(L) on VROUT 55 line then COMLATQ 40 remains at logic low andCOMLATQB 41 at logic high. Otherwise, COMLAT 40 is at logic high andCOMLATQB 41 at logic low. At this time, if ALGOCNTRL 164 latches a logiclow in the RESTORE HIGH latch in INPUT LOGIC 160 block by looking at thestatus of the COMPOR line 32, then a restore high flag condition isreached.

[0232] At this time, 4 bits from every cell with the page being read arelatched into the respective data latches within each YDRVS 110S, SYDRVS114S and RYDRVS 112S. Next under the control of the READ CLOCK data issequentially read on IO[0:7]. If after READ CLOCK the RED_ADD_TRUE=Ycondition is true then the data is read from the addressed RYDRVS 112Sotherwise data is read from the addressed YDRVS 110S or SYDRVS 114S.

[0233]FIG. 19B shows various voltages generated and used in anotherembodiment of the current invention for program verifying, programmargin verifying, read sensing and restore high or low margin verifying.In this embodiment the program margin verify voltage VREFR(L)−VRM(L) andVREFD(L)−DM(L) for a level L of a reference cell and a data cellrespectively, are generated by the block V&IREF 172 independent of thevoltages VCELLR(L) and VCELLD(L) programmed into the reference cell anddata cell respectively. The voltage VRM(L) for a level L of thereference cells can be unique for each level or the same for all levels.The voltage VDM(L) for a level L of the data cells can be unique foreach level or the same for all levels.

[0234]FIG. 22B shows the portion of the flow for the page programmingcycle that uses the voltages as shown in FIG. 19B. In the flow shown inFIG. 22B, only one program margin verify comparison is made instead oftwo as shown in FIG. 22A. This has the advantage of reducing the totaltime for completion of a page programming cycle.

[0235]FIG. 22C shows an alternative embodiment of the flow shown in FIG.22B. At the end of the programming, a BSERV operation is done to verifythat the read operation is operational versus the data in. The BSERVoperation is a binary search read verification operation that issubstantially the same as described in FIGS. 23 and 24 with theadditional step of comparing resulting digital bits BR<3:0> from thebinary search with a stored digital bits B<3:0> from loading data in. Ifthe comparison is not true, the program flag is set to indicate programfailure. The operation further ensures that all cells are within anoperational range, for example not out of range due to programmingovershoot to the next levels.

[0236] The embodiment shown in FIGS. 19B and 22B can be used incombination with the embodiment shown in FIGS. 19A and 22A. As discussedin the multilevel reference system section above, the embodiment shownin FIGS. 19B and 22B can be used when a selected page programs for thefirst time after block erase. For subsequent page programming cycles onthe same page, the embodiment shown in FIGS. 19A and 22A is advantageoussince the VCELLR(L) values may shift between initial page programmingand subsequent page programming.

[0237]FIG. 28 is a block diagram illustrating a memory system 2800 for amultilevel memory.

[0238] The memory cell 2800 comprises a plurality of memory arrays 2801arranged in rows and columns of memory arrays 2801. Each memory array2801 comprises a plurality of memory subarrays 2802, a plurality oflocal sense amplifiers 2804, and a plurality of global sense amplifiers2806. In one embodiment, a local sense amplifier 2804 is disposedadjacent to a memory subarray 2802. In another embodiment, the localsense amplifier 2804 is shared between a plurality of memory subarrays2802. The local sense amplifier 2804 reads the contents of the memorycells with the corresponding memory subarray 2802. The memory subarrays2802 are arranged in rows and columns. The local sense amplifiers 2804coupled to a column of memory subarrays 2802 are coupled to a globalsense amplifier 2806. The memory cells may include redundant cells,reference cells or spare cells.

[0239]FIG. 29A is a block diagram illustrating an inverter mode sensingcircuit 2900.

[0240] The inverter mode sensing circuit 2900 comprises a PMOStransistor 2902, a plurality of NMOS transistors 2904 and 2906, afeedback circuit 2908, a plurality of memory cells 2910, and acomparator 2912. For clarity, only one memory cell 2910 and one NMOStransistor 2906 are shown for a subarray, but the subarray comprises aplurality of memory cells 2910 arranged in columns. Each column has acorresponding NMOS transistor 2906 or a plurality of NMOS transistors2906 arranged in series. Only one column with one memory cell 2910 isshown.

[0241] The comparator 2912 determines the voltage of the memory cell bycomparing the cell voltage (VCELL) 2914 to a reference voltage (VREF)2916 in a manner described above. The PMOS transistor 2902, the NMOStransistors 2904 and 2906 and the memory cells 2910 are coupled inseries between the supply voltage and ground. The selected memory cell2910 is read by applying a control gate reference voltage (VCGRD) 2917on the control gate of the memory cell 2910. The column of memory cells2910 and an associated bit line has a capacitance 2918 that slows thesensing of the memory cells 2910. The NMOS transistor 2906 functions asa switch to couple the column of memory cells 2910 to the sensingportion of the circuit. The feedback circuit 2908 controls biasing ofthe NMOS transistor 2904 to stabilize the cell voltage 2914. The drainof the diode connected PMOS transistor 2902 is coupled to the cellvoltage 2914. Inverter mode sensing may also be referred to as currentmode sensing or common source sensing.

[0242]FIG. 29B is a block diagram illustrating a voltage mode sensingcircuit 2950.

[0243] The voltage sensing circuit 2950 is similar to the inverter modesensing circuit 2900 except that a current source 2952 replaces the PMOStransistor 2902 and is coupled to ground, the memory cell 2910 iscoupled to a reference bias, and the NMOS transistor 2904 and thefeedback circuit 2908 are omitted. The voltage mode sensing may also bereferred to as source follower sensing.

[0244]FIG. 30 is a block diagram illustrating a wide range, high speedvoltage mode sensing circuit 3000.

[0245] The memory array 2800 includes a plurality of voltage modesensing circuits 3000. The voltage mode sensing circuit 3000 comprises aPMOS transistor 3002, a plurality of NMOS transistors 3004, 3006, 3007,a feedback circuit 3008, a plurality of memory cells 3010, a currentsource (IRCELL) 3011, and a comparator 3012. For clarity, only onememory cell 3010, one NMOS transistor 3006, and one NMOS transistor 3007are shown for a subarray, but the subarray comprises a plurality ofmemory cells 3010 arranged in columns. Each column has a correspondingNMOS transistor 3006. Only one column with one memory cell 3010 isshown. Possible decoding circuitry between the current source 3011 andthe memory cell 3010 and between the current source 3011 and the NMOStransistor 3007 is not shown.

[0246] The comparator 3012 determines the voltage of the memory cell bycomparing a cell voltage (VCELL) 3014 to a reference voltage (VREF) 3016in a manner described above. The PMOS transistor 3002, the NMOStransistors 3004, 3006 and 3007 are coupled in series between the supplyvoltage and ground. The current source 3011 is coupled between the gateof the NMOS transistor 3002 and ground. The memory cell 3010 is coupledbetween a reference voltage (VCLRD) and the common node formed of thecurrent source 3011 and the gate of the NMOS transistor 3007.

[0247] The selected memory cell 3010 is read by applying a control gatereference voltage (VCGRD) 3017 on the control gate of the memory cell3010. The biasing of the gate of the NMOS transistor 3007 by the currentsource 3011 and the memory cell 3010 controls the voltage on the bitline.

[0248] The NMOS transistor 3006 functions as a switch to couple thecolumn of NMOS transistors 3007 and the associated memory cells 3010 tothe sensing portion of the circuit. The feedback circuit 3008 controlsbiasing of the NMOS transistor 3004 to stabilize the cell voltage 3014.The drain of the diode connected PMOS transistor 3002 is coupled to thecell voltage 3014.

[0249]FIG. 31 is a block diagram illustrating a voltage mode sensingcircuit 3100.

[0250] The voltage mode sensing circuit 3100 comprises a plurality ofmemory subarrays 3150, a plurality of local sense amplifiers 3152, and aplurality of global sense amplifiers 3154. The local sense amplifier3152 includes a local source follower stage. The global sense amplifier3154 includes a common source stage.

[0251] The memory array 3150 includes columns of memory cells 3110coupled to first bitlines 3151.

[0252] Each local sense amplifier 3152 is coupled to a memory subarray3150. In one embodiment, the local sense amplifier 3152 is disposedadjacent the memory subarray 3150. The local sense amplifier 3152includes a selection circuit 3153 that couples a selected bitline 3151to a bitline 3155. In one embodiment, the selection circuit 3153comprises transistors. The local sense amplifier 3152 senses theselected memory cell on the bitline 3151 and provides a voltage to aglobal sense amplifier 3154.

[0253] The local sense amplifier 3152 comprises an NMOS transistor 3107coupled between the bitline 3155 and ground, and includes a gate coupledto the bitline 3151. A current source 3111 is coupled between the gateof the NMOS transistor 3107 and ground.

[0254] The global sense amplifier 3154 comprises a comparator 3112, aPMOS transistor 3102 and a selection circuit 3158. The selection circuit3158 couples the selected one of the bitlines 3155 to a common nodeformed of a voltage cell input 3114 of the comparator 3112 and the drainof the diode connected PMOS transistor 3102. A reference voltage 3116 isapplied to the second input of the comparator 3112.

[0255] The local sense amplifier 3152 provides a larger voltage range byusing optimally low current bias. The global sense amplifier 3154includes a common source stage with a PMOS transistor 3114 as a load,and buffers the column capacitance.

[0256] The voltage mode sensing circuit 3100 further comprises aplurality of reference subarrays 3170, a plurality of local senseamplifiers 3172, and a plurality of global sense amplifiers 3174. Thereference subarrays 3170 comprise a plurality of reference cells forstoring reference signals. In one embodiment, the reference subarrays3170 are similar to the memory subarrays 3150. The local senseamplifiers 3172 read the reference subarrays 3170. In one embodiment,the local sense amplifiers 3172 are similar to the local senseamplifiers 3152. The global sense amplifiers 3174 detect and amplify thevoltage from the local sense amplifiers 3172.

[0257] The global sense amplifier 3174 comprises a comparator 3173, aPMOS transistor 3174 and a selection circuit 3178, which are arranged insimilar manner as the comparator 3112, the PMOS transistor 3102 and theselection circuit 3158 of the global sense amplifier 3154, except thecomparator 3173 is configured as a buffer. The comparator 3173 serves asa comparator in sensing the reference cells and serves as a buffer fordriving the reference level.

[0258]FIG. 32 is a block diagram illustrating a voltage mode sensingcircuit 3200.

[0259] The voltage mode sensing circuit 3200 includes like elements asthe voltage mode sensing circuit 3100 (FIG. 31) and are given likereference numbers. The voltage mode sensing circuit 3200 comprises amemory array 3150, a plurality of local sense amplifiers 3252 and aplurality of global sense amplifiers 3254. The local sense amplifier3252 includes a local source follower stage and includes a PMOS sourcefollower as part of the global sense amplifier. The global senseamplifier 3254 includes a source follower stage.

[0260] Each local sense amplifier 3252 is coupled to a memory subarray3150. In one embodiment, the local sense amplifier 3252 is disposedadjacent the memory subarray 3150. The local sense amplifier 3252includes a selection circuit 3253 that couples a selected bitline 3151to a bitline 3255. In one embodiment, the selection circuit 3253comprises transistors. The local sense amplifier 3252 senses theselected memory cell on the bitline 3151 and provides a voltage to aglobal sense amplifier 3254.

[0261] The local sense amplifier 3252 comprises a PMOS transistor 3207coupled between the bitline 3255 and ground, and includes a gate coupledto the bitline 3151. A current source 3211 is coupled between the gateof the PMOS transistor 3207 and ground. The local sense amplifier 3252provides a maximum voltage range by using low current bias.

[0262] The global sense amplifier 3254 comprises a comparator 3212, acurrent source 3202 and a selection circuit 3258. The current source3202 couples the supply voltage to the cell voltage terminal 3214 of thecomparator 3212 to ground. The selection circuit 3258 couples theselected one of the bitlines 3255 to a common node formed of a voltagecell input 3214 of the comparator 3212 and the current source 3202. Areference voltage 3216 is applied to the second input of the comparator3212.

[0263] The global sense amplifier 3254 buffers the column capacitance.

[0264] The voltage mode sensing circuit 3200 further comprises aplurality of reference subarrays 3170, a plurality of local senseamplifiers 3282, and a plurality of global sense amplifiers 3274. Thereference subarrays 3170 comprise a plurality of reference cells forstoring reference signals. In one embodiment, the reference subarrays3170 are similar to the memory subarrays 3150. The local senseamplifiers 3282 read the reference subarrays 3170. In one embodiment,the local sense amplifiers 3282 are similar to the local senseamplifiers 3252. The global sense amplifiers 3274 detect and amplify thevoltage from the local sense amplifiers 3282.

[0265] The global sense amplifier 3274 comprises a comparator 3292, acurrent source 3272 and a selection circuit 3278, which are arranged insimilar manner as the comparator 3212, the current source 3202 and theselection circuit 3258 of the global sense amplifier 3254, except thecomparator 3292 is configured as a buffer. The comparator 3292 serves asa comparator in sensing the reference cells and serves as a buffer fordriving the reference level.

[0266]FIG. 33 is a block diagram illustrating voltage mode sensingcircuit 3300.

[0267] The voltage mode sensing circuit 3300 includes like elements asthe voltage mode sensing circuit 3200 (FIG. 32) and are given likereference numbers. The voltage mode sensing circuit 3300 comprises amemory array 3150, a plurality of local sense amplifiers 3352 and aplurality of global sense amplifiers 3354. The local sense amplifier3352 includes a local source follower stage and includes an NMOS sourcefollower as part of the global sense amplifier. The global senseamplifier 3354 includes a source follower stage.

[0268] Each local sense amplifier 3352 is coupled to a memory subarray3150. In one embodiment, the local sense amplifier 3352 is disposedadjacent the memory subarray 3150. The local sense amplifier 3352includes a selection circuit 3253 that couples a selected bitline 3151to a bitline 3355. In one embodiment, the selection circuit 3253comprises transistor. The local sense amplifier 3252 senses the selectedmemory cell on the bitline 3151 and provides a voltage to a global senseamplifier 3254.

[0269] The local sense amplifier 3352 comprises an NMOS transistor 3307coupled between the bitline 3355 and a supply voltage terminal, andincludes a gate coupled to the bitline 3151. A current source 3311 iscoupled between the gate of the NMOS transistor 3307 and ground. Thelocal sense amplifier 3252 provides a maximum voltage range by using lowcurrent bias.

[0270] The global sense amplifier 3354 comprises a comparator 3312, acurrent source 3302 and a selection circuit 3358. The current source3302 couples the voltage terminal 3314 of the comparator 3312 to aground terminal. The selection circuit 3358 couples the selected one ofthe bitlines 3355 to a common node formed of a voltage cell input 3314of the comparator 3312 and the current source 3302. A reference voltage3316 is applied to the second input of the comparator 3312. The globalsense amplifier 3354 is selectively coupled to the bitline to comparethe cell voltage to a reference voltage 3316. The global sense amplifier3354 buffers the column capacitance.

[0271] The voltage mode sensing circuit 3300 further comprises aplurality of reference subarrays 3170, a plurality of local senseamplifiers 3382, and a plurality of global sense amplifiers 3374. Thereference subarrays 3170 comprise a plurality of reference cells forstoring reference signals. In one embodiment, the reference subarrays3170 are similar to the memory subarrays 3150. The local senseamplifiers 3382 read the reference subarrays 3170. In one embodiment,the local sense amplifiers 3382 are similar to the local senseamplifiers 3352. The global sense amplifiers 3374 detect and amplify thevoltage from the local sense amplifiers 3382.

[0272] The global sense amplifier 3374 comprises a comparator 3392, acurrent source 3372 and a selection circuit 3378, which are arranged insimilar manner as the comparator 3312, the current source 3302 and theselection circuit 3358 of the global sense amplifier 3354, except thecomparator 3392 is configured as a buffer. The comparator 3392 serves asa comparator in sensing the reference cells and serves as a buffer fordriving the reference level.

[0273] In another embodiment, the local sense amplifier is a commonsource amplifier, and the global sense amplifiers are NMOS sourcefollower stages or PMOS source follower stages.

[0274] In another embodiment, the local sense amplifier is a commonsource amplifier, and the global sense amplifiers are common sourceamplifiers.

[0275]FIG. 34 is a block diagram illustrating a global sense amplifier3400 having an auto zeroing function.

[0276] The comparators 3012, 3112, 3212, and 3312 of FIGS. 30-33 may bethe global sense amplifier 3400.

[0277] The sense amplifier 3400 comprises an operational amplifier 3402,a pair of capacitors 3404 and 3405, and a plurality of switches 3406 and3407.

[0278] The capacitors 3404 and 3405 couples respective inputs 3408 and3410 of the operational amplifier 3402 to the switch 3406.

[0279] In response to an auto zero (AZ) command 3416, the switches 3407selectively couples an output 3412 of the operational amplifier 3402 tothe input 3408 to equalize the voltages on the output 3412 and input3408, and selectively couples an output 3414 of the operationalamplifier 3402 to the input 3410 to equalize the output 3414 and theinput 3410. In the auto zero mode, the voltage on A terminals of thecapacitors 3404 and 3405 are set equal to the reference voltage (VREF)3418, and the B terminals of the capacitors 3404 and 3405 are equalizedto the complementary outputs of the operational amplifier 3402. Theswitch 3406 is switched by an evaluation (EVA) command 3422 to connectthe cell voltage (VCELL) 3420 to the other end of the capacitor 3405 forcomparison from the operational amplifier 3402.

[0280] The switch 3406 selectively applies the reference voltage (VREF)3418 to the capacitor 3404 in response to the evaluation (EVA) command3422. The switch 3406 also selectively applies either the referencevoltage (VREF) 3418 or a cell voltage (VCELL) 3420 to the capacitor 3405in response to the evaluation (EVA) command 3422. The evaluation command3422 equalizes the signals on terminals 3404A and 3505A of thecapacitors 3404 and 3405.

[0281] In an alternate embodiment, the nodes 3404B and 3405B of thecapacitors 3404 and 3405 are reset to a fixed bias voltage. In anotherembodiment, the nodes 3404B and 3405B of the capacitors 3404 and 3405are shorted together.

[0282] By using a capacitor for sensing, the input common load range tothe operational amplifier (or comparator) is substantially constant andindependent of the memory cell voltage or current.

[0283]FIG. 35 is a block diagram illustrating an auto zero senseamplifier 3500.

[0284] The autozero sense amplifier 3500 comprises a plurality of PMOStransistors 3502 and 3504, a plurality of NZ NMOS transistors 3506 and3507, a plurality of NMOS transistors 3508 through 3516, a plurality ofcapacitors 3518 and 3519 and a plurality of transfer gates 3522 through3528.

[0285] The PMOS transistors 3502 and 3504 and the NMOS transistors 3508,3509 and 3513 and the NZ NMOS transistor 3507 are arranged as adifferential pair. The NMOS transistors 3508 and 3509 provide thedifferential input pair. The NZ NMOS transistor 3507 and the NMOStransistor 3513 provide bias for the NMOS transistor 3508 and 3509. ThePMOS transistors 3502 and 3504 are coupled for cross-coupled loading.The PMOS transistor 3502 is coupled between the supply voltage and anoutput terminal 3530. A bias voltage 3529 is applied to the gates of theNZ NMOS transistors 3506 and 3507 and the NMOS transistors 3513 and3514.

[0286] The NMOS transistors 3510 and 3511 provide an NMOS coupledinternal latch, which is active while the differential input pair is on.The drain of the NMOS transistor 3510 is coupled to the drain of theNMOS transistor 3509 and the gate of the NMOS transistor 3511. The drainof the NMOS transistor 3511 is coupled to a common node formed of thedrain of the NMOS transistor 3508 and gate of the NMOS transistor 3510.The NZ NMOS transistor 3506 and the NMOS transistor 3514 provide biasfor the NMOS transistors 3510 and 3511 and are coupled between thecommon node formed of the sources of the NMOS transistors 3510 and 3511,and ground.

[0287] The transfer gate 3522 couples the drains of the PMOS transistors3502 and 3504 and the output 3530 to each other for equalization andquick recovery for the next comparison in response to a release signal3531 and an inverted release signal 3532.

[0288] The capacitor 3519 couples the gate of the NMOS transistor 3509to first terminals of the transfer gates 3525 and 3526 which include asecond terminal coupled to a reference voltage 3534. The capacitor 3518couples the gate of the NMOS transistor 3508 into first terminals of thetransfer gates 3527 and 3528, which have second terminals coupled to thereference voltage 3534 and a cell voltage 3535, respectively. Thetransfer gates 3525 and 3527 are controlled by a auto zero signal 3537and an inverted auto zero signal 3538. The transfer gates 3526 and 3528are controlled by evaluation signals 3539 and 3540.

[0289] The transfer gates 3523 and 3524 couple the drains of the PMOStransistors 3504 and 3502, respectively, to the gates of the NMOStransistors 3509 and 3508, respectively, in response to the auto zerosignal 3537 and inverted auto zero signal 3538. The NMOS transistors3512 and 3516 couple the gates of the NMOS transistors 3509 and 3508,respectively, to ground in response to a strobe signal 3542 to pull downthe transistors 3509 and 3508 to turn off the differential pair. TheNMOS transistor 3515 couples the sources of the NMOS transistors 3510and 3511 to the ground in response to the strobe signal 3542 for fulllevel latching.

[0290] The array architectures described herein may enable multilevelparallel operation.

[0291] A pipelined read operation may be as follows. A first row isselected in a selected subarray, such as subarray 2802 or subarray3150/3170, and the content of selected memory cells are coupled to thelocal bitline and to the global bitlines while a second row in anothersubarray 2802 or 3150/3170 is selected and the content of the selectedmemory cells are coupled to the local bitlines but not yet coupled tothe global bitlines. After the read operation completes processing thedata of the first row, the data of the second row is enabled to coupleto the global bitlines to continue the read operation, and a third rowin a different subarray 2802 or 3150/3170 is selected to enable thecontent of the selected memory cells to couple to the local biltines butnot yet to the global bitlines. This cycle continues until all desireddata are read out. This, for example, enables continuous read ofmultilevel memory cells.

[0292] In another embodiment, pipelined read operation is performed byoperating on memory cells in a row in an array, such as memory array2801, while another row in another memory array 2801 is selected toenable the contents of the memory cells to be ready.

[0293] A read-while-read operation may be as follows. A read operationoperates on both arrays, such as memory array 2801 (or memory subarrays2802 or 3150), simultaneously and the data are available from botharrays possibly at the same time. In this case, for example, datalatches are used to latch the data from both arrays. In anotherembodiment, two sets of data lines may be used to transfer the data fromboth arrays to an on-chip controller.

[0294] A read/write-while-write/read operation may be as follows.Similarly while one operation, e.g., read, is executed on an array, suchas subarray 2802 or array 2801 or subarrays 3150/3170, another operationis executed, e.g., write, on another array such as subarray 2802 or 2801or subarray 3150/3170. This is possible because control circuitsassociated with decoding and sensing and/or writing may be embedded foreach array. 102831 A read/erase-while-erase/read may be as follows.Similarly while one operation, e.g., read, is executed on an array, suchas subarray 2802 or 2801 or subarray 3150/3170, another operation isexecuted, e.g., erase, on another array such as subarray 2802 or 2801 orsubarray 3150/3170. This is possible because each array may have its owndecoders and embedded control circuits associated with sensing.

[0295] An erase-while-erase operation may be as follows. Similarly whileone erase operation is executed on an array, such as subarray 2802 or2801 or subarray 3150/3170, another erase operation is executed onanother array, such as subarray 2802 or 2801 or subarray 3150/3170. Thisis possible because each array may have its own decoders.

[0296] A write/erase-while-erase/write operation may be as follows.Similarly while one operation, e.g., write, is executed on an array,such as subarray 2802 or array 2801 or subarrays 3150/3170, anotheroperation is executed, e.g., erase, on another array such as subarray2802 or 2801 or subarray 3150/3170. This is possible because each arraymay have its own decoders and embedded control circuits associated withsensing and/or writing.

[0297] A write-while-write operation may be as follows. Similarly whileone write operation is executed on an array, such as subarray 2802 or2801 or subarray 3150/3170, another write operation is executed onanother array, such as subarray 2802 or 2801 or subarray 3150/3170. Thisis possible because each array may have its own decoders and embeddedcontrol circuits associated with sensing and/or writing.

[0298] In the foregoing description of various method and apparatus, itwas referring to various specific embodiments. However it should beobvious to the one conversant in the art, various alternatives,modifications, and changes may be possible without departing from thespirit and the scope of the invention which is defined by the metes andbounds of the appended claims.

What is claimed is:
 1. A data storage system comprising: a plurality ofmemory subarrays, each subarray comprising a plurality of memory cellsand a plurality of subarray bitlines, each memory cell beingconfigurable to store one of a plurality of signal levels and beingcoupled to one of said subarray bitlines; a plurality of local senseamplifiers, each of said plurality of local sense amplifiers beingcoupled to a corresponding one of said plurality of memory subarrays andbeing selectively coupled to said subarray bitlines and said memorysubarray; a plurality of global bitlines, each local sense amplifierbeing coupled to one of said plurality of global bitlines; and aplurality of global sense amplifiers, each global sense amplifier beingcoupled to a group of said global bitlines.
 2. The data storage systemof claim 1 wherein the plurality of memory cells are multilevel cells.3. The data storage system of claim 1, wherein said global senseamplifier comprises a common source stage and the local sense amplifiercomprises a source follower stage.
 4. The data storage system of claim1, wherein said local sense amplifier comprises: an NMOS transistorincluding a first terminal coupled to a corresponding global bitline,including a second terminal spaced apart from said first terminal with achannel therebetween and coupled to a ground terminal, and including agate for controlling current in said channel and coupled to a node thatis selectively coupled to one of said group of subarray bitlines, acurrent source coupled between said gate of said NMOS transistor andsaid ground terminal; and wherein said global sense amplifier comprises:a PMOS transistor including a first terminal coupled to a powerterminal, including a second terminal spaced apart from said firstterminal with a channel therebetween and selectively coupled to one ofsaid group of global bitlines, and including a gate for controllingcurrent in said channel and coupled to said second terminal, and acomparator having a first terminal coupled to the second terminal of thePMOS transistor, having a second terminal coupled to a reference voltageterminal, and having an output.
 5. The data storage system of claim 1,wherein said global sense amplifier comprises a source follower stage,and the local sense amplifier comprises a source follower stage andincludes a PMOS transistor.
 6. The data storage system of claim 5wherein said PMOS transistor operates as part of the source followerstage of the global sense amplifier.
 7. The data storage system of claim1, wherein said local sense amplifier comprises: a PMOS transistorincluding a first terminal coupled to a corresponding global bitline,including a second terminal spaced apart from said first terminal with achannel therebetween and coupled to a ground terminal, and including agate for controlling current in said channel and coupled to a node thatis selectively coupled to one of said group of subarray bitlines, acurrent source coupled between said gate of said NMOS transistor andsaid ground terminal; and wherein said global sense amplifier comprises:a current source including a first terminal coupled to a power terminaland including a second terminal coupled to the global bit line, and acomparator having a first terminal coupled to the second terminal of thecurrent source, having a second terminal coupled to a reference voltageterminal, and having an output.
 8. The data storage system of claim 1,wherein said global sense amplifier comprises a source follower stage,and the local sense amplifier comprises a source follower stage andincludes an NMOS transistor.
 9. The data storage system of claim 8wherein said NMOS transistor operates as part of the source followerstage of the global sense amplifier.
 10. The data storage system ofclaim 1, wherein said local sense amplifier comprises: an NMOStransistor including a first terminal coupled to a corresponding globalbitline, including a second terminal spaced apart from said firstterminal with a channel therebetween and coupled to a power terminal,and including a gate for controlling current in said channel and coupledto a node that is selectively coupled to one of said group of subarraybitlines, a current source coupled between said gate of said NMOStransistor and said ground terminal; and wherein said global senseamplifier comprises: a current source including a first terminal coupledto a ground terminal and including a second terminal selectively coupledto one of said group of global bitlines and a comparator having a firstterminal coupled to the second terminal of said current source, having asecond terminal coupled to a reference voltage terminal, and having anoutput.
 11. The storage system of claim 1, wherein said global senseamplifier comprises a common source stage, and the local sense amplifiercomprises a common source stage.
 12. The data storage system of claim 1,wherein said global sense amplifier comprises a source follower stage,and the local sense amplifier comprises a common source stage.
 13. Thedata storage system of claim 1, wherein said global sense amplifiercomprises: a comparator having first and second inputs, and having firstand second outputs; a first capacitor having a first terminal coupled tothe first input of the comparator and having a second terminalselectively coupled to a reference voltage terminal; and a secondcapacitor having a first terminal coupled to the second input terminalof the comparator and having a second terminal selectively coupled tothe reference voltage terminal and a cell voltage terminal.
 14. The datastorage system of claim 13 further comprising a first switch toselectively couple the first input terminal of the comparator to thefirst output terminal of the comparator and further comprising a secondswitch for connecting the second input terminal of the comparator to thesecond output terminal of the comparator.
 15. The data storage system ofclaim 14 wherein the second terminals of the first and second capacitorsare coupled to the reference voltage terminal and the first and secondinputs of the comparator are coupled to the first and second outputs,respectively, of the comparator.
 16. The data storage system of claim 14wherein the first terminals of the first and second capacitors arecoupled to a bias voltage.
 17. The data storage system of claim 13wherein the first terminals of the first and second capacitors arecoupled to each other.
 18. The data storage system of claim 1, whereinsaid sense amplifier comprises a comparator including: a firsttransistor of a first type including a first terminal coupled to a powerterminal, including a second terminal spaced apart from said firstterminal with a channel therebetween and coupled to an output terminal,and including a gate for controlling current in said channel andcoupled; a second transistor of the first type including a firstterminal coupled to the power terminal, including a second terminalspaced apart from said first terminal with a channel therebetween andcoupled to the gate of the first transistor of the first type, andincluding a gate for controlling current in said channel and coupled tothe second terminal of the first transistor of the first type; a firsttransistor of a second type including a first terminal coupled to thesecond terminal of the first transistor of the first type, including asecond terminal spaced apart from said first terminal with a channeltherebetween, and including a gate for controlling current in saidchannel; a second transistor of the second type including a firstterminal coupled to the second terminal of the second transistor of thefirst type, including a second terminal spaced apart from said firstterminal with a channel therebetween and coupled to the second terminalof the first transistor of the first type, and including a gate forcontrolling current in said channel; a third transistor of the secondtype including a first terminal coupled to the common node formed of thesecond terminals of the first and second transistors of the second type,including a second terminal spaced apart from said first terminal with achannel therebetween and coupled to a ground terminal, and including agate for controlling current in said channel; a first capacitorincluding a first terminal coupled to the gate of the first transistorof the second type and including a second terminal coupled toselectively coupled to a reference voltage or to a global bitline; asecond capacitor including a first terminal coupled to the gate of thesecond transistor of the second type and including a second terminalcoupled to selectively coupled to the reference voltage; a fourthtransistor of the second type including a first terminal coupled to thesecond terminal of the first transistor of the first type, including asecond terminal spaced apart from said first terminal with a channeltherebetween, and including a gate for controlling current in saidchannel and coupled to the first terminal of the second transistor ofthe second type; a fifth transistor of the second type including a firstterminal coupled to gate of the fourth transistor of the second type,including a second terminal spaced apart from said first terminal with achannel therebetween and coupled to the second terminal of the fourthtransistor of the second type, and including a gate for controllingcurrent in said channel and coupled to a first terminal of the fourthtransistor of the second type; and a sixth transistor of the second typeincluding a first terminal coupled to the second terminal of the fourthtransistor of the second type, including a second terminal spaced apartfrom said first terminal with a channel therebetween and coupled to theground terminal, and including a gate for controlling current in saidchannel.
 19. The data storage system of claim 18, wherein the comparatorfurther includes: an equalization circuit coupling the second terminalsof the first and second transistors of the first type to equalize thevoltages thereof.
 20. The data storage system of claim 19 furthercomprising a first autozero circuit to equalize the second terminals ofthe first and second capacitors.
 21. The data storage system of claim 19further comprising a second auto zero circuit to equalize the firstterminals of the first and second capacitors to the second terminals ofthe respective first and second transistors of the first type.
 22. Anintegrated circuit data storage system comprising: a plurality of memorycells, each memory cell being configurable to store one of a pluralityof signal levels; a plurality of local bitlines, each memory cell beingcoupled to one of said subarray bitlines; a plurality of globalbitlines; a plurality of local sense amplifiers, each of said pluralityof local sense amplifiers being coupled to a corresponding group of onesof said plurality of memory cells and being selectively coupled to saidlocal bitlines, each local sense amplifier being coupled to one of saidplurality of global bitlines; a plurality of global sense amplifiers,each global sense amplifier being coupled to a group of said globalbitlines; a decoding circuit coupled to the plurality of memory cellsand configured to generate a first and a second control signal based ona set of input data bits; and a supply source operatively coupled toselected ones of the plurality of memory cells based on the firstcontrol signal from the decoding circuit, the supply source configuredto provide programming signals based on the second control signal, andwherein the selected memory cells are programmed in accordance with theprogramming signals from the supply source.
 23. The device of claim 22,wherein the plurality of memory cells are arranged into a plurality ofmemory arrays, each memory array including P rows by Q columns of memorycells, and said local bit lines are coupled to subsets of the Q columnsof memory cells.
 24. The device of claim 23, wherein each memory arrayis partitioned into a plurality of memory segments, each memory segmentincluding R rows by S columns of memory cells, wherein each memorysegment is further partitioned into a plurality of memory blocks, eachmemory block including X rows by Y columns of memory cells, each of saidlocal sense amplifiers being coupled to a corresponding one of saidmemory blocks.
 25. The device of claim 22, wherein the local bit linescouple to the global bit lines via a first set of transistors.
 26. Thedevice of claim 25, wherein the transistors in the first set are enabledby associated bit line select lines.
 27. The memory system of claim 22,wherein the memory unit further includes at least one redundant array ofmemory cells, each redundant array configurable to substitute for asubset of the plurality of memory cells in the memory unit, a localsense amplifier being coupled to said redundant array.
 28. An integratedcircuit memory device having a semiconductor substrate, said memorydevice comprising: a plurality of memory cells at a surface of saidsemiconductor substrate; a decoding circuit configured to generate a setof control signals based on an address; a plurality of bit lines, eachbit line interconnecting a subset of the plurality of memory cellsformed in a memory array, each bit formed as a main metal bit line and aplurality of segmented metal bit lines, the main metal bit linetraversing a length of the memory array, the segmented metal bit lineseach traversing a portion of the length of the memory array, selectivelyconnected to the main bit line responsive to the control signals fromthe decoding circuit and connected to semiconductor substrate regions ofthe memory cells alone the portion of the length of the memory array,the segmented metal bit lines passing over the semiconductor substrateand the main bit line passing over the segmented metal bit lines so thatcapacitance of each bit line is reduced; a plurality of local senseamplifiers, each of said plurality of local sense amplifiers beingcoupled to a corresponding one of subsets of memory cells and beingselectively coupled to said segmented bit lines and the bit lines; and aplurality of global sense amplifiers, each global sense amplifier beingcoupled to a group of said bit lines.
 29. The device of claim 28,wherein the plurality of memory cells are arranged into a plurality ofmemory arrays, each memory array including P rows by Q columns of memorycells.
 30. The device of claim 29, wherein each memory array ispartitioned into a plurality of memory segments, each memory segmentincluding R rows by S columns of memory cells, wherein each memorysegment is further partitioned into a plurality of memory blocks, eachmemory block including X rows by Y columns of memory cells.
 31. Thedevice of claim 30, wherein each segmented bit line couples to memorycells in a column of a memory block.
 32. The device of claim 30, whereineach main bit line couples to segmented bit lines associated with acolumn of a memory segment.
 33. The device of claim 28, wherein thesegmented bit lines couple to the main bit lines via a first set oftransistors.
 34. A data storage system comprising: a plurality of memoryarrays, each memory array including a plurality of memory cells, aplurality of bit lines, a plurality of control gate lines, and at leastone common line, each memory cell is configurable to store one of 2^(N)values, where N is two or greater; at least one memory decoder coupledto the memory arrays, each memory decoder configured to provide biassignals to selected ones of the plurality of memory cells; a referencearray operatively coupled to the memory arrays and configurable toprovide reference signals used for programming and reading the selectedones of the plurality of memory cells; a plurality of local senseamplifiers, each of said plurality of local sense amplifiers beingcoupled to a corresponding subset of said plurality of memory cells andbeing selectively coupled to said bit lines; a plurality of global bitlines, each local sense amplifier being coupled to one of said pluralityof global bitlines; and a plurality of global sense amplifiers, eachglobal sense amplifier being coupled to a group of said global bitlinesand said reference array to generate an output signal indicative of thecomparison between a voltage detected in a selected memory cell and areference signal.
 35. A data storage system comprising: a plurality ofmemory arrays, each memory array comprising: a plurality of memorysubarrays, each memory subarray including a plurality of memory cells; aplurality of local sense amplifiers, each local sense amplifier beingcoupled to a corresponding one of the plurality of memory subarrays, thelocal sense amplifier reading the contents of memory cells within thecorresponding memory subarray, and a plurality of global senseamplifiers, each global sense amplifier being coupled to a group of saidplurality of local sense amplifiers.
 36. The data storage system ofclaim 35 wherein the plurality of memory arrays are arranged in rows andcolumns.
 37. The data storage system of claim 35 wherein the pluralityof memory subarrays are arranged in rows and columns.
 38. A data storagesystem comprising: a plurality of memory arrays, each memory arraycomprising: a plurality of memory subarrays, each memory subarrayincluding a plurality of memory cells, a plurality of local senseamplifiers, each local sense amplifier being disposed adjacent to andcoupled to a group of said memory subarrays, the local sense amplifierreading the contents of the memory cells within the corresponding groupof memory subarrays, and a plurality of global sense amplifiers, eachglobal sense amplifier being coupled to a group of said local senseamplifiers.
 39. The data storage system of claim 38 wherein theplurality of memory arrays are arranged in rows and columns.
 40. Thedata storage system of claim 38 wherein the plurality of memorysubarrays are arranged in rows and columns.
 41. A data storage systemcomprising: a reference array including a plurality of reference cells,a plurality of bit lines, a plurality of control gate lines, and atleast one common line, each reference cell is configurable to store oneof 2^(N) values, where N is at least two or greater; a plurality oflocal sense amplifiers, each of said plurality of local sense amplifiersbeing coupled to a corresponding subset of said plurality of referencecells and being selectively coupled to said bitlines; a plurality ofglobal bitlines, each local sense amplifier being coupled to one of saidplurality of global bitlines; and a plurality of global senseamplifiers, each global sense amplifier being coupled to a group of saidglobal bitlines to generate an output signal indicative of a referencesignal corresponding to the selected reference cell.
 42. A data storagesystem comprising: a plurality of memory subarrays, each memory subarraycomprising a plurality of memory cells, each memory cell beingconfigurable to store one of a plurality of signal levels; and aplurality of sense amplifiers, each sense amplifier being selectivelycoupled to a corresponding subarray to capacitively sense content of amemory cell.
 43. A data storage system comprising: a plurality of memorysubarrays, each subarray comprising a plurality of memory cells, eachmemory cell being configurable to store one of a plurality of signallevels; a plurality of local sense amplifiers, each of said plurality oflocal sense amplifiers being selectively coupled to a corresponding oneof said plurality of memory subarrays; and a plurality of global senseamplifiers, each global sense amplifier being selectively coupled to agroup of said local sense amplifiers to capacitively sense a voltage onsaid group of local sense amplifiers.
 44. The data storage system ofclaim 43, wherein said global sense amplifier comprises: a comparatorhaving first and second inputs, and having first and second outputs; afirst capacitor having a first terminal coupled to the first input ofthe comparator and having a second terminal selectively coupled to areference voltage terminal; and a second capacitor having a firstterminal coupled to the second input terminal of the comparator andhaving a second terminal selectively coupled to the reference voltageterminal and a cell voltage terminal.
 45. A data storage systemcomprising: a plurality of memory subarrays, each memory subarraycomprising a plurality of memory cells, each memory cell beingconfigurable to store one of a plurality of signal levels; and aplurality of sense amplifiers, each sense amplifier being selectivelycoupled to a memory subarray to sense with autozero content of a memorycell.
 46. A data storage system comprising: a plurality of memorysubarrays, each subarray comprising a plurality of memory cells, eachmemory cell being configurable to store one of a plurality of signallevels; a plurality of local sense amplifiers, each of said plurality oflocal sense amplifiers being selectively coupled to a corresponding oneof said plurality of memory subarrays; and a plurality of global senseamplifiers, each global sense amplifier having a first input coupled toa group of said local sense amplifiers, having a second input coupled toa reference voltage terminal, having first and second outputs forproviding first and second output signals in response to signals appliedto said first and second inputs, and including a circuit for couplingsaid first input to said first output and coupling said second input tosaid second output in response to an autozero signal.
 47. The datastorage system of claim 46 wherein said circuit comprises: a firstswitch to selectively couple the first input of the sense amplifier tothe first output of the global sense amplifier; and a second switch forconnecting the second input of the global sense amplifier to the secondoutput of the global sense amplifier.
 48. A data storage systemcomprising: a plurality of memory subarrays, each memory subarraycomprising a plurality of memory cells, each memory cell beingconfigurable to store one of a plurality of signal levels; and aplurality of sense amplifiers, each sense amplifier being selectivelycoupled to a memory subarray to sense with substantially constant inputcommon mode range content of a memory cell.
 49. A data storage systemcomprising: a plurality of memory subarrays, each subarray comprising aplurality of memory cells, each memory cell being configurable to storeone of a plurality of signal levels; a plurality of local senseamplifiers, each of said plurality of local sense amplifiers beingselectively coupled to a corresponding one of said plurality of memorysubarrays; and a plurality of global sense amplifiers, each global senseamplifier being coupled to a group of said local sense amplifiers toprovide an input range to the global sense amplifier substantiallyindependent of a state of a selected memory cell.
 50. A data storagesystem comprising: a plurality of memory arrays, each memory arrayincluding a plurality of memory cells, a plurality of bit lines, aplurality of control gate lines, and at least one common line, eachmemory cell is configurable to store one of 2^(N) values, where N is twoor greater; at least one memory decoder coupled to the memory arrays,each memory decoder configured to provide bias signals to selected onesof the plurality of memory cells; a reference array operatively coupledto the memory arrays and configurable to provide reference signals usedfor programming and reading the selected ones of the plurality of memorycells, the reference signals being stored in a real time relationship toreceiving programming signals corresponding to said reference signals; aplurality of local sense amplifiers, each of said plurality of localsense amplifiers being coupled to a corresponding subset of saidplurality of memory cells and being selectively coupled to said bitlines; a plurality of global bit lines, each local sense amplifier beingcoupled to one of said plurality of global bitlines; and a plurality ofglobal sense amplifiers, each global sense amplifier being coupled to agroup of said global bitlines and said reference array to generate anoutput signal indicative of the comparison between a voltage detected ina selected memory cell and a reference signal.
 51. The data storagesystem of claim 50 wherein the global sense amplifier capacitivelydetects a voltage on one of said global bitlines and capacitivelydetects one of said reference signals and generates an output signalindicative of the comparison between said detected voltage and aselected reference cell and said detected reference signal.
 52. The datastorage system of claim 50 wherein the global sense amplifier includes acircuit for coupling inputs of the global sense amplifier to the outputsignal in response to an autozero signal.
 53. A data storage systemcomprising: a plurality of reference memory subarrays, each referencememory subarray comprising a plurality of reference memory cells, eachmemory cell being configurable to store one of a plurality of referencesignal levels; and a plurality of reference sense amplifiers, eachreference sense amplifier being selectively coupled to a correspondingsubarray to capacitively sense content of a memory cell.
 54. A datastorage system comprising: a plurality of memory arrays, each memoryarray including a plurality of memory cells, a plurality of bit lines, aplurality of control gate lines, and at least one common line, eachmemory cell is configurable to store one of ₂N values, where N is two orgreater; at least one memory decoder coupled to the memory arrays, eachmemory decoder configured to provide bias signals to selected ones ofthe plurality of memory cells; a reference array operatively coupled tothe memory arrays and configurable to provide reference signals used forprogramming and reading the selected ones of the plurality of memorycells, the reference signals being stored in a real time relationship toreceiving programming signals corresponding to said reference signals; aplurality of local sense amplifiers, each of said plurality of localsense amplifiers being coupled to a corresponding subset of saidplurality of memory cells and being selectively coupled to said bitlines; a plurality of global bit lines, each local sense amplifier beingcoupled to one of said plurality of global bitlines; and a plurality ofglobal sense amplifiers, each global sense amplifier being coupled to agroup of said global bitlines to capacitively detect a voltage on one ofsaid global bitlines and to said reference array to capacitively detectone of said reference signals, and to generate an output signalindicative of the comparison between said detected voltage in a selectedmemory cell and said detected reference signal.
 55. A data storagesystem comprising: a plurality of reference memory subarrays, eachreference memory subarray comprising a plurality of reference memorycells, each reference memory cell being configurable to store one of aplurality of reference signal levels; and a plurality of reference senseamplifiers, each sense reference amplifier being selectively coupled toa reference memory subarray to sense with autozero content of areference memory cell.
 56. A data storage system comprising: a pluralityof memory arrays, each memory array including a plurality of memorycells, a plurality of bit lines, a plurality of control gate lines, andat least one common line, each memory cell is configurable to store oneof 2^(N) values, where N is two or greater; at least one memory decodercoupled to the memory arrays, each memory decoder configured to providebias signals to selected ones of the plurality of memory cells; areference array operatively coupled to the memory arrays andconfigurable to provide reference signals used for programming andreading the selected ones of the plurality of memory cells, thereference signals being stored in a real time relationship to receivingprogramming signals corresponding to said reference signals; a pluralityof local sense amplifiers, each of said plurality of local senseamplifiers being coupled to a corresponding subset of said plurality ofmemory cells and being selectively coupled to said bit lines; aplurality of global bit lines, each local sense amplifier being coupledto one of said plurality of global bitlines; and a plurality of globalsense amplifiers, each global sense amplifier being coupled to a groupof said global bitlines to capacitively detect a voltage on one of saidglobal bitlines and said reference array to capacitively detect one ofsaid reference signals to generate an output signal indicative of thecomparison between said detected voltage in a selected memory cell andsaid detected reference signal, and including a circuit to equalizeinputs and the output of the global sense amplifier in response to anautozero signal.
 57. A data storage system comprising: a plurality ofmemory arrays, each memory array including a plurality of memory cells,a plurality of bit lines, a plurality of control gate lines, and atleast one common line, each memory cell is configurable to store one of2^(N) values, where N is two or greater; at least one memory decodercoupled to the memory arrays, each memory decoder configured to providebias signals to selected ones of the plurality of memory cells; aplurality of local sense amplifiers, each of said plurality of localsense amplifiers being coupled to a corresponding subset of saidplurality of memory cells and being selectively coupled to said bitlines; a plurality of global bit lines, each local sense amplifier beingcoupled to one of said plurality of global bitlines; a plurality ofglobal sense amplifiers, each global sense amplifier being coupled to agroup of said global bitlines to generate an output signal indicative ofthe comparison between a voltage detected in a selected memory cell anda plurality of reference signals detected on a reference signalterminal; and a circuit to compare the output signal from one of saidglobal sense amplifiers corresponding to a selected memory cell and saiddetected reference signal to verify contents of said selected memorycell and programming said selected memory cell in the event thecomparison indicates content of said selected memory cell does not matchsaid one of said detected reference signals.
 58. The data storage systemof claim 57 further comprising a reference array operatively coupled tothe memory arrays and configurable to provide stored reference signalsused for programming and reading the selected ones of the plurality ofmemory cells, the stored reference signals corresponding to saiddetected plurality of reference signals.
 59. A data storage systemcomprising: a plurality of memory arrays, each memory array including aplurality of memory cells, a plurality of bit lines, a plurality ofcontrol gate lines, and at least one common line, each memory cell isconfigurable to store one of 2^(N) values, where N is two or greater; atleast one memory decoder coupled to the memory arrays, each memorydecoder configured to provide bias signals to selected ones of theplurality of memory cells; a plurality of local sense amplifiers, eachof said plurality of local sense amplifiers being coupled to acorresponding subset of said plurality of memory cells and beingselectively coupled to said bit lines; a plurality of global bit lines,each local sense amplifier being coupled to one of said plurality ofglobal bitlines; a plurality of global sense amplifiers, each globalsense amplifier being coupled to a group of said global bitlines tocapacitively detect a voltage on one of said global bitlines and tocapacitively detect one of a plurality of reference signals to generatean output signal indicative of the comparison between said detectedvoltage in a selected memory cell and said detected reference signal;and a circuit to compare the output signal from one of said global senseamplifiers corresponding to a selected memory cell and said detectedreference signal to verify contents of said selected memory cell andprogramming said selected memory cell in the event the comparisonindicates content of said selected memory cell does not match said oneof said detected reference signals.
 60. The data storage system of claim59 further comprising a reference array operatively coupled to thememory arrays and configurable to provide stored reference signals usedfor programming and reading the selected ones of the plurality of memorycells, the stored reference signals corresponding to said detectedplurality of reference signals.
 61. A data storage system comprising: aplurality of memory arrays, each memory array including a plurality ofmemory cells, a plurality of bit lines, a plurality of control gatelines, and at least one common line, each memory cell is configurable tostore one of 2^(N) values, where N is two or greater; at least onememory decoder coupled to the memory arrays, each memory decoderconfigured to provide bias signals to selected ones of the plurality ofmemory cells; a plurality of local sense amplifiers, each of saidplurality of local sense amplifiers being coupled to a correspondingsubset of said plurality of memory cells and being selectively coupledto said bit lines; a plurality of global bit lines, each local senseamplifier being coupled to one of said plurality of global bitlines; aplurality of global sense amplifiers, each global sense amplifier beingcoupled to a group of said global bitlines to generate an output signalindicative of the comparison between a voltage detected in a selectedmemory cell and one of a plurality of reference signals, and including acircuit to equalize inputs and the output of the global sense amplifierin response to an autozero signal; and a circuit to compare the outputsignal from one of said global sense amplifiers corresponding to aselected memory cell and said detected reference signals from saidreference array to verify contents of said selected memory cell andprogramming said selected memory cell in the event the comparisonindicates content of said selected memory cell does not match saiddetected reference signals.
 62. The data storage system of claim 61further comprising a reference array operatively coupled to the memoryarrays and configurable to provide stored reference signals used forprogramming and reading the selected ones of the plurality of memorycells, the stored reference signals corresponding to said detectedplurality of reference signals.
 63. A data storage system comprising: aplurality of memory arrays, each memory array including a plurality ofmemory cells, each memory cell is configurable to store one of 2^(N)values, where N is two or greater; at least one memory decoder coupledto the memory arrays, each memory decoder configured to provide biassignals to selected ones of the plurality of memory cells; a referencearray operatively coupled to the memory arrays and configurable toprovide reference signals used for programming and reading the selectedones of the plurality of memory cells; a plurality of local senseamplifiers, each of said plurality of local sense amplifiers beingcoupled to a corresponding subset of said plurality of memory cells; aplurality of global sense amplifiers, each global sense amplifier beingcoupled to a group of local sense amplifiers and said reference array togenerate an output signal indicative of the comparison between a voltagedetected in a selected memory cell and a reference signal; and a circuitto compare the output signal from one of said global sense amplifierscorresponding to a selected memory cell and one of said referencesignals from said reference array and determining whether said outputsignal is within a predetermined relationship of said one of saidreference signals during a programming, erase or reading of saidselected memory cell and setting a flag to indicate whether apredetermined relationship is determined.
 64. A data storage systemcomprising: a plurality of memory arrays, each memory array including aplurality of memory cells, a plurality of bit lines, a plurality ofcontrol gate lines, and at least one common line, each memory cell isconfigurable to store one of 2^(N) values, where N is two or greater; atleast one memory decoder coupled to the memory arrays, each memorydecoder configured to provide bias signals to selected ones of theplurality of memory cells; a reference array operatively coupled to thememory arrays and configurable to provide reference signals used forprogramming and reading the selected ones of the plurality of memorycells; a plurality of local sense amplifiers, each of said plurality oflocal sense amplifiers being coupled to a corresponding subset of saidplurality of memory cells and being selectively coupled to said bitlines; a plurality of global bit lines, each local sense amplifier beingcoupled to one of said plurality of global bitlines; a plurality ofglobal sense amplifiers, each global sense amplifier being coupled to agroup of said global bitlines and said reference array to generate anoutput signal indicative of the comparison between a voltage detected ina selected memory cell and a reference signal; and a circuit to comparethe output signal from one of said global sense amplifiers correspondingto a selected memory cell and one of said reference signals from saidreference array and determining whether said output signal is within apredetermined relationship of said one of said reference signals duringa programming, erase or reading of said selected memory cell and settinga flag to indicate whether a predetermined relationship is determined.65. The data storage system of claim 64 wherein said circuit reprogramssaid selected memory cell in the event the circuit determines saidoutput signals within a margin of said one of said reference signals.66. The data storage system of claim 65, wherein said circuit furthercompares the output signal from said one of said global sense amplifierscorresponding to said selected memory cell and another one of saidreference signals from said reference array in determining whether saidoutput signal is within another margin of said another one of saidreference signals.
 67. The data storage system of claim 66 wherein saidcircuit reprograms said selected memory cell in the event the circuitdetermines said output signals within a margin of said one of saidreference signals.
 68. A data storage system comprising: a plurality ofmemory subarrays, each subarray comprising a plurality of memory cells,each memory cell being configurable to store one of a plurality ofsignal levels; a sense amplifier capacitively sense a voltage of aselected memory cell; a circuit to compare an output signal from saidsense amplifiers corresponding to a selected memory cell and one of aplurality of reference signals and to determine whether said outputsignal is within a predetermined relationship of said one of saidreference signals during a programming, erase or reading of saidselected memory cell and setting a flag to indicate whether apredetermined relationship is determined.
 69. A data storage systemcomprising: a plurality of memory arrays, each memory array including aplurality of memory cells, a plurality of bit lines, a plurality ofcontrol gate lines, and at least one common line, each memory cell isconfigurable to store one of 2^(N) values, where N is two or greater; atleast one memory decoder coupled to the memory arrays, each memorydecoder configured to provide bias signals to selected ones of theplurality of memory cells; a reference array operatively coupled to thememory arrays and configurable to provide reference signals used forprogramming and reading the selected ones of the plurality of memorycells; a plurality of local sense amplifiers, each of said plurality oflocal sense amplifiers being coupled to a corresponding subset of saidplurality of memory cells and being selectively coupled to said bitlines; a plurality of global bit lines, each local sense amplifier beingcoupled to one of said plurality of global bitlines; a plurality ofglobal sense amplifiers, each global sense amplifier being coupled to agroup of said global bitlines to capacitively detect a voltage on one ofsaid global bitlines and said reference array to capacitively detect oneof said reference signals to generate an output signal indicative of thecomparison between said detected voltage in a selected memory cell and areference signal; and a circuit to compare the output signal from one ofsaid global sense amplifiers corresponding to a selected memory cell andone of said reference signals from said reference array and determiningwhether said output signal is within a predetermined relationship ofsaid one of said reference signals during a programming, erase orreading of said selected memory cell and setting a flag to indicatewhether a predetermined relationship is determined.
 70. A data storagesystem comprising: a plurality of memory subarrays, each subarraycomprising a plurality of memory cells, each memory cell beingconfigurable to store one of a plurality of signal levels; a senseamplifier to sense a voltage of a selected memory cell and auto zero aninput and an output of said sense amplifier before sensing said voltage;a circuit to compare an output signal from said sense amplifierscorresponding to a selected memory cell and one of a plurality ofreference signals and to determine whether said output signal is withina predetermined relationship of said one of said reference signalsduring a programming, erase or reading of said selected memory cell andsetting a flag to indicate whether a predetermined relationship isdetermined.
 71. A data storage system comprising: a plurality of memoryarrays, each memory array including a plurality of memory cells, aplurality of bit lines, a plurality of control gate lines, and at leastone common line, each memory cell is configurable to store one of 2^(N)values, where N is two or greater; at least one memory decoder coupledto the memory arrays, each memory decoder configured to provide biassignals to selected ones of the plurality of memory cells; a referencearray operatively coupled to the memory arrays and configurable toprovide reference signals used for programming and reading the selectedones of the plurality of memory cells; a plurality of local senseamplifiers, each of said plurality of local sense amplifiers beingcoupled to a corresponding subset of said plurality of memory cells andbeing selectively coupled to said bit lines; a plurality of global bitlines, each local sense amplifier being coupled to one of said pluralityof global bitlines; a plurality of global sense amplifiers, each globalsense amplifier being coupled to a group of said global bitlines andsaid reference array to generate an output signal indicative of thecomparison between a voltage detected in a selected memory cell and areference signal, and including a circuit to equalize inputs and theoutput of the global sense amplifier in response to an autozero signal;and a circuit to compare the output signal from one of said global senseamplifiers corresponding to a selected memory cell and one of saidreference signals from said reference array and determining whether saidoutput signal is within a predetermined relationship of said one of saidreference signals during a programming, erase or reading of saidselected memory cell and setting a flag to indicate whether apredetermined relationship is determined.
 72. The data storage system ofclaim 71 wherein said circuit reprograms said selected memory cell inthe event the circuit determines said output signals are within a marginof said one of said reference signals.
 73. The data storage system ofclaim 71, wherein said circuit further compares the output signal fromsaid one of said global sense amplifiers corresponding to said selectedmemory cell another one of said reference signals from said referencearray to determine whether said output signal is within another marginof said another one of said reference signals.
 74. The data storagesystem of claim 73 wherein said circuit reprograms said selected memorycell in the event the circuit determines said output signal is within amargin of said one of said reference signals.
 75. A data storage systemcomprising: a plurality of memory arrays, each memory array including aplurality of memory cells, a plurality of bit lines, a plurality ofcontrol gate lines, and at least one common line, each memory cell isconfigurable to store one of ₂N values, where N is two or greater; atleast one memory decoder coupled to the memory arrays, each memorydecoder configured to provide bias signals to selected ones of theplurality of memory cells; a reference array operatively coupled to thememory arrays and configurable to provide reference signals used forprogramming and reading the selected ones of the plurality of memorycells; a plurality of local sense amplifiers, each of said plurality oflocal sense amplifiers being coupled to a corresponding subset of saidplurality of memory cells and being selectively coupled to said bitlines; a plurality of global bit lines, each local sense amplifier beingcoupled to one of said plurality of global bitlines; a plurality ofglobal sense amplifiers, each global sense amplifier being coupled to agroup of said global bitlines and said reference array to generate anoutput signal indicative of the comparison between a voltage detected ina selected memory cell and a reference signal; and a circuit to comparethe output signal from one of said global sense amplifiers correspondingto a selected memory cell and one of said reference signals from saidreference array and determining whether said output signal is within apredetermined relationship of said one of said reference signals duringa programming, erase or reading of said selected memory cell and settinga flag to indicate whether a predetermined relationship is determined.76. A data storage system comprising: a plurality of memory arrays, eachmemory array including a plurality of memory cells, a plurality of bitlines, a plurality of control gate lines, and at least one common line,each memory cell is configurable to store one of 2^(N) values, where Nis two or greater; at least one memory decoder coupled to the memoryarrays, each memory decoder configured to provide bias signals toselected ones of the plurality of memory cells; a reference arrayoperatively coupled to the memory arrays and configurable to providereference signals used for programming and reading the selected ones ofthe plurality of memory cells; a plurality of local sense amplifiers,each of said plurality of local sense amplifiers being coupled to acorresponding subset of said plurality of memory cells and beingselectively coupled to said bit lines; a plurality of global bit lines,each local sense amplifier being coupled to one of said plurality ofglobal bitlines; a plurality of global sense amplifiers, each globalsense amplifier being coupled to a group of said global bitlines tocapacitively detect a voltage on one of said global bitlines and saidreference array to capacitively detect one of said reference signals togenerate an output signal indicative of the comparison between saiddetected voltage in a selected memory cell and a reference signal; and acircuit to compare the output signal from one of said global senseamplifiers corresponding to a selected memory cell and one of saidreference signals from said reference array and determining whether saidoutput signal is within a predetermined relationship of said one of saidreference signals during programming, erasing or reading of saidselected memory cell and setting a flag to indicate whether apredetermined relationship is determined.
 77. A data storage systemcomprising: a plurality of memory arrays, each memory array including aplurality of memory cells, a plurality of bit lines, a plurality ofcontrol gate lines, and at least one common line, each memory cell isconfigurable to store one of 2^(N) values, where N is two or greater; atleast one memory decoder coupled to the memory arrays, each memorydecoder configured to provide bias signals to selected ones of theplurality of memory cells; a reference array operatively coupled to thememory arrays and configurable to provide reference signals used forprogramming and reading the selected ones of the plurality of memorycells; a plurality of local sense amplifiers, each of said plurality oflocal sense amplifiers being coupled to a corresponding subset of saidplurality of memory cells and being selectively coupled to said bitlines; a plurality of global bit lines, each local sense amplifier beingcoupled to one of said plurality of global bitlines; a plurality ofglobal sense amplifiers, each global sense amplifier being coupled to agroup of said global bitlines and said reference array to generate anoutput signal indicative of the comparison between a voltage detected ina selected memory cell and a reference signal and including a circuit toequalize inputs and the output of the global sense amplifier in responseto an autozero signal; and a circuit to compare the output signal fromone of said global sense amplifiers corresponding to a selected memorycell and one of said reference signals from said reference array anddetermining whether said output signal is within a predeterminedrelationship of said one of said reference signals during a programming,erase or reading of said selected memory cell and setting a flag toindicate whether a predetermined relationship is determined.
 78. A datastorage system comprising: a plurality of memory arrays, each memoryarray including a plurality of memory cells, a plurality of bit lines, aplurality of control gate lines, and at least one common line, eachmemory cell is configurable to store one of 2^(N) values, where N is twoor greater, the memory cell being programmed in response to a shapedprogram pulse applied to said at least one common line; at least onememory decoder coupled to the memory arrays, each memory decoderconfigured to provide bias signals to selected ones of the plurality ofmemory cells; a reference array operatively coupled to the memory arraysand configurable to provide reference signals used for programming andreading the selected ones of the plurality of memory cells; a pluralityof local sense amplifiers, each of said plurality of local senseamplifiers being coupled to a corresponding subset of said plurality ofmemory cells and being selectively coupled to said bit lines; aplurality of global bit lines, each local sense amplifier being coupledto one of said plurality of global bitlines; and a plurality of globalsense amplifiers, each global sense amplifier being coupled to a groupof said global bitlines and said reference array to generate an outputsignal indicative of the comparison between a voltage detected in aselected memory cell and a reference signal.
 79. The data storage systemof claim 78 wherein said shaped program pulse has a two-step ramp rate.80. A data storage system comprising: a plurality of memory arrays, eachmemory array including a plurality of memory cells, a plurality of bitlines, a plurality of control gate lines, and at least one common line,each memory cell is configurable to store one of 2^(N) values, where Nis two or greater, the memory cell being programmed in response to ashaped program pulse applied to said at least one common line; aplurality of sense amplifiers, each sense amplifier being selectivelycoupled to a corresponding subarray to capacitively sense content of amemory cell.
 81. A data storage system comprising: a plurality of memoryarrays, each memory array including a plurality of memory cells, aplurality of bit lines, a plurality of control gate lines, and at leastone common line, each memory cell is configurable to store one of 2^(N)values, where N is two or greater, the memory cell being programmed inresponse to a shaped program pulse applied to said at least one commonline; at least one memory decoder coupled to the memory arrays, eachmemory decoder configured to provide bias signals to selected ones ofthe plurality of memory cells; a reference array operatively coupled tothe memory arrays and configurable to provide reference signals used forprogramming and reading the selected ones of the plurality of memorycells; a plurality of local sense amplifiers, each of said plurality oflocal sense amplifiers being coupled to a corresponding subset of saidplurality of memory cells and being selectively coupled to said bitlines; a plurality of global bit lines, each local sense amplifier beingcoupled to one of said plurality of global bitlines; and a plurality ofglobal sense amplifiers, each global sense amplifier being coupled to agroup of said global bitlines to capacitively detect a voltage on one ofsaid global bitlines and said reference array to capacitively detect oneof said reference signals to generate an output signal indicative of thecomparison between said detected voltage in a selected memory cell and areference signal.
 82. The data storage system of claim 81, wherein theshaped program pulse has a two-step ramp rate.
 83. The data storagesystem of claim 81 wherein the ramp rate is programmable.
 84. A datastorage system comprising: a plurality of memory arrays, each memoryarray including a plurality of memory cells, a plurality of bit lines, aplurality of control gate lines, and at least one common line, eachmemory cell is configurable to store one of 2^(N) values, where N is twoor greater, the memory cell being programmed in response to a shapedprogram pulse applied to said at least one common line; and a pluralityof sense amplifiers, each sense amplifier being selectively coupled to amemory subarray to sense with autozero content of a memory cell.
 85. Adata storage system comprising: a plurality of memory arrays, eachmemory array including a plurality of memory cells, a plurality of bitlines, a plurality of control gate lines, and at least one common line,each memory cell is configurable to store one of 2^(N) values, where Nis two or greater, the memory cell being programmed in response to ashaped program pulse applied to said at least one common line; at leastone memory decoder coupled to the memory arrays, each memory decoderconfigured to provide bias signals to selected ones of the plurality ofmemory cells; a reference array operatively coupled to the memory arraysand configurable to provide reference signals used for programming andreading the selected ones of the plurality of memory cells; a pluralityof local sense amplifiers, each of said plurality of local senseamplifiers being coupled to a corresponding subset of said plurality ofmemory cells and being selectively coupled to said bit lines; aplurality of global bit lines, each local sense amplifier being coupledto one of said plurality of global bitlines; and a plurality of globalsense amplifiers, each global sense amplifier being coupled to a groupof said global bitlines and said reference array to generate an outputsignal indicative of the comparison between a voltage detected in aselected memory cell and a reference signal and including a circuit toequalize inputs and the output of the global sense amplifier in responseto an autozero signal.
 86. The data storage system of claim 85, whereinthe shaped program pulse has a two-step ramp rate.
 87. The data storagesystem of claim 85, wherein the ramp rate is programmable.
 88. A methodof programming a multilevel memory cell, the method comprising:determine whether margin of read said memory cell matches a certaincriteria; setting a program fail flag in the event the margin does notmatch said criteria; perform binary search to determine datacorresponding to content of read memory cell; and allowing access tosaid memory cell.
 89. A method comprising: Read a fuse non-volatilememory location for configuration data in response to a page readcommand; Store said configuration data in a volatile memory location;and Using the configuration data to initiate a page read sequence for amemory.
 90. A method comprising: Read a fuse non-volatile memorylocation for configuration data in response to a page program command;Store said configuration data in a volatile memory location; and Usingthe configuration data to initiate a page programming sequence for amemory.
 91. A data storage system comprising: a plurality of memoryarrays, each memory array including a plurality of memory cells, aplurality of bit lines, a plurality of control gate lines, and at leastone common line, each memory cell is configurable to store one of 2^(N)values, where N is two or greater; and at least one memory decodercoupled to the memory arrays, each memory decoder configured to providebias signals to selected ones of the plurality of memory cells, andprovide a first one of said bias signals to one of the plurality ofmemory arrays to select ones of the plurality of memory cells thereinand provide a second one of said bias signals to another one of theplurality of memory arrays to enable reading of said another one of theplurality of memory arrays while reading said one of the plurality ofmemory arrays.
 92. The data storage system of claim 91 furthercomprising: a plurality of local sense amplifiers, each of saidplurality of local sense amplifiers being coupled to a correspondingmemory array and coupled through bit lines to memory cells in saidcorresponding memory array; and a plurality of global sense amplifiers,each global sense amplifier being coupled to a group of said pluralityof local sense amplifiers to generate an output signal indicative of thecontent of selected memory cells.
 93. The data storage system of claim92 wherein said at least one memory decoder selectively enabling two ofsaid local sense amplifiers coupled to a corresponding global senseamplifier while selectively coupling an output of one of the local senseamplifiers to said corresponding global sense amplifier and enablinganother one of said local sense amplifiers coupled to said correspondingglobal sense amplifier while selectively coupling an output of anotherone of said two local sense amplifiers.
 94. The data storage system ofclaim 92 wherein each global sense amplifier is selectively coupled to agroup of said local sense amplifiers to capacitively sense a voltage onsaid group of local sense amplifiers.
 95. The data storage system ofclaim 92 wherein each global sense amplifier is selectively coupled to agroup of said local sense amplifiers to capacitively sense a voltage onsaid group of local sense amplifiers.
 96. The data storage system ofclaim 92 wherein each global sense amplifier auto zeros an input andoutput to zero out offset of the global sense amplifier.
 97. A datastorage system comprising: a plurality of memory arrays, each memoryarray including a plurality of memory cells, a plurality of bit lines, aplurality of control gate lines, and at least one common line, eachmemory cell is configurable to store one of 2^(N) values, where N is twoor greater; and at least one memory decoder coupled to the memoryarrays, each memory decoder configured to provide bias signals toselected ones of the plurality of memory cells, and provide a first oneof said bias signals to one of the plurality of memory arrays to selectones of the plurality of memory cells therein and provide a second oneof said bias signals to another one of the plurality of memory arrays toenable writing of said another one of the plurality of memory arrayswhile reading said one of the plurality of memory arrays.
 98. The datastorage system of claim 97 further comprising: a plurality of localsense amplifiers, each of said plurality of local sense amplifiers beingcoupled to a corresponding memory array and coupled through bit lines tomemory cells in said corresponding memory array; and a plurality ofglobal sense amplifiers, each global sense amplifier being coupled to agroup of said plurality of local sense amplifiers to generate an outputsignal indicative of the content of selected memory cells.
 99. The datastorage system of claim 98 wherein said at least one memory decoderselectively enabling two of said local sense amplifiers coupled to acorresponding global sense amplifier while selectively coupling anoutput of one of the local sense amplifiers to said corresponding globalsense amplifier and enabling another one of said local sense amplifierscoupled to said corresponding global sense amplifier while selectivelycoupling an output of another one of said two local sense amplifiers.100. The data storage system of claim 99 wherein each global senseamplifier is selectively coupled to a group of said local senseamplifiers to capacitively sense a voltage on said group of local senseamplifiers.
 101. The data storage system of claim 98 wherein each globalsense amplifier is selectively coupled to a group of said local senseamplifiers to capacitively sense a voltage on said group of local senseamplifiers.
 102. The data storage system of claim 98 wherein each globalsense amplifier auto zeros an input and output to zero out offset of theglobal sense amplifier.
 103. A data storage system comprising: aplurality of memory arrays, each memory array including a plurality ofmemory cells, a plurality of bit lines, a plurality of control gatelines, and at least one common line, each memory cell is configurable tostore one of 2^(N) values, where N is two or greater; and at least onememory decoder coupled to the memory arrays, each memory decoderconfigured to provide bias signals to selected ones of the plurality ofmemory cells, and provide a first one of said bias signals to one of theplurality of memory arrays to select ones of the plurality of memorycells therein and provide a second one of said bias signals to anotherone of the plurality of memory arrays to enable erasing of said anotherone of the plurality of memory arrays while reading said one of theplurality of memory arrays.
 104. The data storage system of claim 103further comprising: a plurality of local sense amplifiers, each of saidplurality of local sense amplifiers being coupled to a correspondingmemory array and coupled through bit lines to memory cells in saidcorresponding memory array; and a plurality of global sense amplifiers,each global sense amplifier being coupled to a group of said pluralityof local sense amplifiers to generate an output signal indicative of thecontent of selected memory cells.
 105. The data storage system of claim104 wherein said at least one memory decoder selectively enabling two ofsaid local sense amplifiers coupled to a corresponding global senseamplifier while selectively coupling an output of one of the local senseamplifiers to said corresponding global sense amplifier and enablinganother one of said local sense amplifiers coupled to said correspondingglobal sense amplifier while selectively coupling an output of anotherone of said two local sense amplifiers.
 106. The data storage system ofclaim 105 wherein each global sense amplifier is selectively coupled toa group of said local sense amplifiers to capacitively sense a voltageon said group of local sense amplifiers.
 107. The data storage system ofclaim 104 wherein each global sense amplifier is selectively coupled toa group of said local sense amplifiers to capacitively sense a voltageon said group of local sense amplifiers.
 108. The data storage system ofclaim 104 wherein each global sense amplifier auto zeros an input andoutput to zero out offset of the global sense amplifier.
 109. A datastorage system comprising: a plurality of memory arrays, each memoryarray including a plurality of memory cells, a plurality of bit lines, aplurality of control gate lines, and at least one common line, eachmemory cell is configurable to store one of 2^(N) values, where N is twoor greater; and at least one memory decoder coupled to the memoryarrays, each memory decoder configured to provide bias signals toselected ones of the plurality of memory cells, and provide a first oneof said bias signals to one of the plurality of memory arrays to selectones of the plurality of memory cells therein and provide a second oneof said bias signals to another one of the plurality of memory arrays toenable erasing of said another one of the plurality of memory arrayswhile erasing said one of the plurality of memory arrays.
 110. The datastorage system of claim 109 further comprising: a plurality of localsense amplifiers, each of said plurality of local sense amplifiers beingcoupled to a corresponding memory array and coupled through bit lines tomemory cells in said corresponding memory array; and a plurality ofglobal sense amplifiers, each global sense amplifier being coupled to agroup of said plurality of local sense amplifiers to generate an outputsignal indicative of the content of selected memory cells.
 111. The datastorage system of claim 110 wherein said at least one memory decoderselectively enabling two of said local sense amplifiers coupled to acorresponding global sense amplifier while selectively coupling anoutput of one of the local sense amplifiers to said corresponding globalsense amplifier and enabling another one of said local sense amplifierscoupled to said corresponding global sense amplifier while selectivelycoupling an output of another one of said two local sense amplifiers.112. The data storage system of claim 111 wherein each global senseamplifier is selectively coupled to a group of said local senseamplifiers to capacitively sense a voltage on said group of local senseamplifiers.
 113. The data storage system of claim 110 wherein eachglobal sense amplifier is selectively coupled to a group of said localsense amplifiers to capacitively sense a voltage on said group of localsense amplifiers.
 114. The data storage system of claim 110 wherein eachglobal sense amplifier auto zeros an input and output to zero out offsetof the global sense amplifier.
 115. A data storage system comprising: aplurality of memory arrays, each memory array including a plurality ofmemory cells, a plurality of bit lines, a plurality of control gatelines, and at least one common line, each memory cell is configurable tostore one of 2^(N) values, where N is two or greater; and at least onememory decoder coupled to the memory arrays, each memory decoderconfigured to provide bias signals to selected ones of the plurality ofmemory cells, and provide a first one of said bias signals to one of theplurality of memory arrays to select ones of the plurality of memorycells therein and provide a second one of said bias signals to anotherone of the plurality of memory arrays to enable writing of said anotherone of the plurality of memory arrays while writing said one of theplurality of memory arrays.
 116. The data storage system of claim 115further comprising: a plurality of local sense amplifiers, each of saidplurality of local sense amplifiers being coupled to a correspondingmemory array and coupled through bit lines to memory cells in saidcorresponding memory array; and a plurality of global sense amplifiers,each global sense amplifier being coupled to a group of said pluralityof local sense amplifiers to generate an output signal indicative of thecontent of selected memory cells.
 117. The data storage system of claim116 wherein said at least one memory decoder selectively enabling two ofsaid local sense amplifiers coupled to a corresponding global senseamplifier while selectively coupling an output of one of the local senseamplifiers to said corresponding global sense amplifier and enablinganother one of said local sense amplifiers coupled to said correspondingglobal sense amplifier while selectively coupling an output of anotherone of said two local sense amplifiers.
 118. The data storage system ofclaim 117 wherein each global sense amplifier is selectively coupled toa group of said local sense amplifiers to capacitively sense a voltageon said group of local sense amplifiers.
 119. The data storage system ofclaim 116 wherein each global sense amplifier is selectively coupled toa group of said local sense amplifiers to capacitively sense a voltageon said group of local sense amplifiers.
 120. The data storage system ofclaim 116 wherein each global sense amplifier auto zeros an input andoutput to zero out offset of the global sense amplifier.
 121. A datastorage system comprising: a plurality of memory arrays, each memoryarray including a plurality of memory cells, a plurality of bit lines, aplurality of control gate lines, and at least one common line, eachmemory cell is configurable to store one of 2^(N) values, where N is twoor greater; and at least one memory decoder coupled to the memoryarrays, each memory decoder configured to provide bias signals toselected ones of the plurality of memory cells, and provide a first oneof said bias signals to one of the plurality of memory arrays to selectones of the plurality of memory cells therein and provide a second oneof said bias signals to another one of the plurality of memory arrays toenable erasing of said another one of the plurality of memory arrayswhile writing said one of the plurality of memory arrays.
 122. The datastorage system of claim 121 further comprising: a plurality of localsense amplifiers, each of said plurality of local sense amplifiers beingcoupled to a corresponding memory array and coupled through bit lines tomemory cells in said corresponding memory array; and a plurality ofglobal sense amplifiers, each global sense amplifier being coupled to agroup of said plurality of local sense amplifiers to generate an outputsignal indicative of the content of selected memory cells.
 123. The datastorage system of claim 122 wherein said at least one memory decoderselectively enabling two of said local sense amplifiers coupled to acorresponding global sense amplifier while selectively coupling anoutput of one of the local sense amplifiers to said corresponding globalsense amplifier and enabling another one of said local sense amplifierscoupled to said corresponding global sense amplifier while selectivelycoupling an output of another one of said two local sense amplifiers.124. The data storage system of claim 123 wherein each global senseamplifier is selectively coupled to a group of said local senseamplifiers to capacitively sense a voltage on said group of local senseamplifiers.
 125. The data storage system of claim 122 wherein eachglobal sense amplifier is selectively coupled to a group of said localsense amplifiers to capacitively sense a voltage on said group of localsense amplifiers.
 126. The data storage system of claim 122 wherein eachglobal sense amplifier auto zeros an input and output to zero out offsetof the global sense amplifier.